Kashiyama SDL36E60 High-Capacity Oil-Free Vacuum Pump

Overview

The Kashiyama SDL36E60 is a high-capacity, oil-free rotary vane vacuum pump engineered for industrial and advanced laboratory applications requiring rapid evacuation of large-volume chambers. Designed using Kashiyama’s proprietary dry compression architecture, the SDL36E60 operates without lubricating oil in the pumping chamber—eliminating hydrocarbon contamination, reducing maintenance intervals, and ensuring compatibility with solvent-laden, reactive, or ultra-clean process environments. Its core principle relies on synchronized rotary vanes rotating within an elliptical stator housing to generate continuous volumetric displacement, achieving stable, pulsation-minimized flow across wide pressure ranges—from atmosphere down to 0.8 Pa (6 × 10⁻³ Torr). This performance envelope makes it especially suited for vacuum processes in flat panel display (FPD) manufacturing, semiconductor wafer handling, large-scale lyophilization chambers, and high-throughput vacuum drying systems where cycle time reduction and long-term operational reliability are mission-critical.

Key Features

• Oil-free operation ensures zero hydrocarbon backstreaming—critical for solvent recovery, cleanroom-compatible vacuum systems, and analytical instrumentation interfacing.
• Rated pumping speed of 60,000 L/min at atmospheric pressure enables rapid initial evacuation of chambers exceeding 10 m³ volume, significantly compressing process cycle times.
• Robust cast-iron frame and precision-machined rotor assembly provide mechanical stability under continuous duty at full load, supporting 24/7 operation in production environments.
• Modular design allows parallel configuration with multiple units via shared vacuum manifold—scalable to >150,000 L/min total capacity per system (custom-engineered upon request).
• Integrated thermal protection, vibration-damped motor mounting, and IP54-rated electrical enclosure ensure compliance with IEC 60034 and ISO 8573-1 Class 0 air purity requirements.

Sample Compatibility & Compliance

The SDL36E60 is compatible with non-corrosive, non-condensable, and low-vapor-pressure process gases—including nitrogen, argon, dry air, and residual solvents such as acetone, isopropanol, and ethyl acetate—provided inlet gas temperature remains below 40 °C and particulate loading is minimized via upstream filtration. It is not intended for use with halogenated compounds, strong oxidizers (e.g., O₃, Cl₂), or acidic vapors without optional corrosion-resistant coatings. The pump meets JIS B 8341-1:2018 for vacuum pump performance testing and conforms to CE marking requirements under the EU Machinery Directive 2006/42/EC and Electromagnetic Compatibility Directive 2014/30/EU. Optional ATEX-certified variants (II 2G Ex db IIB T4 Gb) are available for Zone 1 hazardous area deployment.

Software & Data Management

While the base SDL36E60 operates as a standalone unit with analog control inputs (0–10 VDC for speed modulation) and digital status outputs (RS-485 Modbus RTU), integration-ready configurations support supervisory control via PLC or SCADA systems. Optional Kashiyama K-VacLink™ interface module provides real-time monitoring of motor current, bearing temperature, vacuum level (via external gauge input), and runtime hours—enabling predictive maintenance scheduling and audit-ready logging aligned with GLP/GMP documentation standards. All data exports comply with IEEE 1344-1995 time-stamping protocols and can be archived in CSV or XML format for traceability in regulated environments (e.g., pharmaceutical lyophilizer validation per USP ).

Applications

• Large-area vacuum deposition systems for OLED and LCD manufacturing lines.
• High-volume solvent removal in pharmaceutical freeze-dryers (≥50 L shelf capacity).
• Evacuation of multi-chamber load-lock systems in semiconductor front-end processing tools.
• Vacuum-assisted resin transfer molding (VARTM) for aerospace composite fabrication.
• Central vacuum supply for campus-wide laboratory networks serving electron microscopy suites and surface analysis labs.

FAQ

What is the recommended inlet filtration specification for optimal service life?
A 5 µm coalescing filter plus activated carbon trap is advised for solvent-laden streams; particulate filters must be installed upstream of the pump inlet per ISO 8573-7 Class 4 requirements.
Can the SDL36E60 be operated continuously at ultimate vacuum (0.8 Pa)?
Yes—its dry compression design permits sustained operation at ultimate pressure without thermal runaway, provided ambient cooling air flow exceeds 1.2 m³/min and inlet gas load remains below 10 g/h water vapor equivalent.
Is nitrogen purge functionality standard or optional?
Nitrogen purging of the drive-end seal cavity is standard on all SDL36E60 units to prevent process gas ingress into bearings; full-chamber N₂ sweep requires external piping and flow control valve (kit available as accessory K-N2-SDL36).
Does the pump meet FDA 21 CFR Part 11 requirements for electronic records?
When equipped with K-VacLink™ and configured with user-accessible audit trails, timestamped event logs, and role-based authentication, the system supports Part 11 compliance for electronic signatures and record retention in validated pharmaceutical processes.