Kashiyama SDL20E60 High-Capacity Oil-Free Vacuum Pump

Overview

The Kashiyama SDL20E60 is a high-capacity, oil-free rotary vane vacuum pump engineered for demanding industrial and large-scale laboratory vacuum applications. Designed with robust mechanical architecture and precision-machined components, it operates on the principle of positive displacement via synchronized rotating vanes within an elliptical stator chamber—eliminating reliance on lubricating oil and ensuring contamination-free evacuation critical for semiconductor wafer handling, flat panel display (FPD) manufacturing, and large-volume solvent recovery systems. Its rated pumping speed of 40,000 L/min at atmospheric pressure enables rapid chamber evacuation in ultra-large vacuum chambers (e.g., >150 m³ load-lock or coating systems), significantly reducing process cycle times. With an ultimate vacuum level of 0.8 Pa, the SDL20E60 delivers stable base pressure performance suitable for medium-vacuum processes including degassing, drying, impregnation, and pre-pumping stages prior to high-vacuum system integration.

Key Features

• Dry, oil-free operation ensures zero hydrocarbon backstreaming—essential for cleanroom-compatible semiconductor and OLED fabrication environments.
• Modular design supports parallel configuration for customized pumping capacity up to 150,000 L/min, accommodating bespoke vacuum system scalability.
• Integrated nitrogen purge port enables inert gas purging during shutdown or maintenance, preventing oxidation of internal components and extending service life.
• Heavy-duty three-phase motor compatible with dual voltage ranges (200–220 V and 380–480 V) ensures global electrical interoperability under both 50 Hz and 60 Hz supply conditions.
• Structural rigidity achieved through cast-iron frame and vibration-damped mounting interface minimizes operational resonance in floor-mounted installations.
• Thermal management system maintains consistent rotor temperature during extended duty cycles, preserving dimensional stability and volumetric efficiency.

Sample Compatibility & Compliance

The SDL20E60 is not intended for direct sample analysis but serves as a primary vacuum source for process-critical equipment such as large-area sputtering systems, vacuum ovens, plasma etch load locks, and solvent recovery units. It complies with IEC 60034 (rotating electrical machines), ISO 8573-1:2010 Class 0 air purity certification for oil-free compression, and meets CE marking requirements for electromagnetic compatibility (EMC Directive 2014/30/EU) and low-voltage safety (LVD Directive 2014/35/EU). While not inherently GLP/GMP-certified, its traceable performance parameters and nitrogen purge functionality support audit readiness in regulated manufacturing environments governed by ISO 9001 or IATF 16949 quality management frameworks.

Software & Data Management

The SDL20E60 operates as a standalone electromechanical unit without embedded digital control or factory-integrated software. However, it features standardized analog I/O terminals (0–10 VDC and 4–20 mA) for integration into facility-wide SCADA or PLC-based vacuum system monitoring platforms. Users may implement third-party data acquisition systems to log real-time parameters—including motor current draw, inlet pressure (via optional Pirani or capacitance manometer interface), and runtime hours—for predictive maintenance scheduling and compliance documentation. All operational logs generated externally remain fully compliant with FDA 21 CFR Part 11 when implemented with appropriate electronic signature and audit trail configurations.

Applications

• Pre-evacuation and rough pumping for large-volume vacuum chambers in thin-film deposition lines (PVD/CVD).
• Rapid solvent removal from coated substrates in roll-to-roll and batch-type vacuum dryers.
• Atmospheric-pressure assisted transfer of 300 mm+ silicon wafers and Gen 10+ glass substrates in FPD manufacturing.
• Support vacuum for industrial leak testing of hermetic enclosures exceeding 10 m³ volume.
• Primary pumping stage in hybrid vacuum systems where turbo-molecular or cryogenic pumps require stable backing below 1 Pa.

FAQ

Is the SDL20E60 certified for use in Class 100 cleanrooms?
No—while oil-free and particle-minimized, it lacks ISO 14644-1 certification for cleanroom class rating; however, it is routinely deployed upstream of HEPA- or ULPA-filtered vacuum lines in controlled environments.
Does the pump include a built-in vacuum gauge?
No—pressure monitoring requires external instrumentation; the pump provides dedicated ports for connecting capacitance manometers or thermocouple gauges.
What maintenance intervals are recommended for continuous 24/7 operation?
Kashiyama recommends vane inspection every 6,000 operating hours and full rotor/stator alignment verification at 24,000 hours, per the OEM Maintenance Manual Rev. E (2023).
Can the SDL20E60 be operated vertically or tilted?
No—it must be installed strictly horizontal on a level, reinforced concrete foundation to maintain vane clearance tolerances and oil-free sealing integrity.
Is explosion-proof motor option available?
Yes—ATEX-certified Ex d IIB T4 motors are available as factory-configured options upon request (certification documentation supplied separately).