Common Laboratory Equipment
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| Brand | BEQ |
|---|---|
| Origin | Anhui, China |
| Model | BTF-1200C-SLD |
| Max Temperature | 1200 °C (quartz tube), 1100 °C (alloy steel pressure tube) |
| Temperature Control Accuracy | ±1 °C |
| Max Power | 3 kW |
| Heating Rate | up to 50 °C/s (during rapid insertion), 30 °C/s (100–1000 °C under standard ramp) |
| Heating Element | Imported Kanthal A1 resistance wire |
| Control System | Fuzzy PID with auto-tuning + 30-segment programmable controller |
| Configuration | Horizontal sliding rail design for rapid thermal cycling |
| Brand | BEQ |
|---|---|
| Origin | Anhui, China |
| Model | BTF-1400C |
| Maximum Temperature | 1400 °C |
| Temperature Control Accuracy | ±1 °C |
| Rated Power | 5 kW |
| Heating Rate | ≤10 °C/min below 1200 °C |
| Heating Element | Silicon Carbide (SiC) Rods |
| Tube Dimensions | Φ60 mm × 1000 mm or Φ80 mm × 1000 mm |
| Furnace Chamber Material | High-Purity Alumina (Al₂O₃) with US-Imported High-Temperature Alumina Coating |
| Cooling System | Dual-layer shell with forced-air cooling |
| Safety Features | Over-temperature and thermocouple failure alarm |
| Brand | BEQ |
|---|---|
| Origin | Anhui, China |
| Model | BTF-1400C-A |
| Maximum Temperature | 1400 °C (1 hr rating) |
| Temperature Control Accuracy | ±1 °C |
| Rated Power | 5.2 kW |
| Heating Rate | ≤10 °C/min below 1000 °C |
| Heating Element | Silicon Carbide (SiC) Rods |
| Control System | Fuzzy PID with auto-tuning, 30-segment programmable ramp-soak profile, over-temperature and thermocouple break alarms |
| Tube Inner Diameter | Φ80 mm |
| Sealing Options | Clamp-type or hinged flange |
| Safety Features | Integrated pressure relief valve (setpoint adjustable) |
| Brand | BEQ |
|---|---|
| Origin | Anhui, China |
| Model | BTF-1400C-II |
| Maximum Temperature | 1400 °C |
| Temperature Uniformity | ±1 °C |
| Total Power Rating | 10 kW |
| Heating Rate | ≤10 °C/min up to 1200 °C |
| Heating Element | Silicon Carbide (SiC) Rods |
| Control System | Fuzzy PID with Auto-Tuning, 30-Stage Programmable Controller, Over-Temperature & Thermocouple Break Protection |
| Tube Dimensions | Φ60 mm × 1200 mm or Φ80 mm × 1200 mm |
| Furnace Chamber Material | High-Purity Alumina (Al₂O₃) with US-Imported High-Temperature Alumina Coating |
| Cooling | Dual-Layer Shell with Forced-Air Cooling System |
| Structural Support | Integrated Flange Mounting Bracket for Load Distribution |
| Brand | BEQ |
|---|---|
| Origin | Anhui, China |
| Model | BTF-1400C-III |
| Max Temperature | 1400 °C |
| Temperature Uniformity | ±1 °C |
| Max Power | 13 kW |
| Heating Rate | ≤10 °C/min up to 1200 °C |
| Heating Element | Silicon Carbide (SiC) Rods |
| Control System | Fuzzy PID with auto-tuning, 30-segment programmable controller, over-temperature & thermocouple-failure alarm |
| Tube Dimensions | Φ60 mm × 1200 mm or Φ80 mm × 1200 mm |
| Chamber Material | High-purity Al₂O₃ ceramic tube with US-sourced high-temperature alumina coating |
| Cooling | Dual-layer water-cooled outer shell with forced-air interlayer cooling |
| Compliance | Designed for ISO/IEC 17025-compliant lab environments |
| Brand | BEQ |
|---|---|
| Origin | Anhui, China |
| Model | BTF-1400C-S |
| Maximum Temperature | 1400 °C |
| Temperature Control Accuracy | ±1 °C |
| Rated Power | 4 kW |
| Heating Rate | ≤10 °C/min below 1200 °C, ≤5 °C/min from 1200–1300 °C |
| Heating Element | Silicon Carbide (SiC) Rods |
