Plasma Surface Treater
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| Brand | Europlasma |
|---|---|
| Origin | Belgium |
| Model | CD400PLC |
| RF Frequency | 100 kHz |
| Power Range | 0–600 W |
| Vacuum System | Rotary Vane Pump (30 m³/h) with Pirani Gauge |
| Chamber Dimensions | 400 × 400 × 400 mm |
| Chamber Volume | 64 L |
| Chamber Material | Anodized Aluminum |
| Tray Configuration | 4 × (305 × 360 × 40 mm) |
| Control System | PLC-based Automated Controller |
| Input Gas | Single-port MFC-controlled (1/4″ BSP, max. 1 bar inlet pressure) |
| Exhaust Port | 28 mm OD |
| Electrical Supply | 380 V AC, 3-phase, 50 Hz, 40 A |
| Safety Features | Emergency Stop, Vacuum Interlock, Overtemperature Lockout, CE Certified |
| Brand | Europlasma |
|---|---|
| Origin | Belgium |
| Model | CD500 |
| RF Frequency | 50 Hz |
| Power Supply | 380 V AC, 3-phase, 40 A |
| Chamber Dimensions | 500 × 400 × 650 mm |
| Chamber Volume | 129 L |
| Chamber Material | Anodized Aluminum |
| Vacuum Measurement | Pirani Gauge |
| Vacuum Pump | Dry Scroll Pump |
| Gas Inlet | 1/4″ (6.45 mm) with MFC |
| Exhaust Port | 28 mm |
| Control System | PLC-based Automated Interface |
| Safety Certifications | CE Compliant |
| Operating Temperature | <40 °C |
| Brand | Europlasma |
|---|---|
| Origin | Belgium |
| Model | CD600 PLC |
| RF Frequency | 50 Hz |
| Power Supply | 380 V AC, 3-phase, 40 A |
| Chamber Dimensions | 600 × 600 × 600 mm |
| Chamber Volume | 216 L |
| Chamber Material | Anodized Aluminum |
| Vacuum System | Dry Scroll Pump (480 m³/h), Dual Pirani Gauges |
| Gas Inlet | 1/4″ (6.45 mm) with MFC |
| Exhaust Port | Ø28 mm |
| Control Interface | 17″ Touchscreen HMI with PLC-based Automation |
| Compliance | CE Certified |
| Safety Features | Emergency Stop, Vacuum Interlock, Thermal Overload Protection |
| Operating Modes | Plasma Activation, Hydrophilic Coating (WCA < 10°), Oleophobic/Hydrophobic Coating (WCA > 120°), Halogen-Free PlasmaGuard® and Nanofics® Functionalization |
| Brand | Europlasma |
|---|---|
| Origin | Belgium |
| Model | CD600PLC |
| Power | 5 kW |
| Chamber Dimensions | 600 × 600 × 600 mm |
| Chamber Volume | 216 L |
| Chamber Material | Aluminum |
| Operating Gases | Oxygen, Argon, etc. |
| Control System | Fully Automated PLC-Based Interface |
| Vacuum System | Dry Pumping Unit (480 m³/h), Dual Pirani Gauges |
| Input Voltage | 380 V AC, 3-Phase, 50 Hz, 40 A |
| Gas Inlet | 1/4″ (6.45 mm) with Mass Flow Controller (MFC) |
| Exhaust Port | 28 mm |
| Safety Certifications | CE Compliant |
| Compliance | Designed for GLP/GMP-aligned lab environments |
| Brand | Europlasma |
|---|---|
| Origin | Belgium |
| Model | CD681 |
| RF Frequency | 50 Hz |
| Power Supply | 380 V AC, 3-phase, 40 A |
| Chamber Volume | 681 L |
| Chamber Dimensions | 1000 × 980 × 695 mm |
| Chamber Material | Anodized Aluminum |
| Tray Configuration | 4 trays (858 × 672 mm each, 150 mm spacing) |
| Vacuum System | Dry Pump + Baratron Capacitance Manometer |
| Gas Inlet | 1/4″ (6.45 mm) with MFC |
| Exhaust Port | 28 mm diameter |
| Control System | PLC-based Automated Interface |
| Safety Certifications | CE compliant |
| Operating Temperature | <40 °C |
| Brand | Europlasma |
|---|---|
| Origin | Belgium |
| Model | CD875 |
| RF Frequency | 50 Hz |
| Power Supply | 380 V AC, 3-phase, 40 A |
| Chamber Volume | 875 L |
| Chamber Dimensions | 1000 × 1260 × 695 mm |
| Chamber Material | Anodized Aluminum |
