Empowering Scientific Discovery

Microno Technology Co., Ltd.

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BrandBEIJING EAST STAR LABS
OriginBeijing, China
ModelRTP800V
Instrument TypeHigh-Vacuum Rapid Annealing Furnace
Sample Size200 mm (8-inch) wafers
Temperature Range150–1300 °C
Maximum Ramp Rate1–200 °C/s
Cooling Rate≥80 °C/s
Vacuum Level≤5×10⁻⁵ Pa (standard configuration)
Control ArchitectureMulti-zone adaptive thermal regulation with non-PID real-time feedback
ComplianceDesigned for ISO/IEC 17025-aligned lab environments
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