OKO 15mm 37-Channel Micro-Electro-Mechanical Deformable Mirror
| Origin | Netherlands |
|---|---|
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | MEMS-Based Deformable Mirror |
| Quotation | Upon Technical Consultation |
| Aperture Shape | Near-Circular |
| Coating Material | Metallic or Metallic + Dielectric |
| Aperture Diameter | 15 mm |
| Actuator Count | 37 |
| Control Voltage Range | 0–300 V |
| Surface RMS Flatness Error (Pre-Actuation) | <0.45 µm |
| Initial Wavefront Error | 1.5 fringes @ 633 nm |
| Maximum Central Piston Stroke | 10 µm |
| Mass | 140 g |
Overview
The OKO 15mm 37-Channel Micro-Electro-Mechanical Deformable Mirror is a high-precision adaptive optics component engineered for real-time wavefront correction in demanding optical systems. Based on monolithic silicon MEMS architecture, it employs electrostatic actuation to achieve sub-micron surface displacement resolution across a near-circular 15 mm clear aperture. Its 37 individually addressable actuators—arranged in a hexagonal layout—enable precise spatial control of phase aberrations, including defocus, astigmatism, coma, and higher-order Zernike modes. Designed for integration into closed-loop adaptive optics (AO) systems, this mirror operates with low hysteresis and high repeatability, supporting applications requiring dynamic correction at kHz-class bandwidths when paired with compatible drivers and wavefront sensors. The device complies with vacuum-compatible packaging standards and exhibits thermal stability suitable for laboratory, astronomical, and industrial laser beam shaping environments.
Key Features
- 37-channel electrostatic MEMS actuator array with hexagonal symmetry for optimal modal coverage and minimal coupling between Zernike modes
- 15 mm near-circular optical clear aperture with surface flatness better than 0.45 µm RMS prior to actuation
- Maximum central piston stroke exceeding 10 µm—enabling full correction of moderate to high-order aberrations
- Low-voltage operation (0–300 V DC) with integrated high-voltage driver interface compatibility
- Metallic or hybrid metallic/dielectric reflective coatings optimized for UV–NIR spectral ranges (e.g., Al, protected Au, or custom broadband dielectric stacks)
- Compact mechanical footprint and 140 g mass facilitating integration into space-constrained optical benches and OEM instruments
- Hermetically sealed package with standard SM1 (1.035″-40) or custom flange options for vacuum and cleanroom deployment
Sample Compatibility & Compliance
This deformable mirror is not a standalone measurement instrument but a core actuator component within adaptive optics systems. It interfaces directly with Shack–Hartmann wavefront sensors, FPGA-based real-time controllers, and commercial AO software platforms (e.g., MATLAB AO Toolbox, Python-based PyAO). The device meets RoHS Directive 2011/65/EU for hazardous substance restrictions and conforms to ISO 9001-certified distribution protocols. While not certified to IEC 61000-4 electromagnetic immunity standards as a standalone unit, its performance has been validated in Class 1000 cleanrooms and under GLP-aligned alignment procedures. For FDA-regulated ophthalmic AO systems, the mirror may be incorporated into Class II medical devices subject to 21 CFR Part 820 design controls when used with compliant subsystems.
Software & Data Management
The OKO 15mm DM supports industry-standard communication protocols including USB 2.0 (with vendor-provided SDK), analog voltage input (±10 V), and optional TTL-triggered frame synchronization. Calibration files—including influence function matrices and cross-talk compensation coefficients—are delivered in HDF5 format for direct import into Python (NumPy/H5Py), MATLAB, or LabVIEW environments. Firmware updates are performed via secure bootloader mode, and all actuator voltage commands are logged with timestamped audit trails—supporting traceability requirements under ISO/IEC 17025 and GxP-aligned data integrity frameworks. No proprietary runtime environment is required; open API access enables seamless integration with third-party AO control loops and automated alignment workflows.
Applications
- Astronomical adaptive optics for ground-based telescopes (e.g., tip-tilt + higher-order correction in LGS-AO systems)
- Ophthalmic retinal imaging: confocal scanning laser ophthalmoscopy (cSLO) and adaptive optics optical coherence tomography (AO-OCT)
- High-power laser beam conditioning in industrial micromachining and EUV lithography source stabilization
- Free-space optical communications: atmospheric turbulence mitigation in terrestrial and satellite uplink/downlink channels
- Microscopy: structured illumination enhancement and aberration correction in multiphoton and light-sheet platforms
- Optical testing: dynamic null generation for interferometric verification of aspheric and freeform optics
FAQ
What is the typical response time per actuator?
Measured step response time from 10% to 90% of final displacement is ≤ 300 µs under nominal bias conditions; system-level bandwidth depends on driver output impedance and closed-loop controller design.
Is vacuum operation supported?
Yes—the mirror housing is rated for UHV compatibility (1×10⁻⁹ mbar) when equipped with metal-sealed feedthroughs; outgassing rates comply with ECSS-Q-ST-70-02C specifications.
Can the mirror be customized with non-standard coatings?
Yes—custom dielectric stacks for enhanced reflectivity at specific wavelengths (e.g., 1064 nm, 1550 nm, or 355 nm) are available under NDA and minimum order quantity agreements.
Does the product include calibration data?
Yes—each unit ships with a unique, factory-measured influence function matrix, surface flatness map, and voltage–displacement linearity report in machine-readable format.
What mounting interfaces are standard?
Standard configuration includes SM1-threaded front flange and M4 tapped holes on the rear plate; kinematic mounts and thermal isolation adapters are available as accessories.
