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| Brand | HORIBA |
|---|---|
| Origin | France |
| Model | Auto SE |
| Spectral Range | 450–1000 nm |
| Incident Angle | 70° fixed |
| Detector | CCD array |
| Spot Size Options | 8 discrete sizes (automatically selectable) |
| Sample Stage | Motorized XYZ stage (200 mm × 200 mm travel, Z > 35 mm) |
| Optical Architecture | Liquid crystal phase modulation (no moving parts in measurement path) |
| Brand | HORIBA |
|---|---|
| Origin | France |
| Model | Smart SE |
| Spectral Range | 450–1000 nm |
| Detector | CCD |
| Spot Visualization | Patented real-time surface imaging |
| Spot Selection | Motorized multi-size micro-spot (e.g., 30 µm, 100 µm, 300 µm) |
| Sample Stage | Motorized XYZ stage (200 mm × 200 mm travel, Z-axis range >35 mm) |
| Modulation | Liquid Crystal Variable Retarder (LCVR), no moving parts in optical path |
| Measurement Mode | Variable-angle spectroscopic ellipsometry |
| Output | Full-spectrum Ψ(λ) and Δ(λ) in <1 s per angle |
| Configuration | Supports both offline lab-based and inline process-integrated deployment |
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