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| Origin | Beijing, China |
|---|---|
| Manufacturer Type | Distributor |
| Origin Category | Domestic |
| Model | EZH-S |
| Price Range | USD 2,800 – 7,000 |
| Max. Rotation Speed | 5000 rpm |
| Speed Resolution | 1 rpm |
| Max. Acceleration | 50000 rpm/s |
| Substrate Diameter | 50 mm (2") |
| Chamber Diameter | 180 mm |
| Heating Plate Diameter | Φ30 mm (customizable) |
| Temperature Range | Ambient to 150 °C |
| Temp. Resolution | 0.1 °C |
| Temp. Stability | ±0.5 °C (steady-state), ±2 °C (during spin-up/down) |
| Programmable Steps | 100 steps × 100 programs |
| Dispense Port | 1-channel auto-dosing |
| Power Input | AC 220 V, 5 A |
| Heating Power | 200 W |
| Motor Power | 200 W |
| Weight | 15 kg |
| Brand | ANALYSIS |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Direct Manufacturer |
| Product Origin | Domestic (China) |
| Model | HC300SE |
| Rotation Speed | 5000 rpm |
| Rotation Accuracy | ±50 rpm |
| Maximum Acceleration | 30,000 rpm/s |
| Substrate Diameter | 300 mm (12") |
| Chamber Diameter | 427 mm |
| Control Interface | Touchscreen + RS-232/USB/Ethernet |
| Process Memory | ≥200 user-defined programs |
| Vacuum Chuck Type | Pneumatic or electrostatic (configurable) |
| Power Supply | 220 V AC, 50/60 Hz |
| Brand | Analysis |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Authorized Distributor |
| Product Category | Domestic |
| Model | HC160SE |
| Price | Upon Request |
| Max. Rotation Speed | 12,000 rpm |
| Speed Resolution | 1 rpm |
| Max. Acceleration | 30,000 rpm/s |
| Maximum Substrate Diameter | 160 mm |
| Chamber Diameter | 220 mm |
| Programmable Programs | 100 × 10 steps |
| Touchscreen Interface | 4.3″ Color LCD |
| Vacuum & Lid Interlock Safety | Yes |
| Waste Exhaust Port | Yes |
| Auto-Dispense Interface | Standard (upgradable) |
| Power Input | AC 200–230 V |
| Dimensions (L×W×H) | 358 × 250 × 255 mm |
| Substrate Compatibility | Ø10–160 mm |
| Spin Time Range | 0.1–3000 s |
| Time Resolution | 0.1 s |
| Chamber Material | CNC-machined HDPE |
| Housing Material | Stainless Steel |
| Enclosure | Transparent Polycarbonate Lid |
| Brand | Analysis |
|---|---|
| Origin | Beijing, China |
| Model | HC120SE |
| Max. Rotation Speed | 12000 rpm |
| Speed Accuracy | ±1 rpm |
| Acceleration Range | 100–30000 rpm/s (no-load) |
| Substrate Diameter | 5–120 mm |
| Chamber Diameter | 200 mm |
| Programmable Steps per Recipe | 10 |
| Total Recipes Storage | 100 |
| Time Resolution | 0.1 s (max. step duration: 3000 s) |
| Display | 4.3-inch full-color TFT touchscreen GUI |
| Brand | Analysis |
|---|---|
| Origin | Beijing, China |
| Model | HC160SE |
| Rotation Speed | 100–12,000 rpm |
| Rotation Time Resolution | 0.1 s |
| Max Acceleration | 30,000 rpm/s |
| Substrate Diameter Range | 5–160 mm |
| Chamber Diameter | 220 mm |
| Speed Resolution | 1 rpm |
| Max Spin Duration | 3000 s |
| Programmable Steps | 10 programs × 10 steps each |
| Vacuum Interlock | Yes |
| Lid Safety Interlock | Yes |
| Motorized Dispense Protection | Yes |
| Waste Exhaust Port | Yes |
| User Password Protection | Yes |
| Adjustable Leveling Base | Yes |
| Brand | Analysis |
|---|---|
| Origin | Beijing, China |
| Model | HC150SE |
| Rotation Speed | 100–12,000 rpm |
| Rotation Time Resolution | 0.1 s |
| Max Acceleration | 30,000 rpm/s |
| Substrate Diameter | 5–150 mm |
| Chamber Diameter | 212 mm |
| Speed Resolution | 1 rpm |
| Max Spin Duration | 3000 s |
| Programmable Steps | 10 programs × 10 steps each |
