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Beijing Boyuan Weina Technology Co., Ltd.

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BrandVPI (BoYuan Micro-Nano)
OriginBeijing, China
ModelSD-2000Ⅲ
Target MaterialsAu, Pt, Ag (Ø50 mm)
Control ModeAutomatic sample stage rotation synchronized with selected target
Chamber DimensionsØ160 mm × 120 mm (H)
Sample StageØ50–70 mm, vertically adjustable
Sputtering GasesAr, N₂, and other process gases
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BrandVPI
ModelETD-2000C
Target MaterialAu or Pt
Target Diameter50 mm
Control ModeManual
Chamber DimensionsØ160 mm × 120 mm (H)
Sample Stage Diameter50–70 mm
Sputtering GasMultiple inert gases (Ar, N₂, etc.)
Sputtering Voltage0–1600 V DC
Sputtering Current0–50 mA
Sputtering Timer0–360 s
Carbon Evaporation Current0–100 A AC
Carbon Evaporation Voltage0–30 V AC
Evaporation Time0–1 s
Chamber MaterialBorosilicate glass
Vacuum PumpVRD-8 rotary vane pump (2 L/min)
Input Power220 V / 50 Hz (optional 110 V)
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BrandVPI
OriginBeijing, China
ModelSD-981M
Target MaterialGold (Au), 50 mm diameter
Target Thickness0.1 mm
Control ModeAutomatic & Manual
Chamber Dimensions180 mm (Ø) × 130 mm (H)
Sample Stage Diameter70 mm
Sputtering GasesMultiple configurable (Ar, Au/Ar mix, etc.)
Vacuum RangeAdjustable 2–15 Pa (base vacuum ≤1 Pa)
Sputtering Current0–50 mA (adjustable)
Timer Range0–600 s (digital)
Deposition Rate0–60 nm/min
Pumping SystemVRD-8 rotary vane pump
Power Supply220 V, 50 Hz
Rated Power100 W
Vacuum GaugePirani sensor
Touchscreen Interface4-inch VPI HMI
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BrandElaborate
OriginBeijing, China
Manufacturer TypeAuthorized Distributor
Country of OriginChina
ModelETD-SSS
Target MaterialStainless Steel
Target Diameter50 mm
Control MethodManual
Chamber Dimensions (Ø × H)100 mm
Sample Stage Diameter15 mm
Sputtering GasAmbient Air
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BrandBoyuan Weina / VPI
OriginBeijing, China
Manufacturer TypeAuthorized Distributor
Product OriginDomestic (China)
ModelSD-900M Magnetron Sputter Coater
Target MaterialsAu, Ag, Pt, etc.
Target Diameter & Thicknessφ50 mm × 0.1 mm
Control ModeManual and Programmable Auto Mode
Chamber Dimensionsφ160 mm × 120 mm (D × H)
Sample Stage Diameter50 mm (compatible with 70 mm optional)
Sputtering GasesAr, N₂, O₂, and other process gases
Maximum DC Voltage−1600 V
Max Sputtering Current100 mA
Base Pressure≤4 × 10⁻² mbar
Pumping Speed2 L/s (VRD-8 rotary vane pump)
Power Input220 V AC, 50 Hz (110 V option available)
Deposition Rate~40 nm/min (Au, under optimized Ar plasma conditions)
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BrandElaborate
OriginBeijing, China
ModelETD-2000MH
Target MaterialMultiple weak-magnetic targets (e.g., Au, Ag, Pt)
Target Diameter60–80 mm
Control ModeManual
Chamber DimensionsBorosilicate glass, Ø180 mm × H240 mm
Sample Stage Diameter180 mm
Sputtering GasesAr, N₂, O₂, or custom gas mixtures
Ultimate Vacuum≤5×10⁻⁵ Pa
Pumping SystemTurbo-molecular pump (80 L/s) + Two-stage rotary vane backing pump
Operating Voltage220 V, 50 Hz
Sputtering Current Range0–500 mA
Standard TargetAu (60 mm Ø × 0.1 mm thick)
Optional TargetsAg, Pt, Cr, NiCr, C, etc.
