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| Brand | VPI Brooyuan |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | Domestic (China) |
| Model | SD-650MHT |
| Target Configuration | Dual Magnetron Sputtering Heads (2× 2-inch) |
| Ultimate Vacuum | ≤5×10⁻⁵ Pa |
| Vacuum System | 300 L/s Turbo Molecular Pump + 4 L/s Scroll Mechanical Pump with Anti-Backstreaming Valve & Oil Filter |
| Vacuum Gauge | Dual-Range Composite Gauge (1×10⁵–1×10⁻⁵ Pa) |
| Power Supply | DC Constant-Current Source (0–600 V / 0–1.6 A), Optional RF Generator (500 W, 13.56 MHz with Auto-Matching Network) |
| Chamber Dimensions (ID) | Ø210 mm × H250 mm |
| Chamber Material | Electropolished 304 Stainless Steel (Ra ≤ 0.8 µm) |
| Substrate Holder | Ø200 mm Rotating Stage (0–20 rpm, ±0.1 rpm precision), Optional Heating (±1 °C) |
| Cooling | Closed-Loop Chiller (±1 °C temperature control) |
| Gas Control | Electromagnetic Mass Flow Valve + Manual Valve (Ar, N₂ compatible) |
| Thickness Monitoring | Integrated Quartz Crystal Monitor (0–6000 nm range, 0.001 nm/s resolution, 257 preloaded materials + user-defined library) |
| Control Interface | VPI-Customized Dual-Touchscreen HMI with Real-Time Parameter Synchronization |
| Brand | VPI (Beijing Boyuan Weinano Technology Co., Ltd.) |
|---|---|
| Origin | Beijing, China |
| Model | SD-650MH |
| Vacuum Chamber | Ø260 mm × 270 mm (external), Ø210 mm × 270 mm (internal) |
| Ultimate Vacuum | 5×10⁻⁵ Pa |
| Turbo Molecular Pump | 300 L/s |
| Foreline Pump | 4 L/s with anti-backstreaming solenoid valve & oil mist filter |
| DC Power Supply | 0–600 V / 0–1.6 A |
| Sputtering Rate | 0–200 nm/min |
| Target Diameter | 50 mm |
| Integrated Thickness Monitor | 0–6000 nm, resolution 0.001 nm/s |
| Gas Control | Electromagnetic + manual mass flow valves for Ar and other inert gases |
| Compliance | Designed for GLP-aligned thin-film R&D environments |
| Brand | VPI (Vision Precision Instruments) |
|---|---|
| Model | ETD-2000 |
| Type | DC Magnetron Sputtering System |
| Target Configuration | Single removable sputter target head |
| Chamber Vacuum Range | 1 × 10⁻³ to 5 × 10⁻¹ mbar |
| Operating Current Range | 0–40 mA (adjustable) |
| Process Timer | 0–300 seconds (digital display) |
| Chamber Material | Borosilicate glass viewport + aluminum alloy main body |
| Pumping System | Integrated two-stage rotary vane pump (pump-down time < 90 s to 1 × 10⁻² mbar) |
| Power Supply | DC, stabilized, current-limited |
| Leak Rate Compliance | ≤5 × 10⁻⁷ mbar·L/s (as verified per ISO 20483) |
| Brand | VPI (BoYuan Micro-Nano) |
|---|---|
| Origin | Beijing, China |
| Model | ETD-100AF |
| Vacuum System | Feiyue Forepump + Compound Turbo-Molecular Pump (High Compression Ratio, Air-Cooled) |
| Base Pressure | ≤2×10⁻⁴ Pa |
| Chamber Dimensions | Ø230 mm × H280 mm |
| Evaporation Source | Molybdenum Boat / Tungsten Filament / Fixed Bracket |
| Max Evaporation Current | 100 A |
| Max Evaporation Voltage | 10 V |
| Max Power | 1000 W |
| Compatible Target Materials | C, Au, Cr, Pt, Ni, Al, Ti, Ag, and other standard evaporation metals |
| Sample Types | Biological specimens, polymers, ceramics, insulating substrates, beam-sensitive materials |
| Application Domain | SEM sample preparation, TEM grid coating, electrode fabrication, thin-film R&D, academic teaching labs |
| Brand | VPI |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | SD-650MHG |
| Target Diameter | 2 inches |
| Vacuum System | High-vacuum compatible (≤5×10⁻⁶ Torr base pressure) |
| Integration Interface | Front-mounted flush-mount viewport with CF-40 or KF-40 vacuum flange |
| Sealing Standard | Metal-gasketed static seal compliant with ISO-KF and ISO-FM specifications |
| Power Supply | DC/RF configurable (optional upgrade) |
| Substrate Holder | Manual tilt-adjustable stage (max. Φ100 mm) |
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