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| Brand | Femto Science |
|---|---|
| Origin | South Korea |
| Model | CUTE |
| Chamber Dimensions | 140 mm × 200 mm × 110 mm |
| Power Output | Up to 100 W (adjustable, 20–100 kHz RF frequency) |
| Vacuum System | 80 L/min pumping speed, ultimate vacuum ≤ 1 × 10⁻³ Torr, pressure range: atmospheric to 5 × 10⁻⁵ Torr |
| Gas Control | 1 standard MFC-controlled inlet (0–100 sccm, ±1% FS accuracy), 2 additional blank ports for future expansion |
| User Interface | Color TFT touchscreen with graphical workflow interface |
| Operation Modes | Semi-automatic and fully programmable (up to 10 stored recipes, each supporting up to 10 sequential process steps) |
| Chamber Material | Anodized aluminum alloy |
| Operator Levels | 2-tier access control (operator & administrator) |
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