Empowering Scientific Discovery

Beijing CAS-Arbor Technology Co., Ltd.

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BrandZhongke Aobo
OriginBeijing, China
ModelZ5KQX
Chamber Volume2–5 L
Heating Power150–500 W
Cleaning Temperature100 °C
External Dimensions (L×W×D)450 × 450 × 250 mm
RF Power150 W / 500 W
Operating Frequency40 kHz / 13.56 MHz
Vacuum Range≤30 Pa / ≤50 Pa
Chamber MaterialHigh-Purity Quartz
Gas Flow Control0–50 mL/min (dual thermal mass flow sensors)
Vacuum Gauge Range1×10⁵ Pa to 1×10⁻¹ Pa (Pirani gauge)
Cooling MethodForced Air Cooling
Control Interface7-inch Touchscreen HMI
Power SupplyAC 220 V (110 V optional)
Max. Operating Current≤3.5 A (excl. vacuum pump)
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