Pfeiffer Vacuum HiPace 700 Turbo Molecular Pump
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Pump Type | Turbo Molecular Pump |
| Pumping Speed (N₂) | 685 L/s |
| Ultimate Pressure | < 5 × 10⁻¹⁰ hPa |
| Inlet Flange | DN 160 ISO-K / CF-F / ISO-F |
| Protection Rating | IP54 |
| Certifications | SEMI S2, UL/cUL, CSA |
| Cooling | Integrated Air Cooling |
| Controller Options | TC 400, TCP 350, Profibus-enabled variants |
| Weight | 11.5–17.4 kg |
| Startup Time | ≤ 6.5 min |
| Compression Ratio (N₂) | > 1 × 10¹¹ |
| Max. Starting Pressure (N₂) | < 1 × 10⁻² mbar |
Overview
The Pfeiffer Vacuum HiPace 700 is a high-performance, oil-free turbo molecular pump engineered for demanding ultra-high vacuum (UHV) and extreme high vacuum (XHV) applications. Based on the proven Couette flow principle, it achieves gas molecule momentum transfer via high-speed rotating titanium-bladed rotors (up to 90,000 rpm), enabling efficient pumping of light gases—including H₂, He, and N₂—without hydrocarbon contamination. Designed for integration into compact, vibration-sensitive systems, the HiPace 700 delivers exceptional pumping speed (685 L/s for N₂) and ultimate pressure performance (< 5 × 10⁻¹⁰ hPa) in a space-optimized footprint. Its robust mechanical architecture supports operation in industrial environments (IP54-rated housing) and meets stringent safety standards including SEMI S2, UL 61010-1, and CSA C22.2 No. 61010-1—making it suitable for both research-grade instrumentation and production-critical vacuum processes.
Key Features
- Ultra-compact design with DN 160 inlet flange options (ISO-K, CF-F, ISO-F) for flexible system integration
- Integrated air cooling eliminates need for external water circuits or chillers
- High rotor stability and low-vibration operation optimized for electron microscopy, accelerator mass spectrometry (AMS), and surface analysis tools
- Wide operational pressure range: start-up up to 1 × 10⁻² mbar; continuous operation from 10⁻³ mbar down to < 5 × 10⁻¹⁰ hPa
- Exceptional compression ratio (> 1 × 10¹¹ for N₂) ensures effective isolation between roughing and high-vacuum stages
- Multiple controller compatibility: TC 400 (analog/digital I/O), TCP 350 (Ethernet/RS485), and Profibus-enabled variants support full remote monitoring, interlock logic, and real-time status diagnostics
- Modular sealing options—including metal-sealed (CF) and elastomer-sealed (ISO-K/F) configurations—for application-specific contamination control and bakeout compatibility
Sample Compatibility & Compliance
The HiPace 700 is compatible with inert, reactive, and corrosive process gases when used with appropriate foreline protection (e.g., cryo-traps or chemical scrubbers). Its all-metal construction and absence of lubricants ensure compatibility with UHV-compatible materials (316L stainless steel, oxygen-free copper, ceramic insulators) and adherence to ASTM E576 and ISO 20483 requirements for residual gas analysis (RGA) integrity. The pump complies with EU Machinery Directive 2006/42/EC, Electromagnetic Compatibility Directive 2014/30/EU, and RoHS 2011/65/EU. For regulated environments—including GLP laboratories and FDA-regulated analytical facilities—the TCP 350 controller supports audit-trail-capable data logging aligned with 21 CFR Part 11 requirements when integrated with compliant SCADA or LIMS platforms.
Software & Data Management
Pfeiffer’s proprietary Vacuum Control Software (VCS) enables full configuration, real-time parameter visualization (rotor speed, bearing temperature, vibration amplitude, current draw), and event-based alarm management. All controllers provide standardized analog outputs (0–10 V) and digital communication protocols (Modbus RTU/TCP, EtherNet/IP) for seamless integration into PLC-controlled vacuum systems. Firmware updates are delivered via secure USB or network interface, with version history and checksum verification ensuring traceability. Raw sensor data—including time-stamped rotor acceleration profiles and thermal transients—is exportable in CSV or HDF5 format for post-acquisition analysis and preventive maintenance modeling.
Applications
The HiPace 700 serves as the primary high-vacuum pumping stage in applications requiring rapid pump-down, low base pressure, and long-term operational stability. Key use cases include: scanning/transmission electron microscopes (SEM/TEM); time-of-flight and magnetic sector mass spectrometers; ion implantation and plasma etch chambers; synchrotron beamline end stations; compact accelerator mass spectrometry (AMS) systems; and thin-film deposition tools (e.g., MBE, sputtering). Its resistance to particulate ingress and tolerance to transient overpressure events make it particularly suited for industrial vacuum furnaces and semiconductor front-end-of-line (FEOL) metrology tools where uptime and mean time between failures (MTBF) exceed 25,000 hours.
FAQ
What is the recommended forevacuum requirement for stable HiPace 700 operation?
A backing pressure ≤ 1 × 10⁻² mbar is required; typical pairing includes Pfeiffer’s DuoLine dry scroll pumps or ACP series rotary vane pumps.
Can the HiPace 700 be operated horizontally or inverted?
Yes—its symmetrical rotor dynamics and dual active magnetic bearings permit installation in any orientation without performance degradation.
Is bakeout capability supported?
Metal-sealed (CF) variants with high-temperature compatible controllers (e.g., TCP 350-H) support bakeout up to 150 °C; elastomer-sealed versions are limited to ≤ 80 °C.
How does the HiPace 700 compare to the HiPace Plus series?
The HiPace 700 P and HiPace 700 Plus models feature enhanced particle tolerance and reinforced inlet shielding—optimized for dusty industrial environments—while maintaining identical pumping performance and control interfaces.
What maintenance intervals are specified under normal laboratory use?
No scheduled rotor maintenance is required; annual verification of controller calibration, bearing temperature drift, and vibration spectra is recommended per Pfeiffer’s Maintenance Manual MV-HiPace-EN.
