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BrandCreaPhys
OriginGermany
ModelDSU200
Maximum Batch Capacity200 g
Base Vacuum< 10⁻⁶ mbar (clean & dry system)
Evaporation Zone Temp Range100–500 °C
Deposition Zone Temp Range100–450 °C
Deposition Zone Temperature Uniformity< ±10 °C
Footprint Diameter190 mm
Height~800 mm
Optional AccessoriesLiquid Nitrogen Cold Trap, Glovebox Integration Kit
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BrandCreaPhys
OriginGermany
ModelDSU-Metal Series
Crucible Volume1 cm³ / 2 cm³ (custom volumes available)
Achievable Metal Layer Thickness>500 nm per deposition cycle at 250 mm source-to-substrate distance
Deposition Rate1 nm/s (up to 10 nm/s) at 250 mm
Heating SystemCeramic crucible holder with integrated metal crucible
Temperature Range300 °C to 1700 °C
Power Supply<10 V (typ. 9 V), <200 A (typ. 110 A), up to 2 kW
Cooling Water Flow~15 L/min
Optional ConfigurationsCeramic or replaceable metal crucibles
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BrandCreaPhys
OriginGermany
ModelDSU
Vacuum Level< 10⁻⁶ mbar (clean & dry system)
Temperature RangeEvaporation Zone 100–600 °C, Condensation Zone 60–500 °C
ΔT Between Zones> 200 °C (at 500 °C)
Sample Capacity0.5–500 g (up to 1000 g)
Sublimation Efficiencyup to 97%
ConstructionBorosilicate Glass (Duran®), Stainless Steel Flanges, Viton/Kalrez Seals
Overall Height~1500–2000 mm
Tube Length~630 mm
Outer Tube Diameter~34 mm
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BrandCreaPhys
OriginGermany
ModelDSU Series
Crucible Volumes0.5, 1, 2, 4, and 8 cm³ (custom volumes available)
Crucible ShapesConical, cylindrical, with/without central aperture
Crucible MaterialsAl₂O₃, BN, AlN, graphite, quartz
Deposition Rate1×10⁻³ to 5 nm/s at 150 mm substrate distance (material-dependent)
Heating SystemTungsten coil with ceramic thermal insulation, 8 A / 60 W (size-dependent)
Temperature Range50 °C to 600 °C
Temperature Stability< ±0.1 K (PID-controlled)
ThermocoupleType K
Optional FeaturesIntegrated safety guard, stainless-steel chamber housing
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BrandLOEMI
OriginGermany
ModelVRA-50 / VRA-150 / VRA-250
Total Volume50 L / 150 L / 250 L
Operating Volume25–30 L / 5–100 L / 140–170 L
Distillation Rate (typ.)8–20 L/h / 25–60 L/h / 30–80 L/h
Max. Operating Temperature200 °C
Pressure Range−1.0 to +0.5 bar
HeatingIntegrated Explosion-Proof Thermal Oil System
Vacuum SystemLOE/V6 (VRA-50) or LOE/V30 (VRA-150/250)
ATEX CertificationII 1/2 G c T3 per Directive 94/9/EC
ControlPLC-Based HMI Terminal
Power Supply400 V / 3-phase / 50 Hz
Total Power Consumption (avg.)2.9 kW / 6.0 kW / 11.0 kW
Dimensions (L×W×H)600×1420×1800 mm / 750×2000×1800 mm / 850×2000×1800 mm
Weight250 kg / 400 kg / 500 kg
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