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| Brand | KLA |
|---|---|
| Origin | Malaysia |
| Model | P-17 |
| Product Type | Contact Profilometer / Surface Roughness Tester |
| Operating Principle | Stylus-Based Profilometry |
| Scan Range | Up to 200 mm (no image stitching required) |
| Step Height Range | 1 nm to 1000 µm |
| Stylus Force Control | 0.03–50 mg |
| Camera Resolution | 5 MP color, optical zoom |
| Compliance | SEMI E4, E5, E30, E37 |
| Software Platform | Apex Analysis Software (ISO/ASME-compliant), Offline Analysis Module, SECS/GEM & HSMS support |
| Brand | KLA |
|---|---|
| Origin | Malaysia |
| Model | Zeta-20 |
| Product Type | Non-contact Profilometer / Surface Roughness Analyzer |
| Measurement Principle | Multi-Mode Optical Interferometry (ZDot™, White-Light Interferometry, Nomarski DIC, Shear Interference), Spectral Reflectometry |
| Key Capabilities | 3D Topography, True-Color Imaging, Step Height (0.008 nm – 10 mm), Surface Roughness (Ra down to sub-Å), Film Thickness (30 nm – 100 µm), Automatic Defect Detection (>1 µm), Wafer-Scale Warpage & Stress Analysis |
| Brand | KLA |
|---|---|
| Origin | Malaysia |
| Model | HRP®-260 |
| Product Type | Contact Profilometer / Surface Roughness Tester |
| Operating Principle | Stylus-Based Profilometry |
| Horizontal Scan Range (Long-Range Stage) | 200 mm (no stitching required) |
| High-Resolution Stage Travel | 90 µm × 90 µm |
| Vertical Resolution | 1 nm |
| Stylus Normal Force Range | 0.03–50 mg |
| Step Height Measurement Range | <1 nm to 327 µm |
| Stylus Tip Radius Options | 20 nm – 50 µm |
| Stylus Included | DuraSharp® diamond stylus (40 nm radius) |
| Wafer Handling | Automatic robotic loading for 75–200 mm opaque (e.g., Si, GaAs) and transparent (e.g., sapphire) substrates |
| Compliance | SEMI E4, E5, E30, E37 |
| Brand | KLA |
|---|---|
| Origin | Malaysia |
| Manufacturer Type | Authorized Distributor |
| Product Origin | Imported |
| Model | P-170 |
| Product Category | Contact Stylus Profilometer / Surface Roughness Tester |
| Operating Principle | Stylus-based Contact Profilometry |
| Brand | Keysight |
|---|---|
| Origin | Malaysia |
| Manufacturer Type | Authorized Distributor |
| Import Status | Imported |
| Model | D.T |
| Measurement Range | 5 nm – 1200 µm |
| Accuracy | ±1% |
| Probe Tip Radius | 2 µm |
| Normal Force | 1–15 mg |
| Scan Length | 55 µm |
| Step Height Repeatability | <4 Å |
| Vertical Resolution | 1 Å |
| Maximum Sample Size | 200 mm |
| Brand | KLA |
|---|---|
| Origin | Malaysia |
| Model | Zeta-300 |
| Product Type | Non-contact profilometer / surface roughness analyzer |
| Measurement Principle | Multi-mode optical interferometry (ZDot™, white-light interferometry, Nomarski differential interference contrast, shear interferometry) |
| Optical Capabilities | Simultaneous high-resolution 3D topography and true-color surface imaging |
| Vertical Resolution | Sub-nanometer (ZIC/ZSI), <0.1 nm (PSI), ≤1 nm (VSI) |
| Step Height Range | 0.8 nm to 1 mm |
| Surface Roughness Range | <0.05 nm RMS to >100 µm Sa |
| Film Thickness Range (ZFT) | 30 nm – 100 µm (transparent films) |
| Defect Detection Limit | ≥1 µm lateral resolution |
| Maximum Sample Size | Up to 280 mm Z-height |
