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| Brand | Attolight |
|---|---|
| Origin | Switzerland |
| Model | Santis 300 |
| Wafer Handling | Fully automated for 150 mm, 200 mm, and 300 mm wafers |
| Positioning Accuracy | <10 µm |
| Warpage Compensation | Real-time topography mapping and stage tilt correction |
| Acquisition Modes | Full-Field Brush (FWBrush), Averaged Pixel (AWPix), and Multi-Point Spot Scanning |
| CL Spectral Range | Typically 200–1100 nm (configurable with grating options) |
| Detector | Back-illuminated CCD or sCMOS with high quantum efficiency in UV-VIS-NIR |
| Integration with SEM | Synchronized electron beam scanning and photon collection via fiber-coupled monochromator or spectrometer |
| Brand | Attolight |
|---|---|
| Origin | Switzerland |
| Model | Chronos |
| Electron Gun | Schottky Field Emission with Ultrafast Laser-Driven Pulsing |
| Spatial Resolution | <10 nm (3–10 keV) |
| Temporal Resolution | 2 ps (streak camera), 20 ps FWHM (TCSPC) |
| Spectral Range | UV–IR (200–1700 nm) |
| Detector Options | Streak Camera + TCSPC Modules |
| Automation | Fully Automated CW/Pulsed Mode Switching |
| Compliance | Designed for GLP/GMP-adjacent nanophotonics labs, compatible with ASTM E2845 and ISO/IEC 17025 traceability frameworks |
| Dimensions | 1437 × 1039 mm (footprint), 2236 × 2426 mm (recommended lab space) |
| Weight | ~1170 kg |
| Brand | Attolight |
|---|---|
| Origin | Switzerland |
| Model | Monch |
| Optical Collection NA | >0.4 |
| Mirror Working Distance | 300 µm |
| Mirror Reflectivity | up to 90% (200 nm – 1.7 µm) |
| Positioning Accuracy | 100 nm (absolute encoder) |
| XY/Z Travel | 30 mm (X), ±1.5 mm (Y/Z) |
| Max Imaging Speed | 900 Hz (128×128 in 18 s) |
| Compatible STEM Platforms | JEOL, Thermo Fisher Scientific (FEI), Hitachi, Nion, VG |
| Minimum Pole-Piece Gap | 4.5 mm |
| Fiber Interface | Asymmetric fiber bundle reconfigured for spectrometer slit alignment |
| Software | Windows 10+ (64-bit), Gatan DigitalMicrograph® integration, Python API (optional encrypted) |
| Brand | Attolight |
|---|---|
| Origin | Switzerland |
| Model | Allalin |
| Electron Source | Schottky thermal field emission gun |
| Beam Energy Range | 1–10 keV |
| Minimum Probe Size | 3 nm @ 10 kV |
| Working Distance | 3 mm |
| Field of View | up to 300 µm |
| Optical NA | 0.71 (f/0.5) |
| Spectral Range | 200–1700 nm |
| Spectral Acquisition Speed | >900 spectra/s (UV-Vis), >180 spectra/s (NIR) |
| EBIC Current Detection Limit | 100 fA |
| Temperature Range (Cryostat) | 10 K to 300 K |
| Positioning Precision | 1 nm step, 100 nm repeatability over full range |
| Vacuum System | Ion pump (electron column) + turbomolecular pump (sample chamber) |
| Data Export Format | HDF5, TIFF, CSV |
| Software Compliance | Audit-trail enabled, metadata-embedded, GLP/GMP-ready |
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