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| Brand | Beishide Instrument |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Direct Manufacturer |
| Model | BSD-MASS |
| Quadrupole Mass Analyzer | INFICON (USA-manufactured, with Certificate of Origin & Factory Calibration Report) |
| Mass Range | Standard 1–100 amu |
| Filament | Dual Iridium-coated filaments (active/standby, software-switchable) |
| Resolution | <0.5 ppm at 40 amu |
| Scan Speed | Up to 1.8 ms/amu, step size 0.1 amu |
| Minimum Detectable Partial Pressure | 2 × 10⁻¹⁵ Torr (4 s dwell time) |
| Sample Flow Rate | Standard down to 2 SCCM |
| Response Time | <1 s at ≤2 SCCM flow |
| Precision Splitting System | Integrated high-accuracy flow splitter |
| Soft Ionization | Electron energy digitally adjustable (0–100 eV) |
| Turbo Molecular Pump | Edwards, 85 L/s, 100,000 RPM, base pressure 1 × 10⁻¹² mbar |
| Dry Scroll Pump | 20 L/s, base pressure 1 × 10⁻¹ mbar |
| Vacuum Chamber | Monolithic, weld-free heated chamber (bakeable to 150 °C) |
| Inlet Interface | 1.2 m passivated stainless steel capillary (anti-condensation & anti-clogging design) |
| Software | INFICON OEM platform (English), TCP/IP communication |
| Dimensions | 510 mm (H) × 520 mm (L) × 225 mm (W), Weight: 30 kg |
| Brand | Beishide Instrument |
|---|---|
| Origin | Beijing, China |
| Manufacturer | Beishide Instrument Co., Ltd. |
| Model | BSD-MASS |
| Mass Range | 1–100 amu (standard), optional up to 200 or 300 amu |
| Filament | Dual iridium-coated filaments (hot-swap via software) |
| Resolution | <0.5 ppm at 40 amu |
| Scan Speed | 1.8 ms/amu, step size 0.1 amu |
| Minimum Detectable Partial Pressure | 2 × 10⁻¹⁵ Torr (4 s dwell time) |
| Sample Flow Rate | 0.2–2 SCCM (micro-flow optimized) |
| Response Time | <1 s at ≤2 SCCM |
| Splitting System | High-precision electronic flow splitter |
| Ionization | Electron energy software-adjustable (soft ionization mode supported) |
| Turbomolecular Pump | Edwards nTX85, 85 L/s, 100,000 RPM, base pressure 1 × 10⁻¹² mbar |
| Dry Scroll Pump | 20 L/s, base pressure 1 × 10⁻¹ mbar |
| Chamber | Monolithic heated vacuum chamber (no welds), bake-out temperature 150 °C |
| Inlet | 1.2 m passivated stainless-steel capillary, condensation- and clog-resistant design |
| Software | INFICON Vacuum & Process Suite (English), TCP/IP communication |
| Dimensions | 510 mm (H) × 520 mm (L) × 225 mm (W), Weight: 30 kg |
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