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| Brand | KLOE |
|---|---|
| Origin | France |
| Model | Dilase 250 |
| Exposure Mode | Non-contact (Flying Spot) |
| Resolution | ≤100 nm (line width, under optimal resist & process conditions) |
| Wavelength | 375 nm or 405 nm (solid-state laser) |
| Beam Spot Size | Adjustable from 1 µm to 50 µm |
| Writing Area | 100 mm × 100 mm |
| Stage Positioning Accuracy | 100 nm (standard), 40 nm (optional) |
| Repeatability | ±100 nm |
| Overlay Accuracy (Multi-layer) | ≤1 µm |
| Orthogonality Error | <1 mrad |
| Maximum Sample Size | Up to 125 mm square (5-inch equivalent) |
| Substrate Thickness Range | 250 µm – 5 mm |
| Laser Lifetime | >10,000 h |
| File Format Support | GDSII, OASIS, DXF, LWO |
| Safety Compliance | EN 60825-1, IEC 61000-6-2/6-4, CE Marked |
| Origin | Beijing, China |
|---|---|
| Manufacturer Type | Authorized Distributor |
| Origin Category | Domestic (PRC) |
| Model | SC100D |
| Price Range | USD 1,400 – 2,800 |
| Max. Rotation Speed | 0–10,000 rpm |
| Speed Resolution | 1 rpm |
| Timing Resolution | 0.1 s |
| Acceleration Range (no-load) | 10–50,000 rpm/s |
| Maximum Substrate Diameter | 203 mm (8-inch wafer) |
| Chamber Diameter | 203 mm |
| Programmable Recipes | 100 recipes × 100 steps |
| Max. Process Duration | 3000 s |
| Control System | Industrial PLC with servo motor drive |
| HMI | 7-inch full-color capacitive touchscreen |
| Chamber Material | HDPE inner cavity |
| Enclosure | Stainless steel (SUS304) |
| Viewing Window | Solvent-resistant polycarbonate (PC) |
| Spray System | Quadruple independent nozzle array (developer, DI water, optional process chemicals) |
| Compliance | Designed for Class 1000 cleanroom-compatible operation |
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