| Control Interface | 4.3-inch color touchscreen |
| Chamber Material | CNC-machined HDPE |
| Vacuum Pump | Integrated oil-free vacuum pump |
| Power Input | AC 200–230 V |
| Brand | Analysis |
|---|---|
| Origin | Beijing, China |
| Model | HCH300P |
| Temperature Range | Ambient to 300 °C |
| Temperature Resolution | 0.1 °C |
| Temperature Uniformity | <1% across surface |
| Temperature Accuracy | ±0.5 °C |
| Ramp Rate | 0.1–15 °C/min (10-segment programmable) |
| Lift Stroke | 30 mm |
| Lift Resolution | 0.1 mm |
| Lift Steps | 5 per program |
| Program Storage | 100 user-defined lift + thermal profiles |
| Heating Power | 1000 W |
| Platen Size | 220 mm × 220 mm |
| Weight | 25 kg |
| Dimensions (D×W×H) | 450 × 300 × 295 mm |
| Control Interface | 7-inch full-color capacitive touchscreen |
| Surface Options | Anodized aluminum or PTFE-coated corrosion-resistant platen |
| Vacuum Adsorption | Integrated, triggered automatically during pin lift engagement |
| Brand | Analysis |
|---|---|
| Origin | USA |
| Manufacturer | Analysis Instruments, Inc. |
| Product Type | Imported |
| Model | X-Pro II |
| Pricing | Available upon Request |
| Brand | ANALYSIS |
|---|---|
| Origin | Beijing, China |
| Model | HC160SE |
| Rotation Speed | 100–12,000 rpm |
| Speed Resolution & Accuracy | ±1 rpm |
| Max Acceleration | 30,000 rpm/s |
| Maximum Substrate Diameter | 160 mm (6″ wafer) |
| Chamber Diameter | 220 mm |
| Programmable Steps | 100 programs × 10 steps each |
| Input Voltage | AC 100–230 V |
| Dimensions (L×W×H) | 358 × 250 × 255 mm |
| Chamber Material | HDPE |
| Housing Material | Stainless Steel (SUS) |
| Lid | Solvent-resistant polycarbonate (PC) |
| Safety Interlocks | Vacuum interlock + lid switch interlock |
| Brand | Analysis |
|---|---|
| Origin | Beijing, China |
| Model | HC150PE |
| Max. Rotation Speed | 12000 rpm |
| Speed Resolution | 1 rpm |
| Max. Acceleration | 30000 rpm/s |
| Wafer Diameter Capacity | 150 mm |
| Chamber Diameter | 212 mm |
| Touchscreen Interface | 4.3-inch Color LCD |
| Programmable Steps | 100 Programs × 10 Steps Each |
| Spin Time Range | 0.1–3000 s |
| Time Resolution | 0.1 s |
| Chamber Material | CNC-Machined HDPE |
| Lid Material | Transparent Polycarbonate |
| Vacuum Interlock | Yes |
| User Password Protection | Yes |
| Leveling Adjustable Base | Yes |
| Auto-Dispense Interface | 1 Channel |
| Dimensions (L×W×H) | 310 × 254 × 250 mm |
| Power Input | AC 200–230 V |
| Brand | Analysis |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | 1300CSX |
| Price Range | USD $26,000–$39,000 (FOB US Port) |
| Max Substrate Diameter | 300 mm |
| Max Operating Temperature | 300 °C |
| Force Range | 0–445 N (0–100 lbf) |
| Speed Limit | 100 mm/s |
| Vacuum Level | −63.5 to −68.6 kPa (−25 to −27 inHg) |
| Nitrogen/CDA Supply | 689 kPa (100 psi), 28.3 L/min |
| Footprint | 1245 mm × 1003 mm × 1334 mm (W×D×H) |
| Weight | 187 kg (operational), 581 kg (shipping) |
| MTBF | >600 h / >6000 cycles |
| Uptime | >99% over 12 months |
| MTTR | <24 h |
| Throughput | 8–14 WPH (<150 mm), 4–8 WPH (200–300 mm) |
| Brand | Analysis |
|---|---|
| Model | HDJS10 |
| Type | Bottle-Top Dispenser-Based Manual Quantitative Dispensing System |
| Construction Materials | PTFE, FEP, BSG, PP |
| Max Operating Pressure | 500 mbar |
| Max Kinematic Viscosity Handling | 500 mm²/s |
| Max Liquid Temperature | 40 °C |
| Max Liquid Density | 2.2 g/cm³ |
| Volume Ranges | 0.5–5 mL (0.1 mL graduation), 1–10 mL (0.2 mL graduation), 2.5–25 mL (0.5 mL graduation), 5–50 mL (1 mL graduation) |