| Control System | Fuzzy PID with Auto-Tuning, 30-Stage Programmable Controller, Over-Temperature & Thermocouple Failure Protection |
| Tube Inner Diameter | Φ60 mm |
| Chamber Lining Material | High-Purity Alumina (Al₂O₃) with US-Imported High-Temperature Alumina Coating |
| Cooling | Dual-Layer Air-Cooled Housing |
| Structural Design | Flanged Support Bracket for Load Distribution |
| Brand | BEQ |
|---|---|
| Origin | Anhui, China |
| Model | BTF-1500C |
| Maximum Temperature | 1500 °C |
| Temperature Control Accuracy | ±1 °C |
| Rated Power | 2.5 kW |
| Heating Rate (to Max Temp) | ≤10 °C/min |
| Heating Element | Silicon Carbide (SiC) Rods |
| Control System | Fully Automatic PID Controller with Self-Tuning Functionality |
| Thermocouple Type | Type S (Platinum/Rhodium) |
| Over-Temperature & Thermocouple Break Protection | Yes |
| Tube Inner Diameter | Φ50 mm |
| Furnace Tube Material Compatibility | Quartz, Alumina, or Molybdenum (with appropriate vacuum/ambient gas configuration) |
| Insulation | High-Purity Alumina Ceramic Fiber + Dual-Layer Water-Cooled Stainless Steel Shell |
| Brand | BEQ |
|---|---|
| Origin | Anhui, China |
| Equipment Type | Horizontal Tube Furnace |
| Maximum Temperature | 1600 °C |
| Temperature Control Accuracy | ±1 °C |
| Rated Power | 5.2 kW |
| Heating Rate | ≤10 °C/min below 1200 °C, ≤5 °C/min from 1200–1500 °C, ≤2 °C/min above 1500 °C |
| Heating Element | Silicon Molybdenum (MoSi₂) Rods |
| Control System | Fuzzy PID with Auto-Tuning, 30-Stage Programmable Ramp/Soak Profile, Over-Temperature & Thermocouple Break Protection |
| Tube Dimensions | Φ60 mm × 1000 mm or Φ80 mm × 1000 mm |
| Chamber Lining | High-Purity Al₂O₃ Ceramic Tube with US-Imported High-Temperature Al₂O₃ Coating |
| Cooling | Dual-Layer Air-Cooled Steel Housing |
| Structural Support | Adjustable Flange Mounting Bracket |
| Brand | BEQ |
|---|---|
| Origin | Anhui, China |
| Model | BTF-1600C-II |
| Maximum Temperature | 1600 °C |
| Temperature Uniformity | ±1 °C |
| Total Power Rating | 11 kW |
| Heating Rate | ≤10 °C/min up to 1200 °C |
| Heating Element | Silicon Molybdenum (MoSi₂) Rods |
| Control System | Fuzzy PID with auto-tuning, 30-segment programmable temperature profile, over-temperature and thermocouple failure alarm |
| Tube Dimensions | Φ60 mm × 1200 mm or Φ80 mm × 1200 mm |
| Chamber Lining | High-purity Al₂O₃ ceramic tube with US-sourced high-emissivity alumina coating |
| Cooling | Dual-layer air-cooled shell structure |
| Structural Support | Integrated flange support frame for load distribution |
| Brand | BEQ |
|---|---|
| Origin | Anhui, China |
| Model | BTF-1700C |
| Maximum Temperature | 1700 °C |
| Temperature Control Accuracy | ±1 °C |
| Rated Power | 5.2 kW |
| Heating Rate | ≤10 °C/min below 1200 °C, ≤5 °C/min from 1200–1500 °C, ≤2 °C/min above 1500 °C |
| Heating Element | Silicon Molybdenum (MoSi₂) Rods |
| Control System | Fuzzy PID with auto-tuning, 30-segment programmable controller, over-temperature and thermocouple failure alarm |
| Tube Dimensions | Φ60 mm × 1000 mm (ID × effective length) |
| Chamber Lining | High-purity alumina (Al₂O₃) tube with proprietary high-emissivity ceramic coating (imported from USA) |
| Brand | BEQ |
|---|---|
| Origin | Anhui, China |
| Manufacturer Type | Authorized Distributor |
| Product Category | Domestic |
| Model | 1700°C Dual-Zone High-Temperature Tube Furnace |
| Temperature Range | Up to 1700°C |
