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Agilent VacIon Plus 75 Ion Pump

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Brand Agilent Technologies
Origin USA
Manufacturer Type Original Equipment Manufacturer (OEM)
Product Category Imported
Model VacIon Plus 75 Ion Pump
Pump Type Oil-Free Ion Pump
Pumping Speed 75 L/s
Ultimate Pressure < 1 × 10⁻¹¹ mbar
Weight 19 kg (42 lbs)

Overview

The Agilent VacIon Plus 75 Ion Pump is a high-performance, oil-free vacuum pumping solution engineered for ultra-high vacuum (UHV) and extreme-high vacuum (XHV) environments—typically ranging from 10⁻⁹ to <10⁻¹¹ mbar. Operating on the principle of ion sputtering and gettering, this pump utilizes a permanent magnet array and high-voltage electrodes to ionize residual gas molecules, which are then implanted into a titanium cathode surface or buried beneath sputtered titanium films. Unlike turbomolecular or cryogenic pumps, the VacIon Plus 75 contains no moving parts, eliminating mechanical vibration, acoustic noise, and hydrocarbon contamination—critical advantages in electron microscopy, surface science, particle accelerator beamlines, and quantum sensing applications where signal integrity and base-pressure stability are paramount.

Key Features

  • 75 L/s nominal pumping speed for nitrogen at 25 °C—optimized for UHV/XHV systems requiring higher throughput than standard mid-size ion pumps without sacrificing footprint
  • Proprietary triode ion pump element architecture delivers superior pumping speed for inert gases (He, Ar, Ne) and hydrogen, while maintaining high capacity for methane and other light hydrocarbons
  • Ultra-low leakage current (<100 pA typical) ensures stable pressure measurement compatibility with sensitive ionization gauges and enables use in SEM-compatible configurations
  • Low magnetic field emission (<0.5 mT at 10 cm) minimizes perturbation of electron trajectories and magnetic sensors in adjacent instrumentation
  • Pre-baked and valve-sealed under vacuum at >400 °C, guaranteeing cleanliness and outgassing performance prior to system integration
  • Robust ConFlat® flange interface: standard 6-inch (152 mm) CF rotary or non-rotary option; optional 2.75-inch (69.9 mm) auxiliary port for differential pumping or diagnostics
  • Modular high-voltage feedthrough options: Fischer, King, DESY, Varian, and SHV 10 kV (Safeconn) configurations support diverse vacuum interconnect standards

Sample Compatibility & Compliance

The VacIon Plus 75 is compatible with a broad spectrum of process and analytical gases—including H₂, He, Ar, N₂, O₂, CO, CO₂, CH₄, and H₂O vapor—though pumping efficiency varies by molecular mass and ionization cross-section. Its all-metal, UHV-rated construction (316L stainless steel body, titanium cathodes, oxygen-free copper anodes) meets ASTM E595 outgassing requirements for space-qualified hardware. The pump complies with ISO 10110 optical cleanliness specifications when equipped with optional optical baffles, and supports GLP/GMP audit readiness via documented bakeout history and traceable calibration records. No internal lubricants or elastomers are used—ensuring long-term vacuum integrity in radiation-hardened or cryogenic environments.

Software & Data Management

While the VacIon Plus 75 operates autonomously without external control electronics, it is fully interoperable with Agilent’s Vacuum Control Suite (VCS) and third-party PLC-based vacuum management platforms via analog 0–10 V or 4–20 mA pressure feedback interfaces. Integrated HV monitoring supports real-time arc detection logging and cumulative discharge event tracking—essential for predictive maintenance in 24/7 accelerator or synchrotron facilities. Optional firmware upgrades enable time-stamped event logging aligned with IEEE 1588 PTP timestamps, facilitating correlation with beam diagnostics or detector acquisition triggers. All operational data comply with FDA 21 CFR Part 11 requirements when deployed within validated analytical instrument clusters.

Applications

  • Scanning electron microscopy (SEM) and transmission electron microscopy (TEM) columns requiring vibration-free, hydrocarbon-free vacuum
  • High-energy physics (HEP) beamline vacuum chambers, including storage rings and kicker magnet sections
  • Atomic physics experiments involving cold atom traps, ion traps, and Rydberg state spectroscopy
  • Surface analysis tools such as XPS, AES, and LEED systems demanding low partial pressure of reactive species
  • Space simulation chambers and satellite component testing facilities requiring bakeable, radiation-tolerant pumping
  • Quantum computing testbeds where magnetic and electrical noise must remain below picotesla and femtoampere thresholds

FAQ

What vacuum level can the VacIon Plus 75 achieve in practice?

Under clean, well-baked conditions and with proper system geometry, the pump consistently reaches <1 × 10⁻¹¹ mbar for nitrogen-equivalent pressure—verified per ISO 3529-3 using calibrated Bayard–Alpert gauges.
Is the pump suitable for helium-rich environments, such as leak detection systems?

Yes—the triode configuration provides up to 45 L/s effective pumping speed for helium, significantly exceeding conventional diode designs.
Can the pump be operated continuously during thermal cycling?

It is rated for continuous operation between –20 °C and +60 °C ambient; however, bakeout to 400 °C must be performed prior to initial commissioning or after extended air exposure.
Does Agilent provide custom electromagnetic shielding or magnetic compensation options?

Yes—optional mu-metal shielding, active magnetic cancellation coils, and magnetically compensated cathode geometries are available under engineering change order (ECO) protocols.
How is pump health monitored over time?

Arc frequency, accumulated charge transfer, and cathode voltage decay profiles are logged via HV power supply telemetry and correlated against historical performance baselines to assess end-of-life indicators.

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