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| Brand | ANRIC |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | AT650/850T |
| Pricing | Upon Request |
| Brand | ANRIC |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | AT610 |
| Pricing | Upon Request |
| Brand | ANRIC |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | AT410 |
| Pricing | Upon Request |
| Brand | ANRIC |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | AT810 |
| Pricing | Upon Request |
| Brand | ANRIC |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | AT650/850P |
| Pricing | Upon Request |
| Brand | ANRIC |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | AT200M |
| Pricing | Upon Request |
| Footprint | 14 in × 15 in × 14.5 in (35.5 cm × 38.1 cm × 36.5 cm) |
| Chamber Volume | ~15 in³ (38.1 cm³) |
| Substrate Capacity | Up to four 2-inch wafers (square or circular) |
| Precursor Ports | Standard 2-port (1 precursor + 1 reactant) |
| Precursor Temp Range | RT to 180 °C ±2 °C (heated jacket) |
| Chamber Temp Range | RT to 300 °C ±1 °C (optional chuck heating to 450 °C+) |
| Plasma Source Option | 13.56 MHz, 80 W hollow cathode plasma (AT200M Plus) |
| Control Interface | 5-inch PLC-driven touchscreen HMI (Windows Ethernet remote access enabled) |
| Materials | Semiconductor-grade stainless steel chamber with metal-sealed fittings, heated manifolds, ultra-fast ALD valves with integrated inert gas purge (UHP N₂ >99.9995%) |
| Compliance | Cleanroom-compatible design |
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