Pumps
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| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Model | DUO 11 ATEX |
| Pump Type | Oil-Lubricated Rotary Vane |
| Ultimate Pressure (Gas Ballast ON) | 3 × 10⁻² hPa |
| Ultimate Pressure (Gas Ballast OFF) | 3 × 10⁻³ hPa |
| Pumping Speed | 9 m³/h (2.5 L/s) |
| Motor Power | 300 W |
| Dimensions (L×W×H) | 440 × 146 × 219 mm |
| Weight | 15.3 kg |
| Cooling Method | Air-Cooled |
| Drive Speed | 3,000 min⁻¹ |
| Inlet Flange | DN 16 ISO-KF |
| ATEX Certification | Directive 2014/34/EU, Category 3G, Temperature Class T4, Gas Group IIC |
| Compliance | EN 60079-0, EN 60079-1, EN 60079-31 |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | France |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | DUO 3 |
| Instrument Type | Rotary Vane Pump |
| Product Type | Oil-Lubricated Pump |
| Pumping Speed | 2.5 m³/h (50 Hz) / 2.9 m³/h (60 Hz) |
| Ultimate Pressure | 3 × 10⁻³ mbar |
| Motor Speed | 3000 rpm (50 Hz) / 3600 rpm (60 Hz) |
| Noise Level | ≤ 53 dB(A) |
| Weight | 11.3 kg |
| Inlet/Outlet Flange | DN 16 ISO-KF |
| Power Input | 24 VDC |
| Standard Power Connector | IEC C14 |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Pump Type | Oil-Lubricated Rotary Vane |
| Pumping Speed | 32–36 m³/h (50/60 Hz) |
| Ultimate Pressure | 2 × 10⁻³ hPa (with gas ballast open) |
| Noise Level | ≤ 61 dB(A) |
| Weight | 68 kg |
| Motor Power | 3.7 kW |
| Inlet/Outlet Flange | DN 40 ISO-KF |
| Dimensions (L×W×H) | 1000 × 320 × 320 mm |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Model | Hepta 630P |
| Pump Type | Dry Screw Vacuum Pump |
| Oil-Free Operation | Yes |
| Ultimate Pressure (Valve Closed) | 1 × 10⁻² mbar |
| Pumping Speed (50 Hz / 60 Hz) | 630 m³/h |
| Inlet Flange | DN 100 ISO-KF |
| Outlet Flange | DN 80 PN16 |
| Noise Level | ≤75 dB(A) |
| Weight | 550 kg |
| Cooling | External Heat Exchanger Integrated on Baseplate |
| Motor Interface | Universal Flange Design |
| Oil Sight Glass | Enlarged |
| Power Supply Compatibility | 50 Hz & 60 Hz (Same Pumping Speed at Both Frequencies) |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Model | HiCube 80 Eco |
| Pump Type | Oil-Free Turbo-Molecular Pump System |
| Ultimate Pressure | <1×10⁻⁸ Pa (without gas ballast) |
| Pumping Speed (N₂) | 67 L/s at DN 63 CF-F inlet |
| Pre-vacuum Pump | MVP 015-2 multi-stage diaphragm pump |
| Forepump Speed | 1 m³/h (16.67 L/min, N₂) |
| Ultimate Forepressure | <1×10⁻² Pa |
| Cooling | Convection-cooled (standard) |
| Power Supply | 100–240 V AC, 50/60 Hz |
| Max. Power Consumption | 170 W |
| Sound Pressure Level | ≤50 dB(A) |
| Inlet Flange | DN 63 CF-F |
| Outlet Flange | G 1/8" |
| Dimensions (W×D×H) | 352 × 301 × 302 mm |
| Weight | 13.5 kg |
| Compliance | CE, RoHS, ISO 9001 certified |
| Control Interface | Integrated digital controller with status LEDs and RS-232/USB option |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Pump Type | Turbo-molecular Vacuum Pump System |
