PULUODY PMT-2-Y Electronic-Grade Liquid Particle Counter

Overview

The PULUODY PMT-2-Y Electronic-Grade Liquid Particle Counter is an optical liquid-borne particle analyzer engineered for ultra-high-sensitivity contamination monitoring in critical fluid process environments. It operates on the principle of dual-laser narrow-beam light scattering—where two spatially separated laser sources illuminate the sample stream simultaneously, enabling high-fidelity detection of sub-micron particles with minimized signal noise and enhanced sizing resolution. This 8th-generation sensor architecture eliminates optical interference from refractive index mismatches and mitigates Mie scattering artifacts common in polydisperse or low-refractive-index media such as ultrapure water (UPW), semiconductor cleaning solvents, and photoresist developers. Designed specifically for electronic-grade fluid qualification, the instrument meets stringent requirements for particle counting in Class 1–10 cleanroom support systems, wafer fabrication rinse loops, flat-panel display (FPD) etchant recirculation, and silicon wafer slurry delivery lines.

Key Features

• Dual-laser narrow-beam optical sensing platform with independent wavelength alignment and collimation control for improved signal-to-noise ratio at 0.1 µm(c) detection threshold
• High-stability precision piston pump coupled with electromagnetic flow regulation ensures volumetric accuracy better than ±1% across full dynamic range
• Real-time, continuous online sampling capability with integrated 4–20 mA analog output and programmable alarm thresholds for process deviation alerts
• Modular dual-mode operation: supports both fixed-installation inline monitoring and portable offline analysis with identical metrological traceability
• V8.3 integrated software suite featuring separate calibration and analysis workspaces—eliminating cross-contamination of reference standards and test data during routine operation
• Touchscreen HMI with optional wireless keyboard/mouse interface enables intuitive navigation, method recall, and report generation without external peripherals
• Configurable particle size channels including standard ISO 21501-2-compliant bins (e.g., ≥0.2 µm, ≥0.3 µm, ≥0.5 µm) and user-defined windows (e.g., 4–70 µm(c)) for application-specific classification

Sample Compatibility & Compliance

The PMT-2-Y is validated for use with a broad spectrum of low-conductivity and low-viscosity fluids essential to microelectronics manufacturing, including deionized water (DIW), UPW (ASTM D5127), SC-1/SC-2 cleans, dilute HF solutions, photoresist thinners, and polymer-based spin-coating solvents. Its non-invasive optical path and chemically inert wetted materials (316L stainless steel, fused silica flow cell, PTFE seals) ensure compatibility with aggressive chemistries while maintaining long-term calibration stability. The system complies with national verification regulation JJG 1061 and international standard ISO 21501-2 for light-scattering particle counters. Optional configurations support 21 CFR Part 11 compliance—including electronic signatures, audit trails, and role-based access control—making it suitable for regulated pharmaceutical water systems and GMP-certified clean utility monitoring.

Software & Data Management

PULUODY V8.3 software provides a unified environment for instrument control, data acquisition, statistical analysis, and regulatory reporting. Calibration routines are isolated from measurement workflows to prevent inadvertent parameter drift. Each session logs timestamped metadata—including flow rate, temperature, pressure, and operator ID—for full traceability. Reports export in PDF, CSV, and XML formats, conforming to ISO 4406 (fluid cleanliness codes) and NAS 1638 (aerospace hydraulic fluid standards). iPad integration allows remote dashboard viewing and alarm acknowledgment via secure Wi-Fi connection. All raw scatter pulse data is retained for retrospective reanalysis, supporting root-cause investigations during contamination excursions.

Applications

• In-line monitoring of ultrapure water distribution networks in semiconductor fabs (SEMI F63 compliant)
• Real-time particle load assessment in CMP slurry recirculation and post-CMP rinse tanks
• Final rinse validation for silicon wafers, glass substrates, and MEMS components
• Quality release testing of electronic-grade solvents (e.g., acetone, IPA, PGMEA) per JEDEC J-STD-001
• Integrity verification of nanofiltration and ultrafiltration membranes used in UPW polishing stages
• Contamination trending in photomask cleaning tools and lithography track effluents
• Offline verification of particle removal efficiency in point-of-use (POU) filters for display panel manufacturing

FAQ

What particle size ranges can the PMT-2-Y detect?
The standard configuration covers 0.1–0.5 µm and 0.2–2.0 µm channels; custom sizing windows (e.g., 1–100 µm or 4–70 µm(c)) are available upon request.
Is the instrument suitable for conductive or corrosive liquids?
Yes—wetted components are constructed from 316L stainless steel and fused silica; compatibility with specific solvents should be verified against chemical resistance charts prior to installation.
How is calibration traceability maintained?
Calibration uses NIST-traceable polystyrene latex (PSL) spheres per ISO 21501-2, with optional third-party verification through Zhongte Metrology & Testing Institute (CNAS-accredited).
Can the system integrate into existing SCADA or MES platforms?
Yes—the 4–20 mA analog output and Modbus TCP option enable seamless integration with industrial automation systems for centralized particle trend monitoring.
Does the software support multi-user environments with permission levels?
Yes—V8.3 includes configurable user roles (Operator, Supervisor, Administrator) with password protection and activity logging aligned with FDA 21 CFR Part 11 Annex 11 expectations.