KASHIYAMA SDE30N20 Oil-Free Dry Vacuum Pump

Overview

The KASHIYAMA SDE30N20 is a high-capacity, oil-free dry vacuum pump engineered for demanding industrial and advanced laboratory applications requiring clean, contamination-free vacuum generation. Designed around Kashiyama’s proprietary dry rotary vane architecture, the SDE30N20 eliminates reliance on hydrocarbon-based lubricants—ensuring zero oil backstreaming, minimal maintenance intervals, and full compatibility with reactive, corrosive, or ultra-high-purity process gases (e.g., Cl₂, NH₃, SiH₄, O₂, and semiconductor process chemistries). Its operational principle relies on precision-machined vanes rotating within an elliptical stator chamber, dynamically sealing against the housing to achieve continuous volumetric displacement without liquid-phase lubrication. With a rated pumping speed of 50,000 L/min at both 50 Hz and 60 Hz operation and an ultimate pressure of ≤0.5 Pa, the SDE30N20 serves as a primary roughing or high-throughput backing pump for diffusion, turbomolecular, and cryogenic systems in vacuum metallurgy, thin-film deposition (PVD/CVD), electron microscopy sample preparation, and large-scale analytical instrumentation.

Key Features

• Oil-free dry operation ensures zero hydrocarbon contamination—critical for UHV-compatible processes and ISO Class 5+ cleanroom environments.
• Integrated nitrogen purge system (0–80 L/min, 0.1–0.7 MPa gauge) enables active sealing against corrosive vapors and prevents polymerization buildup in aggressive gas handling.
• Robust cast-iron frame with IP54-rated motor enclosure provides mechanical stability and protection against dust ingress and incidental water exposure.
• Dual-flange configuration: NW160 inlet for high-conductance connection to vacuum chambers or foreline manifolds; NW40 outlet optimized for integration with secondary pumps or exhaust abatement units.
• Active water-cooling circuit (4–8 L/min, ΔP ≥ 0.3 MPa) maintains thermal equilibrium during sustained duty cycles—supporting continuous operation at rated capacity.
• Compliant with IEC 60034-1 (rotating electrical machines) and JIS B 8341-1 (vacuum pump performance testing standards).

Sample Compatibility & Compliance

The SDE30N20 is certified for use with non-explosive, non-toxic, and moderately corrosive gases when operated within specified purge, cooling, and pressure differential limits. It meets material compatibility requirements per ASTM F2223 (standard guide for selection of elastomers in vacuum service) for internal fluoropolymer-coated components and fluorinated synthetic oil (DP/MB series). While not intrinsically safe, it may be deployed in Class 1, Division 2 hazardous locations when installed with appropriate purge interlocks and grounding per NEC Article 500. The pump supports GLP-compliant vacuum system validation protocols—including leak rate verification (per ISO 20484), base pressure mapping, and pumping speed calibration traceable to NMIJ (National Metrology Institute of Japan).

Software & Data Management

The SDE30N20 operates as a standalone hardware unit without embedded digital control firmware. However, its electrical interface (HK4/O-004-M Tyco connector and DB-25PF-N signal port) supports integration into centralized vacuum system controllers via discrete I/O and analog feedback channels (e.g., temperature, current draw, coolant flow status). When deployed in FDA-regulated environments (e.g., pharmaceutical lyophilization support or packaging line vacuum validation), the pump can be incorporated into 21 CFR Part 11–compliant architectures using external PLCs with audit-trail-enabled HMI systems. All operational parameters—including runtime hours, purge gas consumption logs, and motor load profiles—are recordable through third-party SCADA platforms compliant with ISA-88 and ISA-95 frameworks.

Applications

• Backing pump for high-vacuum systems in surface science laboratories (XPS, AES, LEED).
• Roughing stage in semiconductor fabrication tools requiring particle-free vacuum environments (e.g., ion implanters, etch chambers).
• Continuous vacuum supply for large-volume freeze-dryers and vacuum ovens in biopharmaceutical manufacturing.
• Gas recovery and recirculation loops in plasma-enhanced chemical vapor deposition (PECVD) reactors.
• High-throughput degassing of composite resins and aerospace-grade adhesives prior to autoclave curing.

FAQ

Is the SDE30N20 suitable for pumping solvent vapors or acidic gases?
Yes—provided the integrated nitrogen purge system is activated at recommended pressure (0.1–0.2 MPa gauge) and flow (≥20 L/min), and that all wetted materials (vanes, housing coating, seals) remain within their chemical resistance specifications per Kashiyama’s Material Compatibility Chart.
What cooling water quality is required?
Deionized or softened water with conductivity < 50 µS/cm and hardness < 1°dH is recommended to prevent scaling in the internal heat exchanger. Continuous filtration (5–10 µm) and temperature stabilization (10–25 °C) are mandatory for rated performance.
Can this pump operate unattended for extended periods?
Yes—when integrated with external monitoring for coolant flow, motor winding temperature, and nitrogen supply continuity, the SDE30N20 supports >1,000-hour mean time between unscheduled interventions under nominal load conditions.
Does Kashiyama provide calibration certificates for pumping speed or ultimate pressure?
Factory calibration reports (traceable to NMIJ) are available upon request and include measured pumping speed curves at 50/60 Hz and ultimate pressure verification per JIS B 8341-1 Annex B.
What is the expected service interval for vane replacement?
Under continuous operation with proper purge and cooling, fluoropolymer-coated vanes typically require inspection every 6,000 operating hours and replacement every 12,000–18,000 hours, depending on gas composition and duty cycle severity.