PULUODY PMT-2ZX Online Potassium Hydroxide Liquid Particle Counter

Overview

The PULUODY PMT-2ZX Online Potassium Hydroxide Liquid Particle Counter is an industrial-grade optical particle counter engineered for real-time, continuous monitoring of solid particulate contamination in aggressive aqueous alkaline solutions—specifically concentrated potassium hydroxide (KOH) electrolytes used in semiconductor wet processing, electrochemical etching, and advanced battery manufacturing. It employs a proprietary 8th-generation dual-laser narrow-beam scattering detection architecture, enabling high-sensitivity quantification of sub-micron particles from 0.1 µm upward under chemically demanding conditions. Unlike conventional single-wavelength counters, the dual-laser design mitigates signal noise induced by refractive index mismatch between KOH solution (n ≈ 1.42) and common contaminants (e.g., silica, alumina, metal oxides), thereby improving counting fidelity and size resolution in high-pH, high-conductivity media. The instrument operates in-line via direct fluid loop integration or offline using calibrated syringe-based sampling, supporting both fixed-installation process control and mobile QA/QC verification.

Key Features

• Dual-laser narrow-beam optical sensor optimized for high-refractive-index alkaline liquids, minimizing Mie scattering artifacts in 30–50% w/w KOH solutions
• Two-stage flow control system: precision metering piston pump (volumetric accuracy <±1%) coupled with ultra-stable electromagnetic flow regulation for consistent sample presentation
• Configurable detection thresholds: standard 0.1–0.5 µm range; extended options include 4–70 µm(c) for coarse filter integrity checks or 1–100 µm for slurry monitoring
• Integrated analog output (4–20 mA) with programmable alarm triggers for PLC/SCADA interfacing—enabling automated shutdown or bypass activation upon exceedance of user-defined contamination limits
• V8.3 analysis software compliant with ISO 21501-4 and JJG 1061 calibration protocols; includes dual-mode operation: metrology-grade calibration mode (isolated from test data) and production testing mode
• Touchscreen HMI with optional wireless keyboard/mouse support; firmware supports multi-language UI and audit-ready session logging

Sample Compatibility & Compliance

The PMT-2ZX is validated for direct online measurement in potassium hydroxide solutions up to 50% concentration (w/w), as well as other high-purity process fluids including ultrapure water (UPW), semiconductor cleaning agents (e.g., SC1, SC2), photoresist developers, and polymer-based etchants. Its wetted materials—316L stainless steel flow cell, sapphire optical windows, and chemically inert PEEK and FFKM seals—are resistant to caustic degradation and passivated per ASTM A967. The system meets mechanical safety requirements per IEC 61010-1 and electromagnetic compatibility standards IEC 61326-1. For regulated environments, the V8.3 software supports 21 CFR Part 11-compliant user access controls, electronic signatures, and immutable audit trails—fully traceable to calibration events performed using NIST-traceable polystyrene latex standards per ISO 21501-4 Annex B.

Software & Data Management

The V8.3 Integrated Software Suite provides synchronized calibration and analysis workflows, eliminating cross-contamination between metrological verification and routine production measurements. It enables real-time particle histogram generation, time-series trending, and automatic ISO 4406 / NAS 1638 code assignment per sample volume. Data export supports CSV, PDF, and XML formats compatible with LIMS and MES platforms. All measurement sessions are timestamped, user-authenticated, and stored with full metadata—including pump cycle count, laser intensity drift compensation, and flow rate deviation logs. Remote diagnostics and firmware updates are supported via secure TLS-encrypted Ethernet connection.

Applications

• In-line monitoring of KOH-based silicon wafer etchants to detect tool-induced metallic particulates or chamber flaking
• Real-time verification of UPW polishing rinse quality prior to photolithography
• Contamination control in flat-panel display (FPD) glass substrate cleaning lines
• Validation of nano-filtration membrane integrity during lithium-ion battery electrolyte purification
• Offline QC of reclaimed KOH solutions in green hydrogen production electrolyzers
• Particulate release testing of medical-grade silicone tubing exposed to alkaline sterilants

FAQ

Can the PMT-2ZX measure particles in 45% w/w KOH without sensor fouling?
Yes—the flow cell incorporates electrochemical passivation and self-cleaning pulse cycles calibrated for sustained operation in ≥45% KOH. Routine maintenance intervals are extended to 200 operational hours under continuous duty.
Is ISO 21501-4 calibration included with delivery?
Each unit ships with factory calibration certificate traceable to NIST SRM 1963 latex spheres; on-site recalibration services are available through PULUODY’s ISO/IEC 17025-accredited service centers in Asia and Europe.
Does the system support GMP-compliant electronic record retention?
Yes—V8.3 software includes configurable audit trail depth, role-based permissions, and digital signature enforcement aligned with Annex 11 and ALCOA+ principles.
What is the minimum detectable particle concentration?
At 0.1 µm threshold, the lower limit of quantitation (LOQ) is 10 particles/mL with <10% RSD over 60-second acquisition windows.
Can the analog output be mapped to custom contamination thresholds?
Yes—up to four independent alarm bands can be defined across any size channel, with hysteresis and delay logic configurable via the HMI or PC software.