| Compliance | ISO 25178, ISO 4287/4288, ASME B46.1, NIST-traceable calibration standards |
| Brand | KLA |
|---|---|
| Origin | Malaysia |
| Product Type | Contact Profilometer / Surface Roughness Tester |
| Operating Principle | Stylus-Based Profilometry |
| Model Range | D-500, D-600, P-7, P-17 |
| Compliance | Designed for ISO 25178, ISO 4287, ASTM E1093, USP <1056>, and GLP/GMP-aligned workflows |
| Brand | KLA |
|---|---|
| Origin | Malaysia |
| Model | D-500 |
| Measurement Principle | Contact Stylus Profilometry |
| Vertical Measurement Range | 0.002 µm to 1200 µm |
| Vertical Resolution | Sub-nanometer (typical) |
| Probe Tip Radius | 0.7 µm (standard), optional tips available |
| Normal Force Range | 0.03–15 mg |
| Scan Length | 55 mm |
| Horizontal Sample Stage | 140 mm manual X-Y stage |
| Max Sample Size | 100 mm × 100 mm |
| Step Height Repeatability | < 0.1% of measured height (RMS) |
| Surface Roughness Parameters | Ra, Rq, Rz, Rt, Rsk, Rku, with ISO 4287/4288 and ASME B46.1 compliant filtering |
| Optical System | Integrated 5 MP color camera with trapezoidal distortion correction and arc error compensation |
| Software | Alpha-Step Analysis Suite with GLP-compliant audit trail, report generation, and 21 CFR Part 11 ready configuration options |
| Brand | KLA |
|---|---|
| Origin | Malaysia |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | P-7 |
| Measurement Principle | Contact Stylus Profilometry |
| Vertical Measurement Range | 1 nm to 1000 µm |
| Vertical Resolution | Sub-nanometer (typical) |
| Lateral Resolution | Determined by stylus tip radius (0.1–50 µm selectable) |
| Stylus Tip Radius | 0.7 µm (standard), down to 100 nm optional |
| Normal Force Range | 0.03–50 mg (force-controlled feedback) |
| Scan Length | Up to 150 mm (single-pass, no stitching required) |
| Wafer/Specimen Max Size | 150 mm diameter |
| Step Height Repeatability | < 0.2% of measured height (1σ) |
| Surface Flatness Calibration | Arc correction algorithm integrated |
| Imaging System | 5 MP color CCD with motorized zoom and focus |
| Software Platform | Apex™ v6.x with ISO/ASME-compliant analysis modules |
| Compliance | SEMI E4, E5, E30, E37 |
| Brand | KLA |
|---|---|
| Origin | Malaysia |
| Model | Profilm3D |
| Product Type | Non-contact 3D Optical Profilometer / Surface Roughness Analyzer |
| Operating Principle | White Light Interferometry |
| Measurement Modes | Vertical Scanning Interferometry (VSI) and Phase Shifting Interferometry (PSI) |
| Z-Stage Travel | 100 mm |
| Objective Turret | 5×–100× (Michelson 5×, Mirau 10×/20×/50×/100×) |
| Brand | KLA |
|---|---|
| Origin | Malaysia |
| Model | D-600 |
| Measurement Principle | Mechanical Stylus Profilometry (Optical Lever Sensor) |
| Vertical Measurement Range | 0.003 µm to 1200 µm |
| Vertical Resolution | Sub-nanometer (typical) |
| Probe Tip Radius | 0.7 µm (standard), optional from 0.1 µm to 50 µm |
| Normal Force Range | 0.03–15 mg |
| Scan Length | 55 mm |
| Sample Max Diameter | 200 mm |
| Step Height Repeatability | < 0.1% RSD (at ≥100 nm steps) |
| Optical System | 5 MP color camera with trapezoidal distortion correction and arc compensation |
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