INFICON BPG402-S Bayard-Alpert / Pirani Composite Vacuum Gauge
| Origin | Switzerland |
|---|---|
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | BPG402-S |
| Pricing | Available Upon Request |
Overview
The INFICON BPG402-S is a fully integrated, dual-sensor composite vacuum gauge engineered for high-reliability pressure measurement across an exceptionally wide dynamic range—from 5 × 10−10 mbar (3.8 × 10−10 Torr) up to atmospheric pressure (1013 mbar). It combines a Bayard-Alpert (B-A) hot-cathode ionization gauge and a thermally compensated Pirani gauge within a single compact, hermetically sealed housing. This hybrid architecture leverages the complementary strengths of both technologies: the B-A sensor delivers traceable, high-accuracy measurements in the ultra-high vacuum (UHV) and extreme high vacuum (XHV) regimes (10−10–10−3 mbar), while the Pirani sensor provides stable, drift-resistant readings in the rough and medium vacuum ranges (10−3–103 mbar). The gauge operates on the principle of electron emission, ion collection (B-A mode), and thermal conductivity-based resistance change (Pirani mode), with automatic sensor handover at predefined crossover points—ensuring seamless, gap-free coverage without manual intervention or recalibration.
Key Features
- Integrated dual-sensor design eliminates the need for separate gauge heads, cabling, and controllers—reducing system footprint, installation time, and potential leak paths.
- Yttrium-doped iridium dual-filament construction enhances filament longevity and resistance to oxidation and poisoning, particularly during frequent venting cycles common in semiconductor process chambers.
- Pirani filament protection logic actively monitors emission current and dynamically reduces heating power when pressure exceeds safe thresholds—preventing premature filament burnout.
- On-board calibration memory stores NIST-traceable sensor-specific coefficients; replacement sensors retain full metrological continuity without field recalibration.
- Automatic high-vacuum Pirani offset adjustment compensates for thermal drift and background gas composition effects, maintaining ≤5% repeatability across the critical process window (10−8–10−2 mbar).
- Optional graphical display module (BPG-DISPLAY) supports real-time trend logging, unit switching (mbar, Torr, Pa), and local diagnostics; fieldbus interfaces include RS-485 (Modbus RTU) and optional PROFIBUS DP or EtherNet/IP for PLC integration.
Sample Compatibility & Compliance
The BPG402-S is compatible with inert, reactive, and corrosive process gases—including O2, N2, Ar, H2, CF4, and SF6—provided filament temperature protocols are observed. Its stainless-steel 2.75″ CF flange (ISO-KF 16 optional) ensures compatibility with standard UHV hardware. The gauge meets IEC 61000-6-2 (EMC immunity) and IEC 61000-6-4 (EMC emissions) standards. Sensor calibration data is generated per ISO 3567 and ASTM E832-21 guidelines. For regulated environments, firmware supports audit-trail-enabled operation compliant with FDA 21 CFR Part 11 requirements when used with INFICON’s VGC series controllers and validated software stacks.
Software & Data Management
The BPG402-S communicates via analog (0–10 V or 4–20 mA) outputs and digital interfaces. INFICON’s Vacuum Manager™ software (Windows-based) enables remote configuration, real-time multi-gauge monitoring, alarm threshold definition, and automated data export to CSV or SQL databases. All sensor events—including filament activation, range transitions, and calibration updates—are timestamped and logged with user-accessible metadata. When deployed with INFICON’s VGC-400 controller, the system supports GLP/GMP-compliant electronic records, including operator ID tagging, change history, and electronic signature workflows.
Applications
- Semiconductor manufacturing: In-situ pressure monitoring in CVD, PVD, etch, and load-lock chambers where rapid cycling between atmospheric and <10−9 mbar conditions demands sensor robustness and reproducibility.
- Optical and decorative thin-film coating: Real-time control of base pressure and process pressure during sputtering and evaporation processes.
- Research UHV systems: Synchrotron beamlines, surface science chambers, and atomic physics setups requiring continuous, low-drift measurement from XHV through rough vacuum.
- Industrial vacuum furnaces and leak testing stations: Reliable gross-leak detection and pump-down verification across multiple decades of pressure.
FAQ
What is the recommended bakeout temperature for the BPG402-S?
The gauge is rated for continuous operation up to 150 °C; however, sustained bakeout above 120 °C requires prior consultation with INFICON technical support to verify filament conditioning protocols.
Can the BPG402-S measure hydrocarbon partial pressures?
No—it provides total pressure only. For partial pressure analysis, a residual gas analyzer (RGA) such as the INFICON Transpector® series must be used in conjunction.
Is sensor replacement possible in the field without recalibration?
Yes. Each replacement sensor includes factory-loaded calibration coefficients stored in non-volatile memory, ensuring metrological equivalence to the original unit.
Does the gauge require external high-voltage supply for the Bayard-Alpert section?
No. All high-voltage generation (up to −180 V filament bias and +180 V collector potential) is internally regulated and isolated.
How often should the gauge be verified against a reference standard?
INFICON recommends annual verification using a traceable transfer standard in accordance with ISO/IEC 17025-accredited laboratories—particularly before critical qualification runs in GMP environments.