| Nominal Pumping Speed (N₂) | 67 L/s |
| Ultimate Pressure | ≤1×10⁻⁷ hPa |
| Weight | 17 kg (37.48 lb) |
| Cooling | Air-Cooled |
| Compliance | UL / CSA Certified |
| Base Pump | MVP 015-2 or MVP 015-4 Diaphragm Pump |
| Flange Options | DN 63 CF-F, DN 63 ISO-K, DN 40 ISO-KF |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Pump Type | Turbo Molecular Pump (Oil-Free) |
| Model | HiCube Classic |
| Maximum Pumping Speed (N₂) | 685 L/s |
| Ultimate Pressure | < 1 × 10⁻⁷ hPa |
| External Dimensions | 1 unit (compact vertical configuration) |
| Weight | 50 kg |
| Motor Power | 1 kW |
| Compliance | CE, RoHS, ISO 9001-certified manufacturing |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Pump Type | Turbo Molecular Pump |
| Nitrogen Pumping Speed | 10 L/s |
| Ultimate Vacuum | < 5 × 10⁻⁵ hPa |
| Bearing System | Hybrid Ceramic Ball Bearings |
| Cooling | Natural Convection (Air-Cooled) |
| Drive Electronics | Integrated TC 110 Controller |
| Inlet Flange | DN 25 ISO-KF |
| Exhaust Flange | DN 16 ISO-KF / G 1/8" |
| Rated Speed | 90,000 rpm ±2% |
| Startup Time | 0.9 min |
| Weight | 1.8–2.0 kg |
| Protection Rating | IP54 |
| Certifications | SEMI S2, UL/cUL, CSA |
| Operating Voltage | 24 V DC (±5%) |
| Max. Permissible Magnetic Field | 3 mT |
| Compressibility Ratio (N₂) | 3 × 10⁶ |
| Communication Interface | RS-485 + Remote I/O |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Model | HiPace 10–800 |
| Pump Type | Oil-free Turbo Molecular Pump |
| Ultimate Pressure | < 1 × 10⁻⁷ hPa (N₂) |
| Weight Range | 12.8 – 19.1 kg |
| Integrated Controller Options | TC 110, TC 400 |
| Communication Interfaces | Profibus, DeviceNet, E74 |
| Ingress Protection | IP54 |
| Certifications | SEMI S2, UL Listed |
| Mounting Flexibility | Omnidirectional (360°) Installation |
| Cooling | Integrated High-Efficiency Thermal Management System |
| Bearing Maintenance | Field-Replaceable Bearings |
| Corrosion-Resistant Variant Available | HiPace C Series |
| Industrial-Dust Resistant Variant | HiPace P Series |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Pump Type | Turbo Molecular Pump |
| Pumping Speed (He) | 1300 L/s |
| Ultimate Vacuum | 5 × 10⁻¹⁰ hPa |
| Weight | 30.5 kg |
| Protection Rating | IP54 |
| Certified | SEMI S2, UL, CSA, TÜV |
| Interface | RS-485, Optional Profibus/DeviceNet |
| Motor Speed | 37,800 rpm ±2% |
| Startup Time | 2.5 min |
| Compression Ratio (Ar/N₂) | >1 × 10⁸ |
| Compression Ratio (H₂) | 6 × 10³ |
| Compression Ratio (He) | 2 × 10⁴ |
| Mounting Angle | 0–90° or 90–180° |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Pump Type | Oil-Free Turbo Molecular Pump |
| Nominal Pumping Speed Range | 1200–2300 L/s (N₂) |
| Bearing System | Hybrid Ceramic Ball Bearings |
| Mounting Flexibility | 0°–180° (incl. inverted installation) |
| Certified Standards | SEMI S2, UL 61010-1, CSA C22.2 No. 61010-1, TÜV EN 61000-6-3/6-4 |
| Ingress Protection | IP54 |