| Temperature Uniformity | ±1°C (at setpoint, within 100 mm central zone) |
| Maximum Power | 11 kW |
| Heating Rate | ≤10°C/min below 1200°C, ≤5°C/min from 1200–1500°C, ≤2°C/min above 1500°C |
| Heating Element | Silicon Molybdenum (MoSi₂) Rods |
| Control System | Fuzzy PID with Auto-Tuning, 30-Stage Programmable Ramp/Soak Profile, Over-Temperature & Thermocouple Break Protection |
| Tube Dimensions | Φ60 mm × 1000 mm (ID × Length) |
| Chamber Lining | High-Purity Al₂O₃ Ceramic Tube with US-Imported High-Temperature Aluminum Oxide Coating |
| Cooling | Dual-Layer Air-Cooled Steel Housing |
| Structural Support | Integrated Flange Mounting Bracket for Load Distribution |
| Brand | BEQ |
|---|---|
| Origin | Anhui, China |
| Model | BTF-1700C-III |
| Max Temperature | 1700 °C |
| Temperature Uniformity | ±1 °C |
| Max Power | 13 kW |
| Heating Rate | ≤10 °C/min (≤1200 °C), ≤5 °C/min (1200–1500 °C), ≤2 °C/min (>1500 °C) |
| Heating Element | Silicon Molybdenum (MoSi₂) Rods |
| Control System | Fuzzy PID with Auto-Tuning, 30-Stage Programmable Ramp/Soak, Over-Temperature & Thermocouple Break Protection |
| Tube Dimensions | Φ60 mm × 1000 mm (ID × Length) |
| Chamber Lining | High-Purity Al₂O₃ Ceramic Tube with US-Imported High-Temperature Alumina Coating |
| Cooling | Dual-Layer Air-Cooled Shell Structure |
| Structural Support | Integrated Flange Mounting Bracket for Load Distribution |
| Brand | BEQ |
|---|---|
| Origin | Anhui, China |
| Model | BTF-1700C-S |
| Maximum Temperature | 1700 °C |
| Temperature Uniformity | ±1 °C |
| Rated Power | 4 kW |
| Heating Rate | ≤10 °C/min (≤1200 °C), ≤5 °C/min (1200–1500 °C), ≤2 °C/min (>1500 °C) |
| Heating Element | Silicon Molybdenum (MoSi₂) Rods |
| Control System | Fuzzy PID with Auto-Tuning, 30-Stage Programmable Ramp/Soak Profile, Over-Temperature & Thermocouple Break Protection |
| Tube Dimensions | Φ60 mm × 800 mm (ID × Length) |
| Chamber Lining | High-Purity Al₂O₃ Ceramic Tube with US-Imported High-Temperature Alumina Coating |
| Cooling | Dual-Layer Air-Cooled Steel Housing |
| Brand | BEQ |
|---|---|
| Origin | Anhui, China |
| Model | BTF-1750C |
| Maximum Temperature | 1750 °C |
| Temperature Control Accuracy | ±1 °C |
| Heating Rate | ≤10 °C/min up to 1400 °C |
| Heating Element | Silicon Molybdenum (MoSi₂) Rods |
| Control System | Fuzzy PID with Auto-Tuning, 30-Stage Programmable Logic Controller, Over-Temperature & Thermocouple Break Protection |
| Tube Dimensions | 100 mm OD × 1300 mm L |
| Insulation | Vacuum-Formed Alumina Fiber Blankets |
| Cooling | Dual-Layer Air-Cooled Housing |
| Structural Support | Dual End Flange Mounting Brackets |
| Brand | BEQ |
|---|---|
| Origin | Anhui, China |
| Model | BTF-900C-SS |
| Maximum Temperature | 900 °C |
| Temperature Control Accuracy | ±1 °C |
| Rated Power | 280 W |
| Heating Rate (to Max Temp) | 10 °C/min |
| Heating Method | Resistance Wire Heating |
| Control System | Fuzzy PID + Auto-Tuning |
| Programmable Stages | 30-segment Intelligent Ramp/Soak |
| Safety Features | Over-Temperature & Thermocouple Break Alarms |
| Tube Inner Diameter | Φ25 mm |
| Hot Zone Length | 90 mm |
| Furnace Liner Material | High-Purity Alumina Fiber |
| Brand | BEQ |
|---|---|
| Origin | Anhui, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | MF-1200C |
| Instrument Type | Box-Type Muffle Furnace |
| Max. Operating Temperature | 1200°C |
| Continuous Service Temperature | 1100°C |
