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| Brand | Nano analytik |
|---|---|
| Origin | Germany |
| Model | AFM Series (SmartProbe Platform) |
| Instrument Type | Atomic Force Microscope |
| Vertical Position Detection Noise | 0.01 nm RMS |
| Maximum Sample Diameter | ≤10 cm |
| Scanner Range (Adeona) | 15 µm × 15 µm × 4 µm |
| Dimensions (Vacuum-Compatible Version) | 140 mm × 100 mm × 60 mm |
| Integrated Actuation & Sensing | Piezoresistive readout + bimaterial excitation on SmartProbe |
| XYZ Nanopositioning Range (Vacuum Variant) | 20 µm × 10 µm × 10 µm |
| Brand | Nano analytik |
|---|---|
| Origin | Germany |
| Model | SPL |
| Instrument Type | Atomic Force Microscope-based Scanning Probe Lithography System |
| Positioning Detection Noise | 0.01 nm (X, Y, Z) |
| Maximum Sample Diameter | 150 mm (6 in) |
| Stage Travel Range | 18 mm × 18 mm (expandable to 150 mm × 150 mm) |
| Minimum Feature Size | 5 nm (verified) |
| Direct-Write Speed | 300 µm/s |
| Overlay Accuracy | < 7 nm |
| Stitching Accuracy | < 10 nm |
| Maximum Writing Area per Field | 200 µm × 200 µm |
| Footprint | 80 cm × 100 cm × 190 cm |
| AFM Imaging Range | 10 µm × 10 µm × 5 µm (expandable to 200 µm × 200 µm) |
| Vertical RMS Noise | 0.01 nm |
| Closed-Loop Scan Linearity | 99.7% |
| Real-Time FPGA Feedback Bandwidth | 8 MHz |
| Data Acquisition Resolution | 16-bit (amplitude/phase) |
| Output Formats | BMP, PNG, JPG, TXT |
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