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| Brand | HORIBA |
|---|---|
| Origin | Japan |
| Model | XGT-7000V |
| Detector | Silicon Drift Detector (SDD) |
| X-ray Source | Rh anode, 50 kV / 1 mA |
| Spatial Resolution | Down to 10 µm |
| Measurement Range | Na (11) to U (92) |
| Vacuum Modes | Full vacuum & local vacuum (switchable in <5 s) |
| Optical Imaging | Co-axial CCD with macro/micro view |
| Sample Chamber | 300 mm × 300 mm × 80 mm (full vacuum), XY stage: 100 mm × 100 mm |
| Software | SmartMap™ for hyperspectral mapping, INCA™ pulse processor, GLP-compliant data handling |
| Quantification Methods | Fundamental Parameters (FP), single-standard FP, calibration curve, multilayer thin-film analysis (nm–µm scale) |
| Elemental Mapping | Pixel-resolved full-spectrum acquisition, offline reprocessing, RGB overlay, line scan, ROI masking |
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