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| Brand | Zhonghuan Furnace |
|---|---|
| Origin | Tianjin, China |
| Model | 1200°C Sliding-Stage CVD System |
| Heating Zone | Single or Multi-Zone Optional |
| Max Operating Temperature | 1200°C |
| Sliding Mechanism | Manual or Motorized with Position Limit Switches |
| Cooling Method | Integrated Forced-Air Quenching System |
| Gas Control | Multi-Channel Mass Flow Controller (MFC) System |
| Vacuum Capability | Medium-Vacuum (10⁻¹–10⁻³ Pa) or High-Vacuum (≤5×10⁻⁵ Pa) Configurable |
| Temperature Control Algorithm | Fuzzy PID Programmable Logic Controller |
| Vacuum Interface | Custom Quick-Connect Flange Assembly |
| Compliance | Designed for ISO/IEC 17025-aligned lab environments |
| Brand | Zhonghuan Furnace |
|---|---|
| Origin | Tianjin, China |
| Model | CVD-12II6SH-3Z (Dual-Zone) / CVD-12III9SH-3Z (Triple-Zone) |
| Max Temperature | 1200 °C |
| Heating Zone Length | 610 mm / 940 mm |
| Uniform Temperature Zone | 400 mm / 700 mm |
| Quartz Tube ID/OD | Φ80 mm / Φ100 mm |
| Rated Power | 4.8 kW / 7.2 kW |
| Voltage | 220 V / 380 V (3-phase) |
| Sliding Stroke | 485 mm / 650 mm |
| Sliding Mode | Manual or Motorized (Temperature-Programmed Auto-Translation) |
| Temperature Control | 50-Stage Programmable PID Controller, ±1 °C Accuracy |
| Gas Channels | Up to 3 Mass Flow Controlled Lines (0–500 sccm, N₂-calibrated, ±1% F.S.) |
| Vacuum System Options | Medium Vacuum (1×10⁻¹–1×10⁻³ Pa) or High Vacuum (1×10⁻³–1×10⁻¹ Pa |
| Sealing | Dual-Knurled KF Flanges with Multi-Ring Dynamic Seal Architecture |
| Cooling | Integrated Forced-Air Quenching System for Rapid Post-Process Thermal Extraction |
| Brand | Zhonghuan Furnace |
|---|---|
| Origin | Tianjin, China |
| Model | CVD-12II-3Z/G |
| Max Temperature | 1200°C |
| Heating Zone | Dual-zone |
| Tube Diameter | Φ50/Φ60/Φ80 mm or Φ80/Φ100 mm |
| Heating Length | 420 mm / 600 mm |
| Uniform Zone Length | 280 mm / 390 mm |
| Rated Power | 3.2 kW / 4.8 kW |
| Voltage | 220 V AC |
| Temp Control | 50-segment programmable PID controller, ±1°C accuracy |
| Gas Channels | 3 (expandable) |
| Mass Flow Range | 0–500 sccm (N₂-calibrated, ±1% F.S.) |
| Response Time | ≤4 s |
| Inlet Pressure | 0.05–0.3 MPa (gauge) |
| Vacuum System | High-vacuum option with turbomolecular pump (1200 L/s or 1600 L/s, base pressure ≤5×10⁻⁶ Pa) |
| Connection | KF-flanged stainless steel bellows, manual high-vacuum gate valve, digital vacuum gauge |
| Overall Dimensions (w/o HV) | 530 × 1440 × 750 mm |
| Weight | 330 kg |
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