Pfeiffer HiPace 700 Turbo Molecular Pump
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Model | HiPace 700 |
| Pump Type | Oil-Free Turbo Molecular Pump |
| Pumping Speed for N₂ | 685 L/s |
| Ultimate Pressure (N₂) | < 5 × 10⁻¹⁰ hPa |
| Weight | 17.4 kg |
| Protection Rating | IP54 |
| Certifications | SEMI S2, UL/CSA |
| Operating Voltage | 48 V DC |
| Max. Rotational Speed | 49,200 rpm ±2% |
| Startup Time | 2 min |
| Compression Ratios (Ar/N₂ >1×10¹¹, H₂ | 4×10⁵, He: 3×10⁷) |
| Gas Flow Capacity (N₂ @ full speed) | 6.5 hPa·L/s |
| Magnetic Field Tolerance | ≤6 mT |
Overview
The Pfeiffer HiPace 700 is a high-performance, oil-free turbo molecular pump engineered for ultra-high vacuum (UHV) and extreme high vacuum (XHV) applications in research laboratories, semiconductor fabrication, analytical instrumentation (e.g., mass spectrometry, surface science), and advanced thin-film deposition systems. Based on proven rotor-dynamic design principles, the HiPace 700 employs a multi-stage turbine configuration with precision-machined titanium and stainless-steel blades to achieve exceptional pumping efficiency across a broad molecular weight range. Its operation relies on momentum transfer from rapidly rotating blades (49,200 rpm) to gas molecules—enabling effective compression and exhaust against atmospheric backpressure when paired with a suitable backing pump. With a nitrogen pumping speed of 685 L/s and an ultimate pressure of < 5 × 10⁻¹⁰ hPa, the HiPace 700 delivers industry-leading performance in compact footprint, making it ideal for space-constrained UHV chambers and integrated process tools.
Key Features
- Compact, modular design optimized for flexible integration—supports mounting in any orientation (horizontal, vertical, inverted) without performance degradation.
- Robust bearing system incorporating hybrid ceramic ball bearings and active magnetic damping, ensuring long service life and high operational reliability under continuous duty cycles.
- Integrated air-cooling architecture eliminates need for external water cooling circuits—reducing infrastructure complexity and maintenance overhead.
- IP54-rated enclosure provides protection against dust ingress and low-pressure water jets, enabling stable operation in industrial cleanroom and factory-floor environments.
- Compliant with SEMI S2 safety standards and UL/CSA certification—validated for use in semiconductor manufacturing equipment and regulated R&D facilities.
- Low power consumption (48 V DC, max. 8.4 A) and rapid startup time (~2 minutes) enhance system responsiveness and energy efficiency.
- High compression ratios (>1 × 10¹¹ for Ar and N₂; 4 × 10⁵ for H₂; 3 × 10⁷ for He) ensure effective isolation of process chambers from foreline contamination and enable stable operation with reactive or corrosive gases (e.g., Cl₂, NH₃, WF₆).
Sample Compatibility & Compliance
The HiPace 700 is compatible with standard vacuum flange interfaces—including ISO-KF DN 160, CF-F DN 160, and ISO-F DN 160—ensuring seamless integration into existing UHV/XHV systems. Its corrosion-resistant materials (electropolished stainless steel housing, titanium rotor stages) support prolonged exposure to mildly aggressive process chemistries. From a regulatory standpoint, the pump meets key international requirements for laboratory and industrial vacuum systems: compliance with SEMI S2 (safety guidelines for semiconductor manufacturing equipment), UL 61010-1 and CSA C22.2 No. 61010-1 (electrical safety), and electromagnetic compatibility per EN 61326-1. While not inherently 21 CFR Part 11 compliant as a standalone device, its digital interface (when used with TC 400 or TCP 350 controllers) supports audit-trail-capable data logging when implemented within validated GxP or GLP workflows.
Software & Data Management
The HiPace 700 operates in conjunction with Pfeiffer’s TC 400 or TCP 350 intelligent controllers, which provide real-time monitoring of rotational speed, bearing temperature, vibration signature, current draw, and status alarms via RS-485 or Ethernet (TCP/IP). Controller firmware supports programmable ramp profiles, interlock logic for safe shutdown sequences, and event logging with timestamped entries. Integration with LabVIEW, EPICS, or custom SCADA platforms is enabled through standardized Modbus RTU/TCP and OPC UA protocols. All controller units feature non-volatile memory for storing calibration parameters and operational history—critical for traceability in regulated environments. Optional analog I/O (0–10 V / 4–20 mA) allows direct interfacing with legacy PLC-based vacuum control systems.
Applications
- Ultra-high vacuum systems for electron microscopy (SEM, TEM), Auger electron spectroscopy (AES), and X-ray photoelectron spectroscopy (XPS).
- Ion implantation and plasma etching tools in semiconductor front-end-of-line (FEOL) processing.
- Residual gas analysis (RGA) and quadrupole mass spectrometry (QMS) systems requiring fast response and low base pressure.
- Atomic layer deposition (ALD), physical vapor deposition (PVD), and molecular beam epitaxy (MBE) reactors.
- Gravitational wave detector vacuum systems and fundamental physics experiments demanding XHV stability and minimal outgassing.
- Space simulation chambers and particle accelerator beamline vacuum sections.
FAQ
What backing pump is required for optimal operation of the HiPace 700?
A dry scroll or diaphragm backing pump with ≥12 m³/h capacity and ultimate pressure ≤1 × 10⁻² hPa is recommended. For high-throughput or corrosive gas applications, a chemically resistant dry pump (e.g., Pfeiffer DuoLine series) is advised.
Can the HiPace 700 be operated continuously at full speed?
Yes—the pump is rated for continuous 24/7 operation at nominal speed (49,200 rpm) under ambient temperatures up to 40 °C and relative humidity ≤80 % (non-condensing), provided adequate ventilation and thermal management are maintained.
Is remote diagnostics supported?
Yes—via TCP/IP-enabled controllers (TCP 350), users can access live telemetry, perform firmware updates, and execute diagnostic routines using Pfeiffer’s Vacuum Manager software or third-party network management tools.
Does the HiPace 700 require periodic oil changes or lubrication?
No—it is a fully oil-free, dry-running turbomolecular pump. The hybrid ceramic bearing system is permanently sealed and does not require relubrication throughout its service life.
How is vibration minimized during high-speed operation?
The rotor assembly undergoes dynamic balancing to G0.4 grade per ISO 1940-1, and the integrated damping system actively compensates for transient imbalances, resulting in vibration amplitudes < 1.5 µm peak-to-peak at operating speed.