| Temperature Uniformity | ±2°C (within 80×80×80 mm zone at 1100°C) |
| Control Accuracy | ±1°C |
| Max. Heating Rate | 30°C/min |
| Rated Power | 4 kW |
| Internal Chamber Dimensions | 300 × 200 × 120 mm (7.2 L) |
| External Dimensions | 435 × 550 × 540 mm |
| Net Weight | 53 kg |
| Heating Element | Molybdenum-Doped Alloy Resistance Wire |
| Insulation Material | Vacuum-Formed High-Purity Alumina Fiber |
| Cooling System | Dual-Layer Air-Cooled Shell |
| Safety Features | Door-Interlocked Power Cut-off, Dual Mechanical Latches, Over-Temperature & Thermocouple Break Alarms |
| Controller | 30-Stage Programmable PID with Auto-Tuning, RS485 Communication Port (optional LabVIEW integration), Touchscreen Interface (optional upgrade) |
| Certifications | CE Compliant |
| Warranty | 12 months full unit coverage |
| Brand | BEQ |
|---|---|
| Origin | Anhui, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | MF-1200C-L |
| Instrument Type | Box-Type Muffle Furnace |
| Max Temperature | 1200°C |
| Operating Temperature Range | ≤1100°C |
| Temperature Control Accuracy | ±1°C |
| Rated Power | 4 kW (Note: 6 kW listed in description refers to peak/derated capacity |
| Heating Rate (to max temp) | 5–20°C/min |
| Heating Element | Kanthal A1 Resistance Wire |
| Chamber Dimensions | 250 × 300 × 250 mm (L×W×H) |
| Nominal Volume | 64 L |
| External Dimensions | 670 × 630 × 1010 mm |
| Net Weight | 143 kg |
| Gross Weight | 172 kg |
| Voltage | AC 208–240 V, Single Phase, 50/60 Hz |
| Thermocouple | Type K |
| Control System | 30-Stage Programmable PID with Auto-Tuning, Over-Temperature & Thermocouple Break Protection |
| Insulation | Multi-Layer Alumina Fiber (Vacuum-Formed), High-Purity Al₂O₃ Liner |
| Cooling | Dual-Wall Air-Cooled Jacket with Integrated Air Channel |
| Safety Certification | CE-compliant |
| Optional Certifications | UL 61010 (TUV or CSA, fee-based) |
| Brand | BEQ |
|---|---|
| Origin | Anhui, China |
| Manufacturer Type | Authorized Distributor |
| Target Market | Domestic (China) |
| Target Applications | SEM Sample Preparation |
| Sputtering Target Diameter | 58 mm |
| Sample Stage Diameter | 40 mm (accommodates up to six standard sample cups) |
| Chamber Dimensions | Ø100 mm × 130 mm (height) |
| Vacuum System | Direct-coupled two-stage rotary vane pump (RVD-2), pumping speed: 2 L/s, ultimate pressure: 5 × 10⁻² Pa |
| Vacuum Gauge | Pirani gauge |
| Process Gas Options | Air or high-purity argon (dedicated Ar inlet with fine-flow micro-regulation valve) |
| Operating Pressure Range | Adjustable from ~1–20 Pa via precision bleed valve |
| Safety Interlock | Automatic cutoff at 20 Pa chamber pressure |
| Brand | BEQ |
|---|---|
| Origin | Anhui, China |
| Model | VGT-1990QTD |
| Ultrasonic Frequency | 40 kHz |
| Ultrasonic Power | 200 W |
| Adjustable Temperature Range | 0–80 °C |
| Timer Range | 1–99 min (LED digital display) |
| Tank Capacity | 9 L |
| Internal Tank Dimensions | 300 × 240 × 150 mm (L×W×H) |
| External Dimensions | 330 × 270 × 310 mm (L×W×H) |
| Drain Valve | Yes |
| Heating System | Ceramic heater |
| Construction | Stainless steel SUS304 tank and housing |
| Transducer Configuration | Four 50 W piezoelectric transducers (total 200 W) |
| Basket Material | Welded SUS304 mesh basket (optional) |
| PCB Protection | Moisture- and corrosion-resistant coating |
| Brand | BEQ |
|---|---|
| Origin | Anhui, China |
| Model | VTF-1200C-S-III-D50 |
| Instrument Type | Vertical Tube Furnace |
| Max Temperature | 1200 °C |
