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| Origin | Beijing, China |
|---|---|
| Manufacturer Type | Authorized Distributor |
| Origin Category | Domestic (PRC) |
| Model | SC100D |
| Price Range | USD 1,400 – 2,800 |
| Max. Rotation Speed | 0–10,000 rpm |
| Speed Resolution | 1 rpm |
| Timing Resolution | 0.1 s |
| Acceleration Range (no-load) | 10–50,000 rpm/s |
| Maximum Substrate Diameter | 203 mm (8-inch wafer) |
| Chamber Diameter | 203 mm |
| Programmable Recipes | 100 recipes × 100 steps |
| Max. Process Duration | 3000 s |
| Control System | Industrial PLC with servo motor drive |
| HMI | 7-inch full-color capacitive touchscreen |
| Chamber Material | HDPE inner cavity |
| Enclosure | Stainless steel (SUS304) |
| Viewing Window | Solvent-resistant polycarbonate (PC) |
| Spray System | Quadruple independent nozzle array (developer, DI water, optional process chemicals) |
| Compliance | Designed for Class 1000 cleanroom-compatible operation |
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