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| Brand | Keysight |
|---|---|
| Origin | Malaysia |
| Manufacturer Type | Authorized Distributor |
| Import Status | Imported |
| Model | D.T |
| Measurement Range | 5 nm – 1200 µm |
| Accuracy | ±1% |
| Probe Tip Radius | 2 µm |
| Normal Force | 1–15 mg |
| Scan Length | 55 µm |
| Step Height Repeatability | <4 Å |
| Vertical Resolution | 1 Å |
| Maximum Sample Size | 200 mm |
| Brand | KLA |
|---|---|
| Origin | Malaysia |
| Model | D-500 |
| Measurement Principle | Contact Stylus Profilometry |
| Vertical Measurement Range | 0.002 µm to 1200 µm |
| Vertical Resolution | Sub-nanometer (typical) |
| Probe Tip Radius | 0.7 µm (standard), optional tips available |
| Normal Force Range | 0.03–15 mg |
| Scan Length | 55 mm |
| Horizontal Sample Stage | 140 mm manual X-Y stage |
| Max Sample Size | 100 mm × 100 mm |
| Step Height Repeatability | < 0.1% of measured height (RMS) |
| Surface Roughness Parameters | Ra, Rq, Rz, Rt, Rsk, Rku, with ISO 4287/4288 and ASME B46.1 compliant filtering |
| Optical System | Integrated 5 MP color camera with trapezoidal distortion correction and arc error compensation |
| Software | Alpha-Step Analysis Suite with GLP-compliant audit trail, report generation, and 21 CFR Part 11 ready configuration options |
| Brand | KLA |
|---|---|
| Origin | Malaysia |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | P-7 |
| Measurement Principle | Contact Stylus Profilometry |
| Vertical Measurement Range | 1 nm to 1000 µm |
| Vertical Resolution | Sub-nanometer (typical) |
| Lateral Resolution | Determined by stylus tip radius (0.1–50 µm selectable) |
| Stylus Tip Radius | 0.7 µm (standard), down to 100 nm optional |
| Normal Force Range | 0.03–50 mg (force-controlled feedback) |
| Scan Length | Up to 150 mm (single-pass, no stitching required) |
| Wafer/Specimen Max Size | 150 mm diameter |
| Step Height Repeatability | < 0.2% of measured height (1σ) |
| Surface Flatness Calibration | Arc correction algorithm integrated |
| Imaging System | 5 MP color CCD with motorized zoom and focus |
| Software Platform | Apex™ v6.x with ISO/ASME-compliant analysis modules |
| Compliance | SEMI E4, E5, E30, E37 |
| Brand | KLA |
|---|---|
| Origin | Malaysia |
| Model | D-600 |
| Measurement Principle | Mechanical Stylus Profilometry (Optical Lever Sensor) |
| Vertical Measurement Range | 0.003 µm to 1200 µm |
| Vertical Resolution | Sub-nanometer (typical) |
| Probe Tip Radius | 0.7 µm (standard), optional from 0.1 µm to 50 µm |
| Normal Force Range | 0.03–15 mg |
| Scan Length | 55 mm |
| Sample Max Diameter | 200 mm |
| Step Height Repeatability | < 0.1% RSD (at ≥100 nm steps) |
| Optical System | 5 MP color camera with trapezoidal distortion correction and arc compensation |
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