| Continuous Operating Temperature | ≤1100 °C |
| Temperature Control Accuracy | ±1 °C |
| Max Heating Rate (to max temp) | ≤10 °C/min |
| Heating Element | Resistance Wire |
| Thermocouple Type | K-Type |
| Control Method | Intelligent Fuzzy PID with Auto-Tuning & 30-Stage Programmable Ramp/Soak |
| Total Power | ≤4 kW |
| Heating Zone Length | 240 mm |
| Internal Chamber Dimensions (L×W×H) | 950×800×1200 mm |
| Unit Weight | ~100 kg |
| Insulation Material | Lightweight Alumina Fiber |
| Brand | Berghof |
|---|---|
| Origin | Germany |
| Model | BSB-939-IR |
| Instrument Type | Sub-boiling Distillation Apparatus |
| Construction Materials | TFM-PTFE, PTFE, and PFA only (no quartz or metal components) |
| Application | Ultra-high-purity acid production for trace elemental analysis |
| Brand | ChemTron |
|---|---|
| Origin | Germany |
| Model | Berghof Speedwave ENTRY |
| Cavity Class | Industrial-grade |
| Sample Capacity | 24 vessels |
| Microwave Source | Dual magnetron |
| Max Temperature | 230 °C |
| Max Pressure | 75 bar |
| Microwave Power | 1000 W |
| Temperature Range | 75–260 °C |
| Cavity Volume | 32 L (355 × 365 × 251 mm W×D×H) |
| Vessel Types | DAP-60K (60 mL, 40 bar, 230 °C, 10-position rotor) & DAQ-10 (10 mL, 75 bar, 230 °C, 24-position rotor) |
| Temperature Monitoring | Non-contact infrared (DIRC optical sensing), real-time per-vessel measurement |
| Dimensions (Main Unit) | 510 × 470 × 330 mm (W×D×H) |
| Weight (Main Unit) | ~22 kg |
| Interface | USB, RS232 |
| Ventilation | Continuous active cavity ventilation with external fume exhaust option |
| Brand | Berghof |
|---|---|
| Origin | Germany |
| Model | SW-Xpert |
| Cavity Class | Industrial-Grade |
| Sample Capacity | 32 vessels |
| Microwave Source | Dual Magnetron |
| Max Temperature | 300 °C |
| Max Pressure | 1450 psi |
| Output Power | 2000 W |
| Compliance | FDA 21 CFR Part 11, ISO/IEC 17025-compatible workflows, GLP/GMP-ready audit trail |
| Brand | Berghof |
|---|---|
| Origin | Germany |
| Model | Speedwave Xpert |
| Cavity Class | Industrial-Grade |
| Sample Capacity | 32 vessels |
| Microwave Source | Dual Magnetron |
| Max Temperature | 300 °C |
| Max Pressure | 1450 psi |
| Output Power | 2000 W |
| Compliance | FDA 21 CFR Part 11 |
| Brand | Berghof |
|---|---|
| Origin | Germany |
| Model | SW-Entry |
| Cavity Class | Industrial-grade |
| Sample Capacity | 24 vessels |
| Microwave Source | Single Magnetron |
| Max Temperature | 230 °C |
| Max Pressure | 75 bar |
| Origin | Beijing, China |
|---|---|
| Manufacturer Type | Authorized Distributor |
| Origin Category | Domestic (PRC) |
| Model | HP100 |
| Price Range | USD 700–1,400 |
| Heating Power | 1000 W |
| Max Operating Temperature | 300 °C |
| Display | 7-inch Full-Color TFT Touchscreen |
| Heating Surface Dimensions | 203 mm × 203 mm (8 inch × 8 inch) |
| Temperature Control Resolution | 0.1 °C |
| Temperature Stability | ±0.5 °C |
| Programmable Lift Mechanism | 5-step, 0–30 mm travel (0.1 mm resolution) |
| Timer Range | 0.1 s to 100,000 s |
| Program Storage | 100 user-defined recipes (5 steps each) |
| Construction | Corrosion-resistant hard-anodized aluminum top plate |
| Brand | Betop Scientific |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Direct Manufacturer |
| Country of Origin | China |
| Model | VPC100A |
| RF Frequency | 13.56 MHz |
| Power Range | 0–300 W (adjustable) |
| Chamber Volume | 10 L |
| Dimensions (W×D×H) | 76 × 55 × 82 cm |
