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| Brand | MPI |
|---|---|
| Origin | Taiwan |
| Model | TS150 & TS200 & TS300 |
| Probe Station Type | Manual RF Probe Station |
| Wafer Compatibility | 150 mm (6″), 200 mm (8″), 300 mm (12″) |
| Platen Lift Range | 0–300 µm / 3 mm (3-stage) |
| Positioning Repeatability | ±1 µm |
| XY-θ Motion Stage | 25 × 25 mm with micrometer adjustment |
| Z-Axis Fine Adjustment | 25 mm travel with 1 mm engraved scale |
| RF MicroPositioner Capacity | up to 4 four-port RF probes or 10 DC probes |
| Thermal Chuck Compatibility | ERS-series temperature-controlled chucks (–60 °C to +300 °C) |
| Optical Options | MPI SZ10 stereo zoom, MZ12 monocular zoom, 90° tilt standard |
| Vibration Isolation | Integrated damping base |
| EMI Shielding | Optional light-tight, EMI-shielded enclosure |
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