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| Brand | Bruker |
|---|---|
| Origin | USA |
| Model | Filmtek 4000 |
| Measurement Angles | 0° (normal incidence) and 70° (grazing incidence) |
| Spectral Range | 400–1650 nm |
| Spot Size | 1 mm (0°), 2 mm (70°) |
| Thickness Range | 100 nm – 150 µm |
| Thickness Accuracy | ≤3 Å (1σ), Repeatability: ≤0.5 nm (1σ) |
| Refractive Index Resolution | 2×10⁻⁵ @ TE, 4×10⁻⁵ @ TM (1σ) |
| Stage Travel | 200 mm × 200 mm, Positioning Resolution: 1 µm |
| Light Source | Halogen lamp, Lifetime ≥2000 h |
| Detectors | Dual visible CCDs (380–950 nm, 0.3 nm resolution, 2048 px) + Dual IR InGaAs detectors (950–1650 nm, 2 nm resolution, 512 px) |
| Software | Filmtek 4000 Suite with DPSD, Cauchy, Sellmeier, Drude, Lorentz, Tauc, EMA, Graded, Superlattice, and NK modeling |
| Brand | Bruker |
|---|---|
| Origin | USA |
| Model | FilmTek 2000M TSV |
| Optical Configuration | Collimated Beam Reflectometry |
| Spot Size Range | 2 × 1 µm to >100 µm (adjustable via microscope objectives) |
| Spectral Range | 190–1100 nm |
| Spectral Resolution | <1.5 nm FWHM |
| Thickness Measurement Range | 5 nm – 350 µm |
| Compliance | ASTM E2476, ISO/IEC 17025 (when operated in accredited lab environments), supports GLP/GMP data integrity requirements |
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