| Chamber Material | 316 Stainless Steel |
| Gas Inlets | 2 channels |
| Control Mode | Fully Automatic |
| Plasma Type | Capacitively Coupled Radiofrequency (CCP) Plasma |
| Vacuum Level Range | 20–60 Pa |
| Ultimate Vacuum | ≤0.5 Pa (no-load) |
| Pump-Down Time | ≤40 s (no-load) |
| Venting Time | ≤20 s |
| Electrode Configuration | Adjustable parallel-plate aluminum electrodes |
| Gas Flow Control | Dual Mass Flow Controllers (MFCs), 0.3–3 L/min, ±1% accuracy |
| Rated Power Consumption | 1 kW |
| Input Voltage | AC 220 V |
| Net Weight | ~130 kg |
| Brand | Betop Scientific |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Direct Manufacturer |
| Country of Origin | China |
| Model | VPC100M |
| RF Frequency | 13.56 MHz |
| Power Range | 0–300 W (adjustable) |
| Chamber Volume | 10 L |
| Chamber Material | Stainless Steel (304) |
| Dimensions (W×D×H) | 76 × 55 × 82 cm |
| Gas Inlets | 2 independent mass flow-controlled channels |
| Control Mode | Manual operation with tactile keypad and LCD interface |
| Plasma Type | Radiofrequency (RF) Capacitively Coupled Plasma (CCP), not microwave plasma — clarification per technical specification |
| Vacuum Base Pressure | ≤0.5 Pa (no-load) |
| Operating Pressure Range | 20–60 Pa |
| Pump-Down Time | ≤40 s (no-load) |
| Venting Time | ≤20 s |
| Electrode Configuration | Dual horizontal adjustable aluminum electrodes |
| Gas Flow Range | 0.3–3.0 L/min per channel (dual float-type flowmeters) |
| Input Power | AC 220 V, 1 kW |
| Net Weight | ~75 kg |
| Compliance | Designed for laboratory-scale surface functionalization under controlled vacuum conditions |
| Brand | Betop Scientific |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Direct Manufacturer |
| Country of Origin | China |
| Model | VPC30A |
| Instrument Type | Domestic RF Plasma Cleaner |
| RF Frequency | 13.56 MHz |
| Power Range | 0–150 W (adjustable) |
| Chamber Volume | 2.4 L |
| Dimensions (W×D×H) | 50 × 54 × 24 cm |
| Chamber Material | 6061 Aluminum Alloy |
| Electrode Type | Flat-plate Water-Cooled Aluminum Electrode |
| Gas Inlets | 1 MFC-controlled channel (optional dual-channel configuration) |
| Gas Flow Range | 0–500 mL/min |
| Flow Accuracy | ±1% FS |
| Operating Vacuum Range | 20–60 Pa |
| Ultimate Vacuum (no load) | ≤0.5 Pa |
| Pump-down Time (no load) | ≤40 s |
| Venting Time | ≤20 s |
| Control Mode | Fully Automatic Touchscreen Interface with Real-time Parameter Monitoring |
| Rated Power Consumption | 1 kW |
| Input Voltage | AC 220 V |
| Net Weight | ~48 kg |
| Brand | Betop Scientific |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Direct Manufacturer |
| Country of Origin | China |
| Model | VPC30M |
| Instrument Type | Domestic RF Plasma Cleaner |
| RF Frequency | 13.56 MHz |
| Power Output | 0–150 W (adjustable) |
| Chamber Volume | 2.4 L |
| Dimensions (W×D×H) | 50 × 54 × 24 cm |
| Chamber Material | 6061 Aluminum Alloy |
| Electrode Type | Parallel-Plate Flat Electrode with Water-Cooled Design |
| Working Gas | Single-Channel Controlled via Solenoid Valve & Float Flowmeter |
| Flow Rate Range | 0–500 mL/min (optional) |
| Flow Accuracy | ±1% FS |
| Operating Vacuum Range | 20–60 Pa |
| Ultimate Vacuum (No Load) | ≤0.5 Pa |
| Pump-Down Time (No Load) | ≤40 s |
| Venting Time | ≤20 s |
| Control Mode | Fully Automatic Touchscreen Interface with Preset Process Sequencing |
| Rated Power Consumption | 1 kW |
| Input Voltage | AC 220 V |
| Net Weight | ~48 kg |