| Vacuum Measurement | Baratron Capacitance Manometer |
| Vacuum Pump | Dry Scroll Pump |
| Gas Inlet | 1/4″ (6.45 mm) with MFC |
| Exhaust Port | Ø28 mm |
| Control System | PLC-based Automated Control |
| Safety Certifications | CE compliant |
| Operating Temperature | <40 °C |
| Tray Configuration | 4× adjustable trays (858 × 672 mm, 220 mm spacing) |
| Viewing Window | Integrated quartz viewport |
| Safety Features | Emergency stop, vacuum interlock, thermal cutoff |
| Brand | Europlasma |
|---|---|
| Origin | Belgium |
| Model | JuniorPLC |
| RF Frequency | 50 Hz |
| Power Supply | 40 A (at 230 V AC, single-phase) |
| Chamber Dimensions | Ø230 mm × 250 mm depth |
| Chamber Volume | 10.4 L |
| Chamber Material | Anodized Aluminum |
| Control System | Microprocessor-Based Automatic Control |
| Maximum Operating Temperature | <40 °C during treatment |
| Application Scope | Surface cleaning, activation, and functionalization of polymeric, metallic, and ceramic substrates |
| Brand | Europlasma |
|---|---|
| Origin | Belgium |
| Model | Nanofics® |
| RF Power | 5 kW |
| Chamber Dimensions | 700 × 700 × 1200 mm |
| Chamber Volume | 490 L |
| Chamber Material | Aluminum |
| Process Gases | O₂, Ar, and other reactive/inert gases |
| Control System | Fully Automated |
| Equipment Type | Imported Plasma Surface Treatment System |
| Application | Industrial-scale PECVD nanocoating for electronics waterproofing |
| Brand | Europlasma |
|---|---|
| Origin | Belgium |
| Model | Nanofics@ CD 600 PLC |
| Instrument Type | Imported Low-Pressure Plasma Surface Treater |
| Power | 5 kW |
| Dimensions | 600 × 600 × 600 mm |
| Chamber Volume | 216 L |
| Chamber Material | Aluminum |
| Operating Gases | Oxygen, Argon, etc. |
| Control System | Fully Automated PLC-Based Interface |
| Vacuum System | Dry Pumping Unit (480 m³/h) with Dual Pirani Gauges |
| RF Generator | Customizable Frequency & Power Delivery |
| Compliance | CE Certified |
| Safety Features | Emergency Stop, Vacuum Interlock, Thermal Overload Protection |
| Brand | Europlasma |
|---|---|
| Origin | Belgium |
| Model | Nanofics@ CD600 |
| Instrument Type | Imported Low-Pressure Plasma Surface Treatment System |
| Power | 5 kW |
| Chamber Dimensions | 600 × 600 × 600 mm |
| Chamber Volume | 216 L |
| Chamber Material | Anodized Aluminum |
| Operating Gases | O₂, Ar, and other process gases |
| Control System | Fully Automated PLC with 17″ Touchscreen HMI |
| Vacuum System | Dry Scroll Pump Group, 480 m³/h pumping speed |
| Vacuum Measurement | Dual Pirani Gauges |
| Gas Delivery | Single MFC-controlled inlet (1/4″, 1 bar max input) |
| Exhaust Port | 28 mm diameter |
| Safety Compliance | CE-certified with Emergency Stop, Vacuum Interlock, Thermal Overload Protection |
| Electrical Supply | 380 V AC, 3-phase, 50 Hz, 40 A |
| Brand | Europlasma |
|---|---|
| Origin | Belgium |
| Model | Nanofics@10 |
| Power | 5 kW |
| Chamber Dimensions | 700 × 700 × 1200 mm |
| Chamber Volume | 490 L |
| Chamber Material | Anodized Aluminum |
| Process Gas | Argon (Ar) |
| Control System | PLC-based Automation with 17″ Touchscreen HMI |
| Vacuum System | Dry Scroll Pump, 480 m³/h Pumping Speed |
| Vacuum Measurement | Pirani Gauge |
| Gas Delivery | Single-Channel MFC (1/4″ Inlet, 1 bar max input pressure) |
| Exhaust Port | 28 mm OD |
| Safety Features | Emergency Stop, Vacuum Interlock, Thermal Overload Protection |
| Certification | CE compliant |
| Electrical Supply | 380 V AC, 3-phase, 50 Hz, 40 A |
