PULUODY PSD-250C Electronic-Grade Liquid Cleanliness Control System

Overview

The PULUODY PSD-250C Electronic-Grade Liquid Cleanliness Control System is an integrated, programmable platform engineered for real-time particulate contamination management in ultra-high-purity liquid process streams. It operates on the principle of dual-laser light obstruction (also known as optical blockage or single-particle optical sensing), where particles suspended in a laminar-flow liquid stream interrupt coherent laser beams, generating pulse signals proportional to particle cross-sectional area. The system combines fluid conditioning, multi-stage filtration, closed-loop recirculation, and high-resolution particle counting into a unified architecture—designed specifically for semiconductor fabrication chemicals, photoresists, ultrapure water (UPW), battery electrolytes, and advanced packaging materials. Unlike conventional offline particle counters, the PSD-250C supports both inline monitoring and automated cleaning validation workflows, enabling continuous cleanliness assurance aligned with SEMI F39, ISO 14644-1 Class 1–5 environments, and ICH Q5A/Q5D bioburden control expectations.

Key Features

• 8th-generation dual-narrow-beam laser sensor with independent wavelength alignment—optimized for refractive index stability across aqueous, organic, and polar aprotic solvents
• Configurable particle sizing matrix: 1,000 discrete detection channels; user-selectable binning (4–128 bins) covering 0.05 µm to 10 µm per ISO 21501-4 and USP requirements
• Integrated triple-stage filtration module: pre-filter (5 µm stainless mesh), precision membrane filter (0.1 µm PTFE), and final polishing stage (0.02 µm ceramic depth filter)
• Programmable recirculation loop with PID-controlled flow regulation (5–1500 mL/min), pressure-compensated volumetric dosing, and temperature-stabilized sample path (0–80 °C)
• Military-grade industrial PC controller compliant with IEC 61000-4 EMC standards; equipped with redundant watchdog timers and non-volatile parameter retention
• Full traceability stack: embedded audit trail per FDA 21 CFR Part 11 Annex 11 guidelines; electronic signatures, version-controlled method storage, and time-stamped calibration logs

Sample Compatibility & Compliance

The PSD-250C accommodates a broad spectrum of low-to-moderate viscosity liquids including deionized water, hydrogen peroxide solutions, TMAH developers, PGMEA photoresist solvents, LiPF₆ electrolyte blends, and fluorinated etchants. Its wetted path employs electropolished 316L SS, PFA-lined tubing, and chemically inert ceramic flow cells—validated for compatibility with pH 1–14 and halogenated media. Regulatory alignment includes full support for ISO 4406:2017 (fluid cleanliness codes), ASTM D7619 (semiconductor process chemical purity), SEMI F39-1117 (microcontamination limits for photoresists), and USP (subvisible particle testing for parenterals). Calibration traceability is maintained via NIST-traceable CN-PSL polystyrene latex standards and GBW national reference materials, with annual metrological verification supported by Xi’an Special Metrology & Testing Institute (XSTM).

Software & Data Management

CCACS 2.0 is a modular, Windows-based analysis platform certified for GLP/GMP environments. It integrates seven functional modules: Pre-Filter Logic, Precision Filtration Sequencing, Final Rinse Validation, Real-Time Counting Engine, Curve-Fitting Algorithm (based on Rosin-Rammler distribution modeling), Pass/Fail Threshold Engine (configurable per ISO 11171 acceptance criteria), and Automated Report Generator (PDF/CSV/XML export with digital signature). All data—including raw pulse histograms, flow transients, temperature drift compensation logs, and sensor health diagnostics—are stored in encrypted SQLite databases with SHA-256 hashing. Remote access is enabled via secure HTTPS API endpoints compatible with MES/SCADA integration (OPC UA, MODBUS TCP).

Applications

• Validation of chemical dispensing lines prior to wafer exposure in 300 mm fabs
• In-process monitoring of UPW recirculation loops in cleanroom sub-fab distribution networks
• Batch release testing of photoresist formulations per JEDEC JESD22-A107 and SEMI C12
• Cleanliness qualification of lithium-ion battery electrolyte fill lines under ISO 14644-1 Class 4
• Post-cleaning verification of MEMS device carriers and reticle storage cassettes
• Qualification of solvent recovery systems in advanced packaging facilities

FAQ

Does the PSD-250C support automated calibration verification?
Yes—integrated calibration check routines execute before each test sequence using onboard PSL reference suspension, with deviation alerts triggered if signal amplitude falls outside ±2.5% of baseline.
Can the system operate in hazardous area environments?
Not intrinsically safe by default; however, explosion-proof enclosures (ATEX Zone 2 / Class I Div 2) are available as optional configurations upon request.
Is remote firmware update capability included?
Yes—secure OTA updates are delivered via signed package files over TLS 1.2, requiring dual-factor authentication and rollback safeguards.
What is the minimum detectable particle concentration?
At 0.1 µm threshold, the lower limit of quantitation (LoQ) is 10 particles/mL with ≤15% RSD at 95% confidence, validated per ISO 21501-4 Annex B.
How does the system handle air bubble interference?
Dual-sensor coincidence logic rejects transient events uncorrelated between primary and secondary beam paths; additional ultrasonic degassing module (optional) reduces dissolved gas nucleation by >92%.