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| Brand | AGUS |
|---|---|
| Origin | Japan |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | SSP-1000 |
| Price Range | USD 110,000 – 138,000 |
| Maximum Substrate Diameter | φ100 mm |
| Thickness Uniformity | ±5% over φ100 mm area |
| RF Power Mode | Pulsed RF (13.56 MHz) |
| Gas Inlets | Standard 1, Optional 2 |
| Sputtering Orientation | Upward, Lateral, Downward (reconfigurable cubic chamber) |
| Target Compatibility | Metallic, Oxide (e.g., Al₂O₃, SiO₂), Nitride, and Magnetic Targets (optional) |
| Substrate Holder | Rotatable or Fixed |
| Viewport | Integrated Quartz Observation Window |
| Cathode Shielding | Removable Cathode Protection Plate with Integrated Sputter Timer for Thickness Estimation |
| Brand | AGUS |
|---|---|
| Origin | Japan |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | SPS-Sx Series |
| Pricing | Available Upon Request |
| Brand | AGUS |
|---|---|
| Origin | Japan |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | SPS-Rx Series |
| Pricing | Available Upon Request |
| Brand | ADVANCE RIKO |
|---|---|
| Origin | Japan |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | APD |
| Pricing | Upon Request |
| Vacuum Chamber Dimensions | 400 × 400 × 300 mm (L×W×H) |
| Pumping System | 450 L/s Turbo-Molecular Pump |
| Plasma Source | 1 Standard, Up to 3 Optional |
| Operating Pressure | High Vacuum to Low-Pressure Reactive Gases (N₂, O₂, H₂, Ar) |
| Target Geometry | Cylindrical or Tubular, Ø10 mm × 17 mm |
| Target Resistivity | < 0.01 Ω·cm |
| Capacitance Bank | 360 µF × 5 (Optional Configurations Available) |
| Pulse Frequency | 1–5 Hz |
| Discharge Voltage Range | 70–400 V (Max 150 V at 1800 µF) |
| Human-Machine Interface | Industrial Touchscreen Control Panel |
| APD-P Powder Collector | Ø95 mm × 30 mm |
| Collection Rate | 13–20 cm³/h (Dependent on Particle Size & Density) |
| Rotation Speed | 1–50 rpm |
| APD-S Substrate Holder | Compatible with 2-inch (50.8 mm) Wafers/Foils |
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