| Brand | Europlasma |
|---|---|
| Origin | Belgium |
| Model | CD1200 |
| Power | 5 kW |
| Dimensions (W×D×H) | 700 × 700 × 1200 mm |
| Chamber Volume | 490 L |
| Chamber Material | Anodized Aluminum |
| Process Gases | O₂, Ar, and other inert/reactive gases |
| Control System | PLC-based automation with 17″ HMI touchscreen |
| Vacuum System | Dry scroll pump set, 480 m³/h pumping speed |
| Vacuum Measurement | Pirani gauge |
| Gas Delivery | Single MFC-controlled inlet (1/4″ BSP, 1 bar max input pressure) |
| Exhaust Port | Ø28 mm |
| Safety Compliance | CE-marked, emergency stop, vacuum interlock, thermal overtemperature protection |
| Electrical Supply | 380 V AC, 3-phase, 50 Hz, 40 A |
| Brand | Hiden |
|---|---|
| Origin | United Kingdom |
| Model | ESPion |
| Probe Type | Electrically Compensated, RF-Shielded Langmuir Probe |
| Operating Frequency Range | DC to 13.56 MHz |
| Maximum Scan Rate | 15 sweeps per second |
| Probe Drive Options | 300 mm / 600 mm / 915 mm motorized linear actuators, optional linear-rotary combi-drive |
| Cooling | Gas-cooled multi-sensor chain for high-temperature plasma operation |
| Compensation | Passive RF compensation (4.25 MΩ @ 13.56 MHz), reference probe for low-frequency drift & noise rejection |
| Data Interface | RS232, RS485, Ethernet LAN |
| Software | ESPsoft v5.x with pulse-gating, EEDF reconstruction, and automated plasma parameter extraction |
| Compliance | Designed for GLP-compliant plasma diagnostics |
| Brand | Ketjim |
|---|---|
| Origin | Anhui, China |
| Model | GSL1100X-PJF |
| Input Power | 110/220 V, 50/60 Hz, <1000 W |
| Output Frequency | 20–23 kHz |
| Plasma Jet Nozzles | 2 units (round: Ø10–12 mm |
| rectangular | 15–18 mm) |
| Gas Supply Pressure | ≥0.275 MPa |
| Operating Plasma Pressure | 0.048–0.068 MPa |
| Ambient Temperature | <42 °C |
| Relative Humidity | ≤40 %RH |
| Dimensions (W×H×L) | 380×210×500 mm |
| Net Weight | 10 kg |
| Certification | CE |
| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Model | GSL-1100X-PJF-A |
| RF Frequency | 20–23 kHz |
| Maximum Power | 1000 VA |
| Overall Dimensions | 550 mm (W) × 650 mm (D) × 920 mm (H) |
| Chamber Internal Volume | 380 mm (W) × 210 mm (H) × 500 mm (D) |
| Chamber Material | Stainless Steel |
| Operating Gases | 2 (configurable) |
| Control Method | Manual (X/Y panel control |
| Input Voltage | AC 220 V, 50 Hz |
| Gas Supply Pressure | 0.5–0.7 bar (adjustable) |
| Pressure Protection Range | 0.4–0.8 bar |
| Nozzle Width | Round nozzle: 10–12 mm |
| Flat nozzle | 15–18 mm |
| Weight | 17 kg |
| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | GSL1100X-PJF |
| Instrument Type | Atmospheric-Pressure Plasma Jet System |
| Input Voltage | 110/220 V, 50/60 Hz |
| Power Consumption | <1000 W |
| RF Output Frequency | 20–23 kHz |
| Gas Supply Pressure | ≥0.275 MPa |
| Operating Plasma Pressure | 0.048–0.068 MPa |
| Nozzle Options | Ø10–12 mm circular or 15–18 mm rectangular |
| Dimensions (W×D×H) | 500 × 380 × 210 mm |
| Weight | 10 kg |
| Ambient Operating Conditions | ≤42 °C, ≤40 % RH, non-flammable atmosphere |
| Certifications | CE compliant |
| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Model | PCE-3 |
| RF Frequency | 13.56 MHz |
| Maximum RF Power | 18 W (adjustable in three steps: 6.8 W / 10.5 W / 18 W) |
| Chamber Dimensions | Ø75 mm × 165 mm |
| Chamber Material | Heat-resistant borosilicate glass |
| Gas Inlet | Single-channel, compatible with air, O₂, Ar, N₂, or custom gas mixtures |