| Includes | Five Universal Bottle Adapters |
| Sterilization | Autoclavable (121 °C, 20 min) |
| Chemical Resistance | Broad-spectrum (acids, bases, solvents, photoresists) |
| Brand | Analysis |
|---|---|
| Origin | Beijing, China |
| Model | HC160PE |
| Rotation Speed | 100–12,000 rpm |
| Speed Resolution | 1 rpm |
| Max. Acceleration (no-load) | 30,000 rpm/s |
| Substrate Diameter Range | 5–160 mm |
| Chamber Diameter | 220 mm |
| Control Interface | 4.3″ color touchscreen |
| Programmability | 100 user-defined programs, up to 10 steps per program |
| Spin Time Range | 0.1–3000 s (resolution: 0.1 s) |
| Vacuum Interlock | yes |
| Lid Safety Interlock | yes |
| Motorized Dispense Interface | 1 channel (optional auto-dispense upgrade) |
| Leveling Base | adjustable |
| Construction | 一体 molded HDPE chamber with concave splash-resistant interior walls |
| Included | oil-free vacuum pump, three standard chucks (customizable) |
| Brand | Analysis |
|---|---|
| Origin | Beijing, China |
| Model | HCH300P |
| Maximum Substrate Size | 220 × 220 mm (compatible with ≤8-inch wafers) |
| Temperature Range | Ambient to 300 °C |
| Temperature Resolution | 0.1 °C |
| Temperature Uniformity | <1% across surface |
| Temperature Accuracy | ±0.5 °C |
| Timer Range | 0.1–100,000 s |
| Timer Resolution | 0.1 s |
| Pin-Lift Stroke | 0–30 mm |
| Pin-Lift Resolution | 0.1 mm |
| Heating Power | 1000 W |
| Weight | 25 kg |
| Dimensions (L×W×H) | 450 × 300 × 295 mm |
| Control Interface | 7-inch full-color capacitive touchscreen |
| Heating Plate Material | Anodized aluminum or PTFE-coated corrosion-resistant surface |
| Programmable Lift Steps | 5 per recipe |
| Stored Recipes | 100 user-defined programs |
| Safety Features | Radiant heat shielding cover, stainless steel chassis, thermal insulation design |
| Brand | Analysis |
|---|---|
| Origin | Beijing, China |
| Model | HC220PE |
| Maximum Rotation Speed | 0–10,000 rpm |
| Speed Resolution | 0.1 rpm |
| Acceleration Rate | up to 50,000 rpm/s (no-load) |
| Maximum Substrate Diameter | 220 mm |
| Chamber Diameter | 252 mm |
| Programmable Steps | 100 programs × 100 steps each |
| Time Resolution | 0.1 s per step |
| Uniformity | < ±3% (measured over central 150 mm of 150 mm Si wafer, edge exclusion 3 mm) |
| Motor Type | Industrial-grade 400 W servo motor with sealed rotor architecture |
| Chamber Material | HDPE (high-density polyethylene) |
| Enclosure Material | Electropolished stainless steel (316L-grade compatible) |
| Control Interface | 7-inch capacitive touchscreen HMI with embedded real-time OS |
| Exhaust Port Location | Bottom-mounted beneath chuck for laminar airflow optimization |
| Lid | Chemically resistant transparent polycarbonate with dual-seal gasket |
| Brand | Analysis |
|---|---|
| Origin | Beijing, China |
| Model | HC220SE |
| Max Speed | 0–10000 rpm |
| Speed Resolution | 0.1 rpm |
| Speed Stability | < ±0.1 rpm |
| Acceleration | 0–50000 rpm/s (no-load) |
| Substrate Diameter Range | 5–220 mm |
| Chamber Diameter | 252 mm |
| Programmable Steps | 100 programs × 100 steps each |
| Touchscreen Interface | 8-inch color HMI |
| Vacuum Interlock | Yes |
| Lid Safety Interlock | Yes |
| Waste Drain Port | Yes |
| Leveling Adjustable Feet | Yes |
| Chamber Material | CNC-machined corrosion-resistant HDPE |
| Anti-splash Cavity Design | Concave inner wall geometry |
| Spin Direction | Reversible (CW/CCW) |
| Time Resolution | 0.1 s |
| Maximum Spin Duration | 3000 s |
