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| Brand | Alpha |
|---|---|
| Origin | Germany |
| Model | Q-Series |
| Frequency | 2.45 GHz |
| Power Range | 50–1200 W (model-dependent) |
| Chamber Material | Quartz or Borosilicate Glass |
| Max Wafer Size | 8-inch |
| Working Pressure | ≤100 Pa |
| Vacuum System | Integrated dry pump (oil pump optional) |
| Gas Control | Up to 6 MFC channels (2–3 standard) |
| Vacuum Gauges | Pirani (1–1×10⁵ Pa) and/or Baratron (1–1000 Pa) |
| Control Interface | 7"–10.4" TFT touchscreen |
| Operating System | Windows Embedded Compact 2013 |
| Compliance | CE, RoHS, SEMI S2/S8 compatible |
| Dimensions (W×H×D) | 500×370×550 mm to 760×775×775 mm |
| Weight | 40–95 kg |
| Utilities | 3/N/PE AC 240/400 V, 50/60 Hz, 16 A |
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