| Vacuum Requirement | ≥160 L/min pumping speed, ultimate pressure ≤0.27 mbar (200 mtorr) |
| Input Voltage | 110 V / 220 V, 50 Hz / 60 Hz |
| Device Dimensions | 200 mm × 250 mm × 210 mm |
| Net Weight | 8 kg (excluding vacuum pump) |
| Control Mode | Fully automatic microprocessor-based operation |
| Safety Compliance | CE-marked design |
| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | PCE-6 |
| RF Frequency | 3.0 MHz (±1%) |
| Output Power | 7.2 W / 10.2 W / 29.6 W (3-step manual adjustment) |
| Chamber Dimensions | Ø160 mm × 190 mm |
| Chamber Volume | ≈3.8 L |
| Chamber Material | High-purity fused quartz |
| Vacuum Pump | Direct-coupled dual-stage rotary vane pump, 120 L/min |
| Ultimate Vacuum | ≤50 mtorr |
| Gas Inlets | 3 independent mass-flow-controlled ports (6 mm Swagelok® compression fittings) |
| Gas Compatibility | O₂, N₂, Ar, H₂, air, and custom gas mixtures |
| Control Interface | Manual tactile panel with real-time digital display of power, time, and vacuum level |
| Overall Dimensions | 400 mm × 300 mm × 300 mm |
| Net Weight | 10.2 kg |
| Input Power | AC 220 V, 50/60 Hz |
| Total System Power Consumption | <600 W |
| Vacuum Pump Power | <500 W |
| Sealing | Aluminum folding flange with Ø45 mm quartz viewport |
| Brand | KJ GROUP |
|---|---|
| Origin | Liaoning, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | PCE-6V |
| Instrument Type | Domestic RF Plasma Cleaner |
| RF Frequency | 13.56 MHz |
| RF Power Output | 100 W |
| Total System Power Consumption | <500 W (including vacuum pump) |
| Chamber Dimensions | Ø165 mm × 55 mm |
| Chamber Material | Fused Quartz |
| Vacuum Interface | Ø12 mm |
| Ultimate Vacuum | 0.1 Pa |
| Operating Vacuum Range | 60–500 Pa |
| Gas Inlets | 2 channels (optional flow controllers) |
| Electrode Diameter | Ø120 mm |
| Sample Stage | Ø150 mm (effective Ø140 mm) |
| Stage-to-Electrode Gap | Adjustable from 15 to 50 mm |
| Optional Heated Stage | Ø100 mm, 200–500 °C |
| Cooling Water Pressure Requirement | 0.2–0.4 kPa |
| Ambient Operating Conditions | 5–35 °C, RH <80% non-condensing, altitude ≤2000 m |
| Dimensions (W×D×H) | 245 mm × 235 mm × 460 mm |
| Weight | 20 kg (excluding vacuum pump) |
| Brand | KJ GROUP |
|---|---|
| Model | PCE-8 |
| Type | Benchtop RF Plasma Surface Treater |
| RF Frequency | 13.56 MHz |
| Max RF Power | 100 W (continuously adjustable) |
| Plasma Chamber | High-purity quartz tube, Ø8.2" ID × 12" L (Ø208 mm × 305 mm), aluminum folding flange with Ø60 mm viewport |
| Ultimate Vacuum | 50 mtorr |
| Pumping System | Direct-coupled dual-stage rotary vane pump (240 L/min) |
| Gas Compatibility | N₂, O₂, Ar, H₂, air, and custom gas mixtures |
| Mass Flow Control | 0–500 sccm (digital MFC integrated) |
| Control Interface | 6" color touchscreen (power, time, gas flow, pump activation) |
| Dimensions (W×D×H) | 620 × 450 × 600 mm |
| Total Power Consumption | <600 W |
| Input Voltage | AC 220 V |
| Origin | Netherlands |
|---|---|
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported Instrument |
| Model | MARCH AP-1000 |
| RF Frequency | 13.56 MHz (RF Generator with Auto-Impedance Matching) |
| Power Output | 2 kW |
| Chamber Material | Anodized Aluminum Alloy |
| Chamber Volume | Configurable (Standard & HTP Options Available) |
| Process Gases | O₂, Ar, H₂, He (via 4 Mass Flow Controllers) |
| Control System | PLC-Based Closed-Loop Control with Integrated Mechanical Height Sensor |
