Empowering Scientific Discovery

Microno Technology Co., Ltd.

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BrandAXIS-TEC
OriginUSA
ModelPE-100
RF Frequency13.56 MHz
RF Power0–300 W (automatically adjustable)
Chamber Dimensions305 × 368 × 305 mm (L×D×H)
Chamber Volume34 L
Chamber MaterialT6-aluminum monolithic construction
Operating Pressure Range1–2000 mTorr
Gas Flow Control0–50 sccm with precision needle valve
Vacuum GaugePirani gauge (0–1 Torr)
Gas InletSingle or multi-channel configurable
Control SystemPLC-based HMI automation
Configuration OptionsPlasma cleaning, isotropic plasma etching, anisotropic RIE, and switchable mode architecture
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BrandAXIS-TEC
OriginUSA
ModelPlasmaSTAR100 / PlasmaSTAR200
RF Frequency40 kHz (LF) or 13.56 MHz
RF Power600 W
Chamber Volume10 L
Chamber MaterialAnodized Aluminum
Maximum Substrate Size8-inch wafer
Process Gas Pressure10 PSI
Control InterfaceTouchscreen PC with Multi-step Programmable Logic
Vacuum SystemRotary Vane Pump (standard), optional Roots-boosted configuration
Gas DeliveryMass Flow Controllers (MFCs) standard, downstream pressure controller optional
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BrandAXIS-TEC
OriginUSA
ModelPE-75
RF Frequency13.56 MHz
Power Output0–150 W (automatically regulated)
Chamber DimensionsCylindrical, ID 273 mm × Depth 254 mm
Chamber Volume13.8 L
Chamber MaterialT-6 Aluminum Monolithic Construction
Operating GasSingle- or Multi-Gas Inlet
Vacuum Range1–2000 mT (via Pirani gauge, 0–1 Torr)
Gas Flow Control0–25 sccm with Precision Needle Valve
Control ModeFully Automated
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Brand--
OriginImported
Manufacturer TypeGeneral Distributor
ModelWaveDriver 200
PriceUpon Request
Working Electrode ConfigurationSingle or dual WE with shared RE and CE
Current Range±100 nA to ±1 A
Potential Range±2.5 V / ±10 V / ±15 V (selectable)
EIS Frequency Range10 µHz – 1 MHz
DC TechniquesCV, LSV, CA, DPV, SWV, NPV, ASV, OCP, ZRA, RCP, BE, etc.
AC TechniquesEIS, Mott-Schottky, iR Compensation Measurement
Optional AccessoriesRRDE, RDE, Spectroelectrochemical Cells
SoftwareAfterMath (EIS equivalent circuit fitting, Kramers–Kronig validation, data transformation, advanced analysis modules)
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Brand--
OriginImported
Manufacturer TypeAuthorized Distributor
ModelAT650T / AT-Ozone Generator / AT650P / AT200M
PricingUpon Request
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BrandNovascan
OriginUSA
Model SeriesPSD & PSDP
Control TypeDigital (PSD) / Programmable Digital (PSDP)
UV Wavelengths185 nm and 254 nm
Lamp TypeLow-pressure mercury grid lamp with aluminum reflector
Lamp Lifetime~5,000 hours
Sample StageHeight-adjustable with position lock
Chamber AccessTop-hinged lid for 360° sample loading
Safety InterlockAutomatic UV shutoff when chamber is open
Gas OptionsAmbient air or optional O₂ feed via inlet ports
Exhaust OptionsIntegrated ozone destruct unit with pump (optional)
Temperature CapabilityUp to 150 °C (200 °C or 300 °C heating plate available as option)
Vacuum ChamberCustomizable (aluminum or quartz)
ComplianceDesigned for GLP-compliant environments
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