Empowering Scientific Discovery

Beijing Yakexuchen Technology Co., Ltd.

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OriginNetherlands
Manufacturer TypeAuthorized Distributor
Origin CategoryImported Instrument
ModelMARCH AP-1000
RF Frequency13.56 MHz (RF Generator with Auto-Impedance Matching)
Power Output2 kW
Chamber MaterialAnodized Aluminum Alloy
Chamber VolumeConfigurable (Standard & HTP Options Available)
Process GasesO₂, Ar, H₂, He (via 4 Mass Flow Controllers)
Control SystemPLC-Based Closed-Loop Control with Integrated Mechanical Height Sensor
Dimensions (Standard Unit)567 × 764 × 664 mm (W × D × H)
Dimensions (HTP Configuration)680 × 1127 × 1536–1890 mm (W × D × H)
Net Weight485 kg
ComplianceDesigned for ISO Class 5–7 cleanroom integration
SoftwareProprietary SPC-Enabled Process Management Suite with Audit Trail Capability
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