| Dimensions (Standard Unit) | 567 × 764 × 664 mm (W × D × H) |
| Dimensions (HTP Configuration) | 680 × 1127 × 1536–1890 mm (W × D × H) |
| Net Weight | 485 kg |
| Compliance | Designed for ISO Class 5–7 cleanroom integration |
| Software | Proprietary SPC-Enabled Process Management Suite with Audit Trail Capability |
| Brand | Makewave |
|---|---|
| Origin | Shandong, China |
| Manufacturer Type | Direct Manufacturer |
| Country of Origin | Domestic (China) |
| Model | MKP-WT1FA |
| RF Frequency | 2450 MHz |
| Output Power | 1000 W (continuous, non-pulsed) |
| Chamber Material | 304 Stainless Steel |
| Gas Supply | Multi-channel configurable gas inlet with mass flow control |
| Control System | PLC-based automated control with real-time parameter monitoring |
| Dimensions (W×H×D) | 1400 × 1600 × 700 mm |
| Weight | 80 kg |
| Cooling | Integrated water-cooling system |
| Safety Compliance | Microwave leakage < 5 mW/cm² (meets and exceeds GB 10436-2008) |
| Certification | ISO 9001 certified |
| Warranty | 12 months |
| Brand | EMCN |
|---|---|
| Origin | Henan, China |
| Manufacturer Type | Authorized Distributor |
| Equipment Type | Domestic RF Plasma Surface Treater |
| Model | MSBC-2 |
| RF Frequency | 2.54 GHz |
| Total System Power | < 2000 W (including vacuum pump) |
| Overall Dimensions | 100 cm (H × W × D, approximate) |
| Sample Chamber Volume | Φ88 mm × 140 mm (ID × height) |
| Chamber Material | Borosilicate Glass |
| Process Gas | Argon (high-purity) |
| Control Mode | Fully Automated |
| Vacuum System | Dual-stage — turbo-molecular pump + rotary vane mechanical pump |
| Base Pressure | ≤ 2 × 10⁻³ Pa |
| Vacuum Gauges | Thermocouple Gauge + Cold Cathode Ionization Gauge |
| Sample Stage Motion | Planar rotation, tilt rotation, and tilt precession |
| Maximum Sample Diameter | Φ40 mm |
| Gold Target Diameter | Φ38 mm |
| Bell Jar Dimensions | Φ250 mm × 340 mm (ID × height) |
| Internal Coating Zone (for evaporation) | Φ88 mm × 57 mm (ID × height) |
| Brand | PIE |
|---|---|
| Origin | USA |
| Model | EM-KLEEN |
| RF Frequency | 13.56 MHz |
| RF Power | 75 W |
| Control | Fully Automated |
| Gas Configuration | Single- or Triple-Gas Mixing System (O₂, H₂, Ar, N₂, CF₄, NF₃, NH₃, HF, H₂S) |
| Plasma Type | Remote Inductively Coupled Plasma (ICP), Non-Microwave, Non-Underfill, Non-Wafer-Specific |
| Chamber Compatibility | Direct integration with SEM, FIB-SEM, TEM, XPS, ALD, CD-SEM, EBR, EBI, EUVL, and other UHV/XHV systems |
| Sample & Chamber Cleaning | Simultaneous in-situ cleaning of both specimen surface and vacuum chamber interior |
| Plasma Intensity Monitoring | Integrated real-time plasma emission sensor |
| Flow Control | Pressure-feedback-based automated mass flow control (no manual needle valve) |
| User Interface | Capacitive touchscreen with 60 programmable cleaning protocols |
| Safety Modes | Dual-mode operation (Smart Safety Mode + Expert Control Mode) |
| Scheduling | SmartSchedule™ logic triggered by chamber venting cycles, sample load count, or time-based intervals |
| Electromagnetic Compatibility | Low-EMI architecture |
| Optional Upgrades | Sapphire plasma tube assembly |
| Brand | PIE Scientific |
|---|---|
| Origin | USA |
| Model | Tergeo Basic |
| RF Frequency | 13.56 MHz |
| RF Power | 75 W (optional 150 W) |
| Chamber Internal Diameter × Depth | 110 mm × 280 mm |
| Chamber Volume | 2.6 L |
| Chamber Material | High-Purity Fused Quartz |
| Gas Inlets | 2 standard, optional 3rd |