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BrandVPI (BoYuan Micro-Nano)
OriginBeijing, China
ModelSD-900
Target MaterialsAu, Pt, Ag
Target Diameter50 mm
Control MethodMicroprocessor-Based Electronic Control
Chamber DimensionsØ160 mm × 120 mm (H)
Sample Stage Diameter50–70 mm (customizable)
Sputtering GasesAr, N₂, Air
Vacuum Gauge Range1 × 10⁻³ to 1 × 10³ mbar
Max DC Voltage−1600 V
Max Sputtering Current50 mA
Current Stability±0.1 mA
Timer Range0–999 s
Base Pump2 L/s VRD-8 Rotary Vane Pump
Chamber MaterialBorosilicate Glass
Power Supply220 V AC, 50 Hz (110 V optional)
Weight~35 kg
Dimensions (W×D×H)300 × 360 × 380 mm
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BrandVPI (BoYuan Micro-Nano)
OriginBeijing, China
ModelETD-2000
Target MaterialGold (Au), 50 mm diameter × 0.1 mm thickness
Control MethodManual
Chamber DimensionsØ160 mm × 120 mm (H)
Sample StageØ50–70 mm, vertically adjustable
Sputtering GasesMultiple inert gases (e.g., Ar, N₂, Kr)
Maximum DC Voltage−1600 V
Ion Current Range0–50 mA
Ultimate Vacuum≤ 4 × 10⁻² mbar
Timer Range0–3600 s
Pumping SystemVRD-8 rotary vane pump (2 L/s)
Input Power220 V AC, 50 Hz (110 V option available)
Overall Dimensions305 mm × 365 mm × 325 mm (W × D × H)
SealingCeramic high-voltage feedthroughs + vacuum-grade rubber edge seal
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BrandVPI (BoYuan Micro-Nano)
OriginBeijing, China
ModelSD-3000
Target Material (Standard)Au (50 mm × 0.1 mm thickness)
Optional TargetsAg, Pt, Ir, Cu
Sputtering GasesAr, N₂, and other inert/reactive gases
Chamber DimensionsØ150 mm × 120 mm (H)
Sample Stage Diameter50 mm
Maximum Sputtering Voltage–2800 V DC
Max Sputtering Current50 mA
Ultimate Vacuum≤ 4 × 10⁻² mbar
Timer Range1–360 s
Vacuum PumpVRD-8 rotary vane pump (2 L/s)
Control MethodManual analog interface with CPU-assisted timing and interlock logic
ComplianceDesigned for GLP-aligned sample prep workflows in SEM labs
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BrandVPI
ModelETD-800
Target MaterialAu (standard), optional Pt, Ag, Cr, Al, Cu
Target Diameter50 mm
Chamber DimensionsØ100 mm × 100 mm (H)
Sample Stage Diameter50 mm
Sputtering GasAir (ambient air used as sputtering medium)
Control ModeFully Automatic
Vacuum SystemIntegrated single-stage rotary vane pump (1 L/s)
Maximum DC Bias Voltage−1200 V
Timer Range0–3600 s (digital, ±1 s resolution)
Chamber MaterialBorosilicate glass
Power Supply220 V AC, 50 Hz (optional 110 V configuration available)
Unit Dimensions310 mm × 260 mm × 115 mm (W × D × H)
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OriginBeijing, China
Manufacturer TypeDistributor
Origin CategoryDomestic
ModelSD-160
Price RangeUSD 1,400 – 7,200 (est.)
Target Materials (Standard)Au
OptionalAg, Pt
Target Dimensions50 mm × 0.1 mm
Control ModeManual
Chamber DimensionsØ150 mm × H120 mm
Sample Stage Diameter70 mm
Sputtering GasesAr, N₂, O₂
Max Sputtering Current30 mA (rated), 50 mA (peak)
Sputtering Rate>4 nm/min (Au on Si under standard Ar conditions)
Input Power220 V AC, 50 Hz (110 V option available)
Vacuum PumpHigh-performance two-stage rotary vane pump (integrated)
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BrandElaborate
OriginBeijing, China
ModelETD-80AF
Target MaterialCarbon Rod
Control MethodManual
Chamber Dimensions (D×H)170 mm × 200 mm
Sample Stage Diameter170 mm
Base Pressure2×10⁻² mbar
Operating Voltage220 V, 50 Hz
Maximum Evaporation Current100 A
Adjustable Evaporation Current Range0–80 A
Vacuum PumpHigh-Performance Two-Stage Rotary Vane Pump (2 L/s)
Compatible SubstratesNon-conductive, beam-sensitive specimens (e.g., biological tissues, polymers, ceramics)
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BrandVPI (BoYuan Micro-Nano)
OriginBeijing, China
ModelSD-800C
Target MaterialCarbon Fiber
Target Diameter5 mm
Chamber Dimensions (ID)170 mm × 130 mm (D × H)
Sample Stage Diameter70 mm
Operating Vacuum4 × 10⁻² mbar
Evaporation Voltage0–30 V AC
Evaporation Current0–100 A
Deposition Time Range0–1 s
Vacuum Pump2 L/min Two-Stage Rotary Vane Pump (Feiyue VRD-8)
Chamber MaterialBorosilicate Glass
Power SupplyAC, 220 V, 50 Hz
External Dimensions340 mm × 390 mm × 300 mm (W × D × H)
Control ModeManual
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BrandVPI (BoYuan Micro-Nano)
OriginBeijing, China
ModelSD-900C
Sputtering Target MaterialsAu, Ag, Pt, Cr, Al, Cu
Target DimensionsØ50 mm × 0.12 mm
Sputtering Voltage Range0–1600 V DC
Sputtering Current Range0–50 mA
Sputtering Time Control0–360 s
Carbon Evaporation Current0–100 A AC
Evaporation Voltage0–30 V AC
Evaporation Time0–1 s
Chamber MaterialBorosilicate Glass
Chamber Dimensions160 mm × 110 mm (D × H)
Sample Stage Diameter RangeØ50–70 mm
Sputtering GasesAr, N₂, O₂
Vacuum SystemVRD-8 Rotary Vane Pump (2 L/min)
Input Power220 V / 50 Hz (optional 110 V configuration)
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BrandVPI
ModelSD-980
TypeThermal Evaporation Coater
OriginBeijing, China
Target MaterialCarbon Fiber Rope
Target Diameter30 mm
Chamber Dimensions (W×D×H)340 × 390 × 300 mm
Sample Stage Diameter70 mm
Vacuum Chamber (D×H)160 × 110 mm (Borosilicate Glass)
Ultimate Vacuum5 Pa
Evaporation Current Range50–80 A
Pulse Count Setting0–9 pulses
Control InterfaceTouchscreen HMI
Power Supply220 V AC, 50 Hz, Grounded
PumpVRD-8 Rotary Vane Pump (2 L/min)
Weight~50 kg
Max. Power Consumption1.6 kW
Sputtering Gas RequiredNone
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