Empowering Scientific Discovery

Microno Technology Co., Ltd.

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OriginUSA
Manufacturer TypeAuthorized Distributor
Import StatusImported
ModelsSCS112 / SCSe124 / SCSe126
Cleaning MethodWet Chemical & DI Water-Based Cleaning
Equipment TypeSingle-Wafer Manual Processing Station
Maximum Substrate Diameter8 in (SCS112) or 10 in (SCSe124/SCSe126)
System Dimensions (W×D×H)26 in × 21 in × 40 in
Spindle SpeedUp to 2500 rpm
Control ArchitectureMicroprocessor-Based with Touchscreen GUI (SCSe124/SCSe126) or Keypad Interface (SCS112)
Preset Recipes3 (SCS112) or 10 (SCSe124/SCSe126)
Mechanical Arms1 (SCS112), 2 (SCSe124), or 4 (SCSe126)
Chamber MaterialChemically Resistant Polypropylene
Exhaust ConfigurationRadial Laminar Flow Chamber (SCSe124/SCSe126)
Drying OptionsHigh-velocity N₂ purge, IR heating lamp, or heated DI water rinse
Safety FeaturesInterlocked lid, positive-pressure chamber cover, emergency stop circuitry
Power Supply220 VAC, 10 A, 50/60 Hz
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