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| Origin | Netherlands |
|---|---|
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported Instrument |
| Model | MARCH AP-1000 |
| RF Frequency | 13.56 MHz (RF Generator with Auto-Impedance Matching) |
| Power Output | 2 kW |
| Chamber Material | Anodized Aluminum Alloy |
| Chamber Volume | Configurable (Standard & HTP Options Available) |
| Process Gases | O₂, Ar, H₂, He (via 4 Mass Flow Controllers) |
| Control System | PLC-Based Closed-Loop Control with Integrated Mechanical Height Sensor |
| Dimensions (Standard Unit) | 567 × 764 × 664 mm (W × D × H) |
| Dimensions (HTP Configuration) | 680 × 1127 × 1536–1890 mm (W × D × H) |
| Net Weight | 485 kg |
| Compliance | Designed for ISO Class 5–7 cleanroom integration |
| Software | Proprietary SPC-Enabled Process Management Suite with Audit Trail Capability |
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