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| Brand | ANRIC |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Product Origin | Imported |
| Model | AT |
| Pricing | Upon Request |
| Ozone Output Range | 12% w/w at 250 sccm, 6% w/w at 2500 sccm |
| Oxygen Flow Control | 25–2500 sccm (panel-integrated mass flow control) |
| O₂ Regulator Range | 3–29 psi |
| Corona Cell | Aluminum electrode with ceramic dielectric |
| Operating Frequency | 5–30 kHz |
| Input Power | 110–220 VAC, 50/60 Hz, 2 A |
| Dimensions | 10.3" W × 7.5" H × 20" D |
| Weight | 15 lbs |
| Cooling | Forced-air (integrated high-speed fan) |
| Control Interface | 3–24 VDC analog input for automated ozone modulation |
| Manual Override | Front-panel O₃/O₂ toggle switch + rear-panel mechanical override switch |
| Output Port | 1/4" Swagelok compression fitting (ozone delivery) |
| Inlet Port | 1/4" Swagelok compression fitting (O₂ supply, ≥90% purity recommended) |
| Exhaust Port | 1/4" Swagelok compression fitting (0.5 SCFH O₂-rated venting capacity) |
| Optional Safety Monitor | Real-time ambient O₃ detection (0–5000 ppb), LED status indicators (green/yellow/red), temperature & humidity sensing, LCD display, wall-mount bracket, dry-contact relay output for interlocked shutdown |
| Brand | Alpha |
|---|---|
| Origin | Germany |
| Model | Q-Series |
| Frequency | 2.45 GHz |
| Power Range | 50–1200 W (model-dependent) |
| Chamber Material | Quartz or Borosilicate Glass |
| Max Wafer Size | 8-inch |
| Working Pressure | ≤100 Pa |
| Vacuum System | Integrated dry pump (oil pump optional) |
| Gas Control | Up to 6 MFC channels (2–3 standard) |
| Vacuum Gauges | Pirani (1–1×10⁵ Pa) and/or Baratron (1–1000 Pa) |
| Control Interface | 7"–10.4" TFT touchscreen |
| Operating System | Windows Embedded Compact 2013 |
| Compliance | CE, RoHS, SEMI S2/S8 compatible |
| Dimensions (W×H×D) | 500×370×550 mm to 760×775×775 mm |
| Weight | 40–95 kg |
| Utilities | 3/N/PE AC 240/400 V, 50/60 Hz, 16 A |
| Brand | Annealsys |
|---|---|
| Origin | France |
| Model | AS-One 100 / AS-One 150 |
| Max Temperature | Standard: up to 1250°C |
| High-Temp Option | up to 1450°C |
| Temperature Accuracy | ±1% of setpoint |
| Max Power | 30 kW (34 kW peak) |
| Ramp Rate | up to 200°C/s |
| Cooling Rate | up to 100°C/s |
| Heating Method | IR radiation with quartz lamp array |
| Chamber Internal Diameter | 100 mm (4-inch) for AS-One 100 |
| Vacuum Range | Atmospheric to 1×10⁻⁶ Torr |
| Gas Lines | Up to 5 MFC-controlled process gases + 1 purge line |
| Control System | Full PC-based Windows software with recipe management (up to 100 steps per recipe), real-time data logging, and audit-trail-capable HMI |
| Brand | Exaddon |
|---|---|
| Origin | United Kingdom |
| Model | CERES |
| Printing Resolution | <1 µm |
| Print Materials | Cu, Au, Ni, Ag, Pt |
| XY Positioning Accuracy | ±250 nm |
| Z Positioning Accuracy | ±5 nm |
| Maximum Build Area (Standard) | 25 × 25 mm |
| Max. Print Speed | 200 µm/s |
| Operating Environment | Ambient Temperature, No Post-Processing Required |
| Core Technology | Template-Free Electrochemical Deposition (ECD) |
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