JULABO SC5000w SemiChill Circulating Chiller

Overview

The JULABO SC5000w SemiChill Circulating Chiller is an industrial-grade, water-cooled temperature control system engineered for precision thermal management in high-demand semiconductor manufacturing, electronics testing, automotive R&D, and advanced energy applications. Designed specifically to meet the stringent thermal stability and material compatibility requirements of cleanroom and high-purity process environments, the SC5000w operates across an exceptionally wide temperature range of –20 °C to +130 °C with a nominal cooling capacity of 5000 W at 20 °C ambient. Its thermally robust architecture integrates a high-efficiency hermetic compressor, a stainless-steel fluid path, and chemically inert wetted components—including fluoropolymer-sealed pumps and PFA/PPS-compatible fluid manifolds—ensuring long-term reliability when circulating deionized water, ethylene glycol/water mixtures, Thermal G®, or other non-conductive heat transfer fluids compliant with SEMI F57 and IPC-CC-830 standards.

Key Features

• Wide operational temperature range (–20 °C to +130 °C) with ±0.1 °C stability and 0.1 °C resolution, enabling precise ramping, soaking, and dynamic profiling for process-critical thermal validation.
• Modular, field-upgradable design supporting optional 12 kW electric heating for combined heating/cooling applications—ideal for thermal cycling tests per JEDEC JESD22-A104 and IEC 60068-2-14.
• High-flow, high-pressure circulation system delivering up to 33 L/min at 4.3 bar, with stepwise adjustable pump speed and real-time bar-graph display of flow and pressure on the LED interface.
• Integrated safety architecture: dual-level liquid level monitoring, overpressure cut-off, compressor overload protection, and pump dry-run prevention—certified to DIN 12876-1 Class III (FL) for laboratory and industrial use.
• Water-cooled condenser design eliminates dependency on ambient air, reducing acoustic emissions (≤69 dBA at 1 m) and enabling stable operation in temperature-controlled cleanrooms or enclosed equipment cabinets.
• Standard integrated Pt100 input for external bath or process sensor feedback; optional RS232 or Profibus interfaces support integration into PLC-based automation systems and centralized facility monitoring networks.

Sample Compatibility & Compliance

The SC5000w is constructed to maintain compatibility with ultra-pure and non-conductive media required in semiconductor wafer processing, laser diode thermal management, and EV battery cell testing. All fluid-contact surfaces are fabricated from AISI 316 stainless steel, EPDM-free elastomers, and high-performance engineering plastics (e.g., PPS, PFA), minimizing metallic ion leaching and dielectric breakdown risk. The unit complies with CE marking requirements under the EU Machinery Directive 2006/42/EC and Electromagnetic Compatibility Directive 2014/30/EU. It supports GLP/GMP-aligned operation through configurable audit trails (when paired with JULABO’s optional software suite) and meets essential environmental operating conditions per IEC 60068-2-1 (cold) and IEC 60068-2-2 (dry heat), with rated ambient operation between 5 °C and 40 °C.

Software & Data Management

JULABO’s optional WinTherm® software enables remote configuration, multi-segment programmable profiles, real-time data logging (up to 10,000 points), and export to CSV or Excel formats. When deployed with validated configurations, the system supports 21 CFR Part 11-compliant electronic records via user access control, electronic signatures, and immutable audit trails—facilitating FDA-regulated QC/QA workflows in medical device or pharmaceutical R&D settings. The chiller’s internal memory retains up to 10 user-defined programs, each with independent ramp/soak parameters, alarm thresholds, and safety interlocks.

Applications

• Semiconductor lithography and etch tool cooling requiring sub-0.2 °C thermal drift over 8-hour runs.
• Power electronics thermal validation (e.g., SiC MOSFETs, GaN HEMTs) under dynamic load conditions.
• Automotive ADAS sensor calibration chambers where rapid temperature transitions (≥2 °C/min) and uniformity <±0.3 °C across 1 m³ volume are mandated.
• Electrochemical testing of lithium-ion battery modules using non-conductive heat transfer fluids.
• Calibration laboratories performing ISO/IEC 17025-accredited thermal instrument verification per ASTM E74 and ISO 17034.

FAQ

What types of heat transfer fluids are compatible with the SC5000w?

Deionized water, 30–50% ethylene glycol/water mixtures, Thermal G®, and other non-conductive, low-conductivity (<5 µS/cm) fluids meeting SEMI F57 purity specifications.
Is the SC5000w suitable for cleanroom installation?

Yes—the water-cooled condenser, low-noise operation (≤69 dBA), sealed fluid path, and absence of air-intake filters make it appropriate for ISO Class 5–7 environments when installed with proper chilled water supply conditioning.
Can the unit operate unattended for extended periods?

Yes—integrated safety functions (liquid level monitoring, pressure cutoff, thermal overload protection) and continuous-duty-rated components enable 24/7 operation in automated test cells and production line integration.
Does the SC5000w support external process control?

Yes—via optional RS232 or Profibus interfaces, allowing integration with SCADA systems, PLCs, or custom LabVIEW/HAL-based controllers for closed-loop thermal regulation.
What maintenance intervals are recommended?

Annual inspection of refrigerant charge, condenser water filter, and pump seals; biannual verification of temperature sensor calibration against NIST-traceable references per ISO/IEC 17025 guidelines.