| Uniformity | < ±3% (edge-excluded, 3 mm border) |
| Power Input | AC 200–230 V |
| Origin | Beijing, China |
|---|---|
| Manufacturer Type | Distributor |
| Origin Category | Domestic |
| Model | SC200-SE |
| Price Range | USD 7,000 – 14,000 (FOB) |
| Max Rotation Speed | 0–5000 rpm |
| Speed Resolution | 1 rpm/s |
| Max Acceleration | 10,000 rpm/s |
| Substrate Diameter | 304.8 mm (12″) |
| Chamber Diameter | 440 mm |
| Speed Stability | < ±1 rpm |
| Time Resolution | 0.1 s/step |
| Programs | 100 × 100 steps |
| Uniformity | < ±3% (6″ measurement area, edge exclusion of 3 mm) |
| Motor | 400 W industrial servo motor |
| Enclosure Material | Electropolished stainless steel (316L-grade compatible) |
| Chamber Lining | PTFE-coated or polyethylene bowl |
| Control Interface | 7″ capacitive touchscreen HMI |
| Exhaust Location | Bottom-mounted, integrated with chuck base |
| Dimensions (W×D×H) | 463 × 613 × 306 mm |
| Brand | Ansys |
|---|---|
| Origin | USA |
| Manufacturer Type | Original Equipment Manufacturer (OEM) |
| Product Category | Imported Instrument |
| Model | Apogee 450 |
| Rotation Speed | 0–30,000 rpm/s (no-load) |
| Speed Accuracy | ±0.2 rpm |
| Speed Resolution | <0.2 rpm |
| Max Acceleration | 0–3000 rpm/s (with 350 mm × 6 mm embedded chuck) |
| Substrate Compatibility | Ø10 mm to Ø450 mm wafers |
| Step Time Resolution | 0.1 s (max step duration: 9999.9 s) |
| GUI | Full-color 7″ capacitive touchscreen with alphanumeric graphical interface |
| Data Interface | USB 2.0, Ethernet (10/100 Mbps), StreamSync™ communication protocol |
| Vacuum & Lid Interlock | Yes |
| Chamber Material | HDPE (High-Density Polyethylene) spin bowl |
| Optional Features | N₂ purging for inert ambient, X-PRO standalone workstation integration, overhead exhaust hood with chemical fume containment |
| Brand | Analysis |
|---|---|
| Origin | Beijing, China |
| Model | HC150PE |
| Rotation Speed | 100–12,000 rpm |
| Rotation Time Resolution | 0.1 s |
| Max Acceleration | 30,000 rpm/s |
| Substrate Diameter | 5–150 mm |
| Chamber Diameter | 212 mm |
| Programmable Steps | 10 programs × 10 steps each |
| Power Input | AC 200–230 V |
| Brand | Analysis |
|---|---|
| Origin | Beijing, China |
| Model | HC150SE |
| Max. Speed | 12000 rpm |
| Speed Accuracy | ±1 rpm |
| Speed Stability | <1 rpm |
| Max. Acceleration | 30000 rpm/s |
| Substrate Diameter | 5–150 mm (up to 6-inch wafers) |
| Chamber Diameter | 212 mm |
| Programmable Steps | 10 programs × 10 steps each |
| Touchscreen | 4.3″ color LCD |
| Control System | Industrial-grade PLC |
| Vacuum Interlock | Yes |
| Leveling Feet | Adjustable |
| Chamber Material | HDPE (chemically resistant) |
| Dimensions (L×W×H) | 310 × 254 × 254 mm |
| Power Input | AC 200–230 V |
| Brand | Apogee |
|---|---|
| Origin | USA |
| Manufacturer | Apogee Instruments, Inc. |
| Model | Apogee200 |
| Rotation Speed Range | 0–30,000 rpm (no-load) |
| Speed Accuracy | ±0.2 rpm |
| Acceleration | 0–30,000 rpm/s (no-load) |
| Step Time Resolution | 0.1 s (max step duration: 9999.9 s) |
| Substrate Compatibility | Ø1 mm to Ø200 mm circular |
| Chamber Material | HDPE (High-Density Polyethylene) |
| Power Input | 100–125 VAC / 208–240 VAC, 50/60 Hz |
| Max Power Consumption | 655 W |
| Vacuum Range | 20–25 inHg |
| Exhaust Flow | 20–50 CFM at 0.2″ H₂O |
| N₂/CDA Supply | 70 psi |
| Dimensions (W×D×H) | 13.25″×19″×12″ (33.65×48.26×30.48 cm) |
| Net Weight | 40 lb (18.14 kg) |
| Shipping Weight | 100 lb (45.36 kg) |
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