| Integrated Controller | TC 1200 |
| Operating Voltage | 90–265 V AC, 50/60 Hz |
| Max. Rotational Speed | Up to 90,000 rpm |
| Ultimate Pressure | < 1 × 10⁻⁷ hPa (N₂) |
| Compression Ratio (N₂) | > 1 × 10⁸ |
| Startup Pressure Limit | ≤ 2 hPa (N₂) |
| Gas Compatibility | Standard (H₂, He, Ar, N₂, CF₄) |
| Weight Range | 27–47 kg |
| Inlet Flange Options | DN 200 or DN 250 (CF/KF) |
| Outlet | DN 40 |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Pump Type | Oil-Free Turbo Molecular Pump |
| Model | HiPace 1500 |
| Pumping Speed (N₂) | 1400 L/s |
| Ultimate Pressure | ≤ 1 × 10⁻⁷ hPa |
| Inlet Flange | DN 250 ISO-K / CF-F / ISO-F |
| Compatible Controller | TC 1200 |
| Communication Interfaces | RS-485, Profibus, DeviceNet (optional) |
| Weight | 29–41 kg |
| Compliance | CE, RoHS, EN 61000-6-2/6-4 |
| Series Variants | Standard (HiPace 1500), Corrosion-Resistant (C), Inverted-Mount (U), and Combined (U+C) |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Model | HiPace 1800 |
| Pump Type | Oil-free Turbo Molecular Pump |
| Nominal Pumping Speed (N₂) | 1450 L/s |
| Compression Ratio (N₂) | >1×10⁸ |
| Ultimate Pressure (N₂) | <1×10⁻⁷ hPa |
| Max. Starting Pressure (N₂) | 1.8 mbar |
| Gas Seal Valve | Integrated 24 V DC |
| Ingress Protection Rating | IP54 |
| Controller | TC 1200 |
| Communication Interface | RS-485 (Profibus/DeviceNet options available) |
| Flange | DN 200 ISO-K or ISO-F |
| Weight | 33–34 kg |
| Startup Time | ~20 min |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Model | HiPace 300 |
| Nominal Pumping Speed for N₂ | 260 L/s |
| Protection Rating | IP54 |
| Certifications | UL/CSA, CE, compliant with EN 61000-6-2/-4 and EN 61000-3-2 |
| Integrated Drive Electronics | TC 400 |
| Cooling | Integrated water-cooling system |
| Mounting | Flange-compatible (DN 100 CF/KF optional) |
| Application Class | High and ultra-high vacuum (UHV) systems |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Pump Type | Turbo Molecular Pump |
| Pumping Speed (N₂) | 260 L/s |
| Ultimate Pressure | < 5 × 10⁻¹⁰ mbar |
| Weight | 8.7 kg |
| IP Rating | IP54 |
| Certifications | SEMI S2, UL/CSA |
| Cooling Options | Air-cooled or Water-cooled |
| Motor Speed | 60,000 rpm ± 2% |
| Startup Time | ≤ 1.8 min |
| Compression Ratio (Ar/N₂) | ≥ 1 × 10¹¹ |
| Compression Ratio (H₂) | ≥ 9 × 10⁵ |
| Compression Ratio (He) | ≥ 1 × 10⁸ |
| Operating Voltage | 48 V DC |
| Max Current | 8.4 A |
| Max Allowable Magnetic Field | 5.5 mT |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Pump Type | Oil-Free Turbomolecular Pump |
| Bearing System | 5-Axis Active Magnetic Bearings |
| Nominal Pumping Speed Range | 300–800 L/s (N₂) |
| Ultimate Pressure | ≤1×10⁻⁸ mbar (HiPace 700/800M), ≤1×10⁻⁸ mbar (ATH 500 M) |
| Max. Rotational Speed | Up to 90,000 rpm |
| Compression Ratio (N₂) | >1×10¹¹ (HiPace 300M), >2×10⁷ (ATH 500 M), >1×10¹⁸ (HiPace 700/800M) |
| Inlet Flange | DN 100–200 ISO-KF / ISO-F |
| Integrated Drive Electronics | Yes |
| MