HACH Anatel UP100 Ultra-Pure Water Particle Counter

Overview

The HACH Anatel UP100 Ultra-Pure Water Particle Counter is an engineered solution for real-time, high-sensitivity particulate monitoring in ultrapure water (UPW) systems used in semiconductor fabrication, pharmaceutical water-for-injection (WFI) loops, and advanced microelectronics manufacturing. Based on light scattering detection principles—specifically, single-particle optical sensing (SPOS) with a stabilized laser diode source—the UP100 delivers quantitative particle concentration data at sub-0.2 µm resolution, meeting the stringent requirements of SEMI F63, ASTM D7289, and ISO 21501-4 for liquid-borne particle counting. Its design prioritizes metrological integrity: every unit undergoes NIST-traceable calibration using certified reference latex spheres, and integrated laser energy diagnostics continuously monitor source stability to ensure measurement repeatability across shifts and maintenance cycles.

Key Features

• Sub-micron sensitivity with dual standard detection thresholds at 0.1 µm and 0.2 µm—configurable down to 0.1 µm and up to 5.0 µm per application-specific validation protocols.
• Dynamic inlet pressure regulation maintains consistent sample delivery across variable loop pressures (30–100 psig), eliminating flow-induced bias in high-purity distribution networks.
• Optimized fluidics architecture enables full system recovery in under 60 seconds following sample interruption or flush cycles—critical for minimizing downtime in 24/7 UPW recirculation lines.
• Integrated laser power monitoring provides real-time diagnostics of optical source degradation, supporting predictive maintenance and audit-ready documentation per FDA 21 CFR Part 11 requirements.
• Compact, all-in-one housing eliminates external pumps, valves, or bypass manifolds—reducing potential leak points and lowering total cost of ownership over multi-year deployment.
• 4–20 mA analog output supports direct integration into distributed control systems (DCS) and SCADA platforms without protocol conversion hardware.

Sample Compatibility & Compliance

The UP100 is validated for continuous online monitoring of ultrapure water with resistivity ≥18.2 MΩ·cm at 25 °C and total organic carbon (TOC) < 1 ppb. It complies with ISO 8573-1 (Class 0 for particles ≤0.1 µm), SEMI F63-0320 for semiconductor-grade UPW, and ASTM D7289-22 for particle counting methodology in high-purity liquids. All calibration records, firmware revision logs, and diagnostic event timestamps are stored locally with time-stamped, immutable audit trails—supporting GLP and GMP environments requiring full data integrity per ALCOA+ principles.

Software & Data Management

The UP100 operates with Anatel’s proprietary ParticleCount™ software, which provides configurable alarm thresholds, trend visualization, and automated report generation in PDF or CSV format. Data export includes full metadata: instrument ID, calibration certificate number, operator login, environmental temperature/pressure, and raw scatter pulse histograms. Software supports electronic signatures, role-based access control, and 21 CFR Part 11-compliant audit logging—including user actions, parameter changes, and calibration events—with no local data deletion capability to preserve forensic traceability.

Applications

• Semiconductor front-end process tools: monitoring UPW feedlines to photolithography, CMP, and etch tools where >0.1 µm particles cause pattern defects or wafer yield loss.
• Pharmaceutical purified water (PW) and water-for-injection (WFI) distribution loops—validated per USP and EU Annex 1 for particle load trending during sanitization cycles.
• Flat-panel display manufacturing, where nanoparticle contamination compromises thin-film uniformity in TFT deposition stages.
• Research cleanrooms and pilot-scale UPW systems requiring ISO Class 1–3 environmental compliance verification.
• Validation of point-of-use filters (e.g., 0.05 µm membrane cartridges) via upstream/downstream particle challenge testing.

FAQ

What particle size ranges can the UP100 detect?
The UP100 is factory-configured for 0.1 µm and 0.2 µm thresholds; custom sizing from 0.1 µm to 5.0 µm is available upon request and subject to application-specific validation.
Is the UP100 suitable for inline or offline use?
It is designed for permanent, pressurized inline installation in UPW recirculation loops with compatible wetted materials (electropolished 316L SS, PFA, and quartz flow cells). Offline batch analysis requires optional sampling interface kits.
How is calibration traceability maintained?
Each unit ships with a NIST-traceable calibration certificate referencing SRM 1960 and SRM 2800 polystyrene latex standards; field recalibration follows ASTM E2457 procedures using certified reference materials.
Does the UP100 support remote diagnostics or network connectivity?
While the base model uses 4–20 mA analog output, Ethernet/IP and Modbus TCP interfaces are available via optional communication modules—enabling integration with enterprise MES and CMMS platforms.
What maintenance intervals are recommended?
Preventive maintenance is scheduled annually; optical window inspection and flow path verification are performed quarterly per Anatel’s PM-UP100 checklist, with all activities logged in the onboard audit trail.