| Control Interface | 7-inch full-color touchscreen, fully automated |
| Plasma Type | Capacitively Coupled RF Plasma (CCP), non-microwave, non-underfill, non-wafer-specific |
| Compliance | CE, RoHS, FCC Class A |
| Brand | PIE Scientific |
|---|---|
| Model | Tergeo EM |
| Origin | USA |
| RF Frequency | 13.56 MHz |
| RF Power | 75 W (optional 150 W) |
| Chamber Dimensions | Ø110 mm × Depth 280 mm |
| Chamber Volume | 2.6 L |
| Chamber Material | High-Purity Fused Quartz |
| Gas Inlets | 2 standard, optional 3rd inlet |
| Control Interface | 7-inch full-color touchscreen, fully automated |
| Plasma Type | Capacitively Coupled RF Plasma (CCP), no microwave, no downstream-only, no wafer-specific configuration |
| Compliance | Designed for GLP-compliant lab environments |
| Brand | PIE Scientific |
|---|---|
| Origin | USA |
| Model | SEMI-KLEEN |
| RF Frequency | 13.56 MHz |
| RF Power Output | 0–100 W (continuously adjustable) |
| Max Input Power | 200 W |
| Vacuum Interface | KF40 (NW40) flange |
| Ignition Pressure | <0.1 mTorr |
| Operating Pressure Range | <0.1 mTorr to >1.0 Torr |
| Leak Rate | <0.005 sccm |
| Gas | Ambient air (no external gas supply required) |
| Control | Microprocessor-based touchscreen interface with programmable cleaning protocols |
| Plasma Monitoring | Integrated real-time plasma intensity sensor |
| Automatic RF Matching | Yes |
| Particle Filtration | Dual-stage proprietary particulate filter compliant with semiconductor-grade cleanliness requirements |
| Compliance | Designed for GLP/GMP-adjacent vacuum system maintenance |
| [Brand | Hefei Kejing |
|---|---|
| Origin | Anhui, China |
| Model | PDC-36G |
| Input Voltage | 110/220 V, 50/60 Hz |
| Power Consumption | <100 W |
| RF Output Frequency | 13.56 MHz |
| DC Bias Settings | Low (680 V / 10 mA / 6.8 W), Medium (700 V / 15 mA / 10.5 W), High (720 V / 25 mA / 18 W) |
| Chamber Dimensions | Ø75 mm × 165 mm (borosilicate glass) |
| Vacuum Requirement | ≥160 L/min pumping speed, ultimate pressure ≤200 mtorr (0.27 mbar) |
| Gas Compatibility | Air, O₂, Ar, N₂, or mixed non-flammable gases |
| External Vacuum Gauge Option | Pirani-based resistive gauge (range: atmospheric to 0.1 Pa, non-corrosive gases only) |
| Dimensions (W×D×H) | 200 × 250 × 210 mm |
| Net Weight (excl. pump) | 8 kg |
| Warranty | 12 months standard, lifetime technical support] |
| Brand | Europlasma |
|---|---|
| Origin | Belgium |
| Model | CD1836 |
| RF Power | 5 kW |
| Chamber Dimensions | 1600 × 1350 × 850 mm |
| Chamber Volume | 1836 L |
| Chamber Material | Anodized Aluminum |
| Process Gases | O₂, Ar, and other non-halogenated process gases |
| Control System | Fully Automated PLC-Based Interface |
| Vacuum System | Dry Scroll Pump with Pirani Gauge |
| Electrical Supply | 380 V AC, 3-Phase, 50 Hz, 63 A |
| Certifications | CE Compliant |
| Safety Features | Emergency Stop, Vacuum Interlock, Thermal Overload Protection |
| Brand | Abner |
|---|---|
| Origin | Jiangsu, China |
| Model | ABN-PCM-001 |
| Instrument Type | Benchtop Low-Temperature RF Plasma Surface Treater |
| Working Gases | Dual-Channel (Ar, O₂, N₂, H₂, CF₄ compatible) |
| Control Method | Dual-Independent Mass Flow Control |
| Chamber Material | Fused Quartz |
| Vacuum System | Integrated Rotary Vane Pump (Ultimate Pressure ≤ 5 × 10⁻² mbar) |
| RF Power Supply | 13.56 MHz, 0–100 W Adjustable |
| Chamber Volume | 8 L |
| Operating Temperature | Ambient to 60 °C (non-thermal plasma regime) |