Epitaxy System
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| Brand | SVT Associates |
|---|---|
| Origin | USA |
| Model | SVT-Excel |
| Temperature Range | 0–600 °C |
| Power Rating | 600–1000 W |
| Temperature Stability | ±0.1 °C |
| Temperature Repeatability | ±0.1 °C |
| Thermocouple Type | K-type |
| Crucible Capacities | 16, 20, 22, 40, 60, and 150 cm³ (including conical-walled and PBN crucibles) |
| Standard Length | 12 in (304.8 mm) |
| Flange Options | 2.75 in or 4.5 in OD ConFlat (CF) |
| Filament | Amphenol annular heater |
| Thermocouple Connector | Omega subminiature |
| Brand | SVT Associates |
|---|---|
| Origin | USA |
| Model | SVTA-APH3-GCS |
| Operating Temperature Range | 150 °C to 1300 °C |
| Heating Configuration | Single Filament with Dual-Gas-Tube Furnace |
| Cracking Zone Materials | High-Purity Pyrolytic Boron Nitride (PBN) and Tantalum |
| Aperture Plate System | Modular, User-Selectable |
| Gas Delivery | High-Pressure Compatible, MFC-Integrated |
| Beam Uniformity Optimization | Customizable Source Length |
| Control Interface | Automated Beam Flux Regulation via Mass Flow Controllers (MFCs) |
| Brand | SVT Associates |
|---|---|
| Origin | USA |
| Model | SVTA-CBR4 |
| Type | High-Purity Solid-Source Effusion Cell for p-Type Doping in III–V MBE |
| Operating Principle | Thermally Controlled Effusion of CBr₄ Vapor |
| Temperature Range | 120–220 °C (adjustable, material-dependent) |
| Vapor Pressure Control | Precision Needle Valve + Heated Capillary Line + PID Temperature Regulation |
| Gas Delivery Interface | Dual-Stainless-Steel Conflat (CF) Flange |
| Optional Vacuum Monitoring | Cold Cathode Ion Gauge with Controller |
| Bakeout Capability | Integrated Resistive Heating for Full Gas Path Conditioning |
| Compliance | Designed for UHV-Compatible MBE Systems (≤1×10⁻¹⁰ Torr base pressure) |
| Brand | SVT Associates |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | SVTA-CL |
| Pricing | Upon Request |
| Spectral Range | 200–900 nm |
| Optical Resolution | 0.5 nm |
| Detector Quantum Efficiency | 25% |
| Detector Output | 10 V/nW |
| Noise-Equivalent Voltage | <250 V |
| Viewport | 2.75'' ConFlat (CF) |
| External Dimensions | 9.0'' × 25.5'' × 10.1'' (22 cm × 65 cm × 26 cm) |
| Internal Chamber Clearance | 1.25'' × 13.1'' (3.2 cm × 34 cm) |
| Linear Translation Stroke | 8'' (20.3 cm) |
| Target-to-Detector Distance | 2'' (5.1 cm) |
| OS Compatibility | Windows 9x/2000/XP |
| Brand | SVT Associates |
|---|---|
| Origin | USA |
| Model | SVTA-CLM-6, SVTA-CLM-4 |
| Maximum Substrate Size | 200 mm (SVTA-CLM-6), 125 mm (SVTA-CLM-4) |
| Port Configuration | Six 305 mm (12″) CF flanges + one 152 mm (6″) CF viewport + one 70 mm (2.75″) CF ion gauge port (SVTA-CLM-6) |
| Vacuum Compatibility | UHV-capable (≤1×10⁻⁹ Torr base pressure with appropriate pumping) |
| Structural Material | 304 or 316 stainless steel, electropolished interior |
| Flange Standard | ConFlat (CF), ISO-K and ISO-F variants available upon request |
| Brand | SVT Associates |
|---|---|
| Origin | USA |
| Model | SVTA-LBFM |
| Vacuum Compatibility | Ultra-High Vacuum (UHV) |
| Filament Positioning | Front-of-source mountable |
| Bakeout Temperature | 230 °C (max), 200 °C (standard operational) |
| Flange Options | 2.75″ CF or 4.5″ CF |
| Optional Isolation Valve | Yes |
| Beam Voltage | 10 kV |
| Filament Current | 3 A |
| Emission Current | 5 A |
| Optical Path Clearance | 4.5″ CF-compatible aperture |
| Beam Spot Diameter | 1.0 mm at 17″ (432 mm) working distance |
| Customizable Probe Length | Yes |
| Brand | SVT Associates |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | SVTA-LMBE |
| Pricing | Available Upon Request |
| Brand | SVT Associates |
|---|---|
| Origin | USA |
| Model | SVTA-MAN |
| Vacuum Compatibility | Ultra-High Vacuum (UHV) |
| Max Substrate Temperature | 1400 °C |
| X-Y Positioning Resolution | 1 µm |
| X-Y Repeatability | ±1 µm |
| X-Y Travel Range | ±0.5 inch |
| Z Travel Range | 4.0 inch |
| Z Resolution | 1 mm (or 1/32 inch) |
| Z Repeatability | ±1 mm (or ±1/32 inch) |
| Rotary Accuracy | ±1.25° |
| Rotary Hysteresis | <1° |
| Corrosion-Resistant Options | O₂-compatible, NH₃-compatible |
| Substrate Diameter Support | 1″ to 8″ |
| Brand | SVT Associates |
|---|---|
| Origin | USA |
| Model | SVTA-O3 |
| Configuration | Integrated Ozone Generation, Cryogenic Storage & Controlled Delivery Subsystem |
| Compliance | Designed for UHV-Compatible MBE Integration |
| Control Interface | Touchscreen HMI + RoboMBE™ Remote Software Suite |
| Gas Purity | >99.999% O₃ (Ozone-in-O₂ basis), <1 ppm NOₓ/H₂O hydrocarbon contaminants |
| Operating Pressure Range | 1×10⁻⁸ to 1×10⁻³ Torr (process chamber interface) |
| Ozone Concentration Range | 1–15 wt% in oxygen carrier gas |
| Cryogenic Trap Temperature Range | –120 °C to –40 °C (programmable) |
| Delivery Line Material | Electropolished 316L SS + Fluorosilicone-elastomer-sealed VCR® fittings |
| Cooling | Integrated recirculating chiller (water-cooled ozone injector head) |
| Footprint | 600 mm × 750 mm × 1,200 mm (W×D×H) |
| Brand | SVT Associates |
|---|---|
| Origin | USA |
| Model | SVTA-SF |
| Flange Sizes | 10" to 22" |
| Evaporation Port Count | 4 (2.75") to 8 (4.625") |
| Cooling Option | Liquid Nitrogen or Water-Cooled Backplate |
| Integrated Viewport | Center-Mounted |
| Brand | SVT Associates |
|---|---|
| Origin | USA |
| Model | SVTA-VC-45 |
| Heating Zones | As (2-zone), P/Sb/Te/Se/S (3-zone) |
| Cooling | Integrated water-cooled jackets for evaporator body, valve, cracking tube, and PBN crucible |
| Control Options | Manual needle valve (standard), computer-controlled ACM valve (optional, SVTA-VC-ACM) |
| Software Integration | Compatible with RoboMBE® |
| Crucible Materials | High-purity PBN, molybdenum, or tantalum |
| Vacuum Compatibility | UHV (≤1×10⁻¹⁰ Torr) |
| Source Capacities | 200 cm³ or 500 cm³ |
| Compliance | Designed for GLP/GMP-aligned MBE process environments |
| Brand | SVT Associates |
|---|---|
| Origin | USA |
| Model | WP-15 |
| Cleaving Capacity | 15 mm × 15 mm input wafer (10–32 mm square configurable) → 15 × 1 mm × 15 mm bar strips (bar width: 1–5 mm adjustable) |
| Vacuum Compatibility | UHV (<1×10⁻⁹ Torr) |
| Flange | 8-inch CF (ConFlat), bakeable to 180 °C (200 °C optional) |
| Sample Orientation | Dual-axis alignment (X/Y-direction cleaving) |
| Loading | Cassette-based, load-lock compatible |
| Integrated Option | In-situ passivation deposition module (e.g., SiO₂, SiNₓ, Al₂O₃) |
| Origin | USA |
|---|---|
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | Laser MBE |
| Pricing | Available Upon Request |
| Brand | Truth Instruments Company Limited |
|---|---|
| Origin | Anhui, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | PLD-400 |
| Base Pressure | 5×10⁻⁹ mbar |
| Substrate Heating Range | Room Temperature to 1200 °C |
| Target Configuration | Six 1-inch or Three 2-inch targets (motorized rotation and revolution) |
| Substrate Size | Up to 2-inch wafers |
| Optional Add-ons | Liquid Nitrogen Cryo-Cooling Stage, Load-Lock Transfer Module, Reactive Gas Inlet System (O₂, N₂, Ar), In-situ Quartz Crystal Microbalance (QCM), Predefined Process Recipe Management, High-Pressure RHEED (up to 1×10⁻⁵ mbar), Electron Gun for LEED |
| Brand | Veeco |
|---|---|
| Origin | USA |
| Model | GEN10 |
| Configuration | Cluster-tool architecture with up to three material-specific growth chambers |
| Vacuum Integration | Ultra-high vacuum (UHV) integrated chamber system |
| Automation | Robotic wafer transfer for unattended operation |
| Application Scope | Research-grade III–V, II–VI, and elemental semiconductor epitaxy |
| Compliance Framework | Designed for GLP-compliant process documentation and ASTM F1529-22 compatible thin-film metrology workflows |