Tongzhou Weipu D-Series Dedicated Chip Testing Circulating Chiller

Overview

The Tongzhou Weipu D-Series Dedicated Chip Testing Circulating Chiller is an engineered thermal management solution designed specifically for high-precision semiconductor testing environments. Unlike general-purpose chillers, the D-Series integrates tightly controlled temperature regulation, low-noise operation, and vibration-dampened fluid delivery—critical requirements when stabilizing sensitive wafer probing stations, automated test equipment (ATE) thermal subsystems, and laser-based metrology tools used in IC characterization. Its phase-change compression refrigeration architecture delivers stable heat extraction across a wide operational envelope (−20 °C to +95 °C), enabling both cryogenic die-level thermal cycling and high-temperature burn-in support. The chiller operates as a closed-loop secondary coolant system, circulating deionized or inhibited water-glycol mixtures to maintain consistent junction temperatures during parametric testing, RF validation, and reliability stress screening.

Key Features

• Integrated design with compact horizontal footprint optimized for integration beneath or adjacent to chip test handlers and probe stations
• High-stability temperature control (±0.1 °C) achieved via PID-regulated refrigerant expansion valves and dual-sensor feedback loops (reservoir + outlet)
• Wide-range variable-speed circulation pump (6–50 L/min at 1.5–6 bar) supporting diverse flow resistance profiles—from microchannel cold plates to multi-zone thermal chuck manifolds
• Modular refrigeration circuit with R-410A or R-513A refrigerant options compliant with current EU F-Gas Regulation (EU No. 517/2014) and EPA SNAP program guidelines
• Corrosion-resistant reservoir and wetted parts (316L stainless steel, EPDM/NBR seals) compatible with DI water, 20–30% ethylene glycol, and low-conductivity coolants required for semiconductor tool interfaces
• RS-485 Modbus RTU and optional Ethernet/IP communication ports for integration into factory-wide SCADA or MES platforms

Sample Compatibility & Compliance

The D-Series chiller is validated for continuous-duty operation with semiconductor fabrication and test equipment requiring ISO 14644-1 Class 5–7 cleanroom-compatible cooling performance. It meets IEC 61000-6-2 (immunity) and IEC 61000-6-4 (emission) standards for industrial environments. All electrical components conform to UL 61010-1 and CE marking requirements. For regulated laboratories performing JEDEC JESD22-A104 or JESD22-A119 thermal cycling qualification, the chiller’s traceable temperature stability supports GLP-compliant audit trails when paired with optional data logging firmware (IEC 62304 Class B software lifecycle compliance). The unit does not require external condenser water supply—its water-cooled condenser accepts facility chilled water between 10 °C and 32 °C at 3–6 bar inlet pressure.

Software & Data Management

Equipped with embedded ARM Cortex-M7 controller running real-time OS, the D-Series provides local HMI operation via 4.3″ capacitive touchscreen with multilingual UI (English, Japanese, Korean, Simplified Chinese). Full remote monitoring and configuration are supported through Web-based HTTP/HTTPS interface (TLS 1.2+) or native Windows/Linux client application. Logged parameters—including setpoint, actual temperature, pump speed, compressor run time, and alarm history—are timestamped with UTC synchronization and exportable in CSV or XML format. Optional FDA 21 CFR Part 11-compliant firmware adds electronic signature capability, role-based access control (admin/operator), and immutable audit trail generation for GMP-aligned process validation.

Applications

• Thermal stabilization of automated wafer probers and MEMS test fixtures during DC/RF parametric measurement
• Cooling of high-power laser diodes and VCSEL arrays in photonic IC test benches
• Temperature control for thermal chuck systems in accelerated life testing (HTOL, ESD, TCT)
• Heat removal from RF power amplifiers and millimeter-wave test instrumentation (VNA, signal analyzers)
• Secondary coolant loop for cryo-cooled SEM/FIB columns and ultra-low-noise preamplifier enclosures
• Support of liquid nitrogen–assisted thermal shock chambers used in package-level reliability assessment

FAQ

What is the maximum allowable coolant conductivity for use with semiconductor test tools?
The D-Series supports coolant conductivity up to 5 µS/cm when using deionized water; with 20–30% inhibited glycol blends, conductivity may range from 20–100 µS/cm depending on inhibitor formulation.
Can the chiller operate continuously at −20 °C ambient temperature?
Yes—the unit is rated for continuous operation within an ambient range of 5 °C to 40 °C; sub-ambient ambient conditions require optional low-ambient kit (condenser fan speed modulation and crankcase heater).
Is there built-in protection against low-flow or dry-run conditions?
Yes—integrated flow sensor and pressure transducer trigger immediate pump shutdown and alarm if flow falls below 2 L/min or differential pressure drops below 0.3 bar for >5 seconds.
How is temperature calibration verified and maintained?
Each unit ships with NIST-traceable calibration certificate (ASME PTC 19.3TW); field recalibration is performed using dual-channel reference thermometer inputs per ISO/IEC 17025 accredited procedure.
What safety certifications apply to the electrical enclosure?
The chiller carries UL 61010-1, CSA C22.2 No. 61010-1, and CE marking under the Low Voltage Directive 2014/35/EU and EMC Directive 2014/30/EU.