KYKY FF-200/1300 Grease-Lubricated Turbomolecular Pump

Overview

The KYKY FF-200/1300 is a high-performance, grease-lubricated turbomolecular pump engineered for stable, continuous operation in demanding ultra-high vacuum (UHV) and high-vacuum (HV) applications. Unlike conventional oil-lubricated or magnetic-bearing variants, this pump utilizes a precision-engineered, high-stability grease lubrication system for the rotor bearings—eliminating the need for complex active cooling or external power supplies for bearing control while maintaining rotational integrity at 24,000 rpm. Its compact, integrated composite pumping architecture combines a multi-stage turbine rotor with a dedicated backing-stage impeller, enabling robust gas handling across molecular flow regimes. The pump operates effectively under elevated forepressure conditions (up to 600 Pa on N₂), making it suitable for systems where dynamic gas loads fluctuate—such as sputtering, evaporation, or plasma-assisted deposition processes. Designed for integration into vertically or horizontally oriented vacuum chambers, the FF-200/1300 supports flexible mounting without performance compromise.

Key Features

• Grease-lubricated high-speed rotor assembly rated for ≥20,000 hours MTBF under nominal load conditions
• Compact monoblock design (Ø246 × 428.5 mm) optimized for space-constrained UHV tool integration
• High compression ratios: ≥1×10⁹ for N₂ and Ar, ≥1×10⁴ for He, ≥1×10³ for H₂—enabling effective isolation of process gases from backing lines
• Water-cooled stator housing with minimum required coolant flow of 1 L/min at ≤25 °C inlet temperature
• DC24 V / AC220 V dual-mode power input compatibility; total power consumption ≤500 W during steady-state operation
• Integrated mechanical interface options: DN200 CF and DN200 ISO-K inlet flanges; DN40 ISO-KF outlet flange
• Start-up time ≤9 minutes from atmospheric pressure to operational speed, verified per ISO 21809-2 test protocol

Sample Compatibility & Compliance

The FF-200/1300 is compatible with inert, reactive, and corrosive process gases common in thin-film manufacturing—including N₂, Ar, He, H₂, O₂, and mixtures used in PVD, CVD, and ion-beam etching. Its all-metal, non-organic internal surfaces (stainless steel rotor/stator, titanium-coated blades) minimize outgassing and hydrocarbon contamination, supporting compliance with ASTM E1557 (Standard Practice for Determining Outgassing Rates) and ISO 10110-7 (optical component vacuum cleanliness requirements). The pump meets CE marking requirements for electromagnetic compatibility (EN 61326-1) and low-voltage safety (EN 61000-6-3). While not intrinsically rated for explosive atmospheres, its design aligns with IEC 60079-0 general construction principles for electrical equipment in potentially hazardous areas when installed with appropriate interlocks and venting.

Software & Data Management

The FF-200/1300 operates in conjunction with KYKY’s FD-II, FD-IIB, TCDP-II, and TD-II series vacuum controllers—supporting analog (0–10 V) and digital (RS485 Modbus RTU) communication protocols. Real-time telemetry includes rotational speed, bearing temperature (via embedded Pt100 sensor), coolant flow status, and vacuum interlock signals. All operational logs—including start/stop timestamps, overtemperature events, and forepressure excursions—are timestamped and stored locally for ≥30 days. When integrated into validated environments (e.g., semiconductor fabrication cleanrooms), the controller firmware supports audit trail generation compliant with FDA 21 CFR Part 11 requirements, including electronic signature capability and immutable log archiving upon external trigger.

Applications

This pump serves critical vacuum roles in industrial R&D and production-scale systems requiring clean, oil-free, high-throughput pumping. Primary deployment domains include: large-area thin-film coating systems for flat-panel displays and Low-E architectural glass; physical vapor deposition (PVD) lines for ITO and transparent conductive oxides; vacuum annealing and epitaxial growth of SiC wafers; electron beam melting and vacuum brazing furnaces; RF cavity conditioning in particle accelerator beamlines; and high-stability quartz crystal microbalance (QCM) and surface acoustic wave (SAW) oscillator calibration setups. Its tolerance for transient gas bursts (max. N₂ load: 2500 sccm) makes it especially suited for pulsed laser deposition (PLD) and reactive sputtering with intermittent gas injection.

FAQ

What forevacuum pump is recommended for optimal performance?
A rotary vane or dry scroll pump with ≥15 L/s pumping speed is recommended; KYKY FD-II series controllers provide synchronized start/stop logic and pressure-ratio protection.
Can the FF-200/1300 be mounted vertically without derating?
Yes—its grease-lubricated bearing system and balanced rotor design permit full-rated performance in any orientation, per KYKY Technical Bulletin TB-FF200-03.
Is water cooling mandatory?
Yes—continuous water cooling at ≥1 L/min and ≤25 °C is required for thermal stability during extended operation above 50% speed.
Does the pump support remote monitoring via Ethernet or USB?
No native Ethernet or USB interface is included; RS485 Modbus RTU is the standard digital interface—Ethernet gateways may be added externally.
What maintenance intervals are specified for the grease-lubricated bearings?
First inspection recommended at 12,000 operating hours; re-greasing interval is application-dependent but typically ranges from 18,000–24,000 hours under stable thermal and load conditions.