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| Brand | Hefei Kejing |
|---|---|
| Origin | Anhui, China |
| Model | VTC-5RF (Optimized for Materials Genome Initiative Thin-Film Research) |
| Target Material Options | Au, Ag, Cu |
| Target Diameter | 25.4 mm |
| Target Thickness Max | 3 mm |
| Sputtering Distance | 50–80 mm (adjustable) |
| Sputtering Angle | 0–25° (adjustable) |
| Chamber Dimensions | 470 mm L × 445 mm D × 522 mm H (~105 L) |
| Sample Stage Diameter | 150 mm |
| Rotation Capability | Programmable, 16-position indexing |
| Maximum Stage Temperature | 600 °C |
| RF Power Supply | 13.56 MHz, 300 W, auto-matching |
| Gas | High-purity Ar (99.999%) |
| Base Vacuum | ≤4×10⁻⁵ Torr (with turbomolecular pump, KF40 flange) |
| Cooling | Recirculating chiller, 10 L/min flow rate |
| Compliance | CE-certified |
| Weight | 60 kg |
| Brand | KJ-Science |
|---|---|
| Origin | Anhui, China |
| Model | VTC-2RF |
| RF Power | 300 W, 13.56 MHz |
| Target Diameter | 50 mm (2") |
| Chamber Material | High-purity quartz (OD 160 mm × ID 150 mm × H 250 mm) |
| Base Pressure | ≤1×10⁻³ Torr (with dual-stage rotary vane pump) / ≤1×10⁻⁵ Torr (with optional turbomolecular pump) |
| Substrate Holder | Rotatable (1–20 rpm), heated up to 700 °C (short-term), 500 °C continuous |
| max. substrate size | 50 mm dia. (accommodates 2" wafers) |
| Cooling | Integrated recirculating chiller (16 L/min flow rate |
| required flow at sputter head | ≥10 L/min) |
| Thickness Monitoring | In-situ quartz crystal microbalance (QCM) with 0.1 Å resolution and LED display |
| Compliance | CE-certified |
| Warranty | 12 months |
| Brand | Kojin |
|---|---|
| Origin | Anhui, China |
| Model | VTC-600-2HD |
| Power Supply | 220 VAC, 50/60 Hz, single-phase, 2000 W (including vacuum pump) |
| DC Sputter Power | 500 W |
| RF Sputter Power | 600 W (optional 300 W RF module available) |
| Chamber Dimensions | Ø300 mm × 300 mm H, stainless steel |
| Viewport Diameter | 100 mm |
| Chamber Opening | Top-hinged lid |
| Substrate Holder | Ø140 mm, rotatable (1–20 rpm), heated up to 500 °C (±1.0 °C stability) |
| Target Size | 50 mm diameter |
| Cooling Water Flow | 10 mL/min (integrated chiller: 16 mL/min) |
| MFC Range | 0–200 sccm (dual-channel) |
| Thickness Monitor | Quartz crystal microbalance (QCM), resolution: 0.10 Å, LED display |
| Vacuum System | Integrated German-made turbomolecular pump with one-touch operation |
| Overall Dimensions | 1300 mm (L) × 660 mm (W) × 1200 mm (H) |
| Weight | 160 kg |
| Warranty | 1 year standard, lifetime technical support |
| Brand | KEJING |
|---|---|
| Model | GSL1100X-SPC-12 |
| Origin | Anhui, China |
| Vacuum Chamber Dimensions (Bell Jar) | Ø250 mm × 340 mm H |
| Glass Chamber Options | Ø88 mm × 140 mm H / Ø88 mm × 57 mm H |
| Max Sample Stage Diameter | 40 mm |
| Vacuum System | Turbo-molecular Pump + Mechanical Pump |
| Base Pressure | 1.3×10⁻² – 6×10⁻³ Pa |
| Vacuum Gauges | Thermocouple Gauge + Cold Cathode Gauge |
| Sputtering Power Supply | DC 0–3 kV / 0–10 mA (adjustable) |
| Low-Voltage Evaporation Supply | AC 0–10 V / 0–100 A (adjustable) |
| Process Gas | ≥99.9% Argon |
| Cooling | Forced-air or water-cooling (fan-cooled ≤32°C ambient |
| Net Weight | ~150 kg |
| Footprint | 800 mm × 560 mm × 1340 mm (L×W×H) |
| Brand | Kojin (Hefei) |
|---|---|
| Origin | Anhui, China |
| Manufacturer Type | Authorized Distributor |
| Region of Manufacture | Domestic (China) |
| Model | VTC-3RF |
| Price Range | USD 7,000 – 14,000 |
| Input Power | 220 VAC, 50/60 Hz, Single-Phase, 800 W (including vacuum pump) |
| RF Power Supply | 13.56 MHz, 100 W (manual impedance matching) or optional 300 W (auto-matching) |
| Target Diameter | 25.4 mm (1 inch), Max Thickness: 3 mm |
| Cooling Water Flow Rate | 10 L/min (integrated 16 L/min recirculating chiller) |
| Chamber Dimensions | Ø256 mm × 250 mm ID × 276 mm H (high-purity quartz) |
| Chamber Seal | Aluminum flange (Ø274 mm) with silicone O-ring |
| Plasma Shielding | Stainless steel mesh enclosure |
| Base Pressure | <1.0×10⁻² Torr (dual-stage rotary vane pump) or <5×10⁻⁵ Torr (turbo-molecular pump option) |
| Substrate Stage | Rotatable (0–20 rpm), heated (max 700 °C short-term, 500 °C continuous), Ø50 mm (accommodates up to 2-inch wafers), temperature stability ±10 °C |
| Optional Quartz Crystal Microbalance (QCM) | Real-time thickness monitoring, 0.10 Å resolution, LED display with material parameter input |
| Certification | CE compliant |
| Warranty | 12 months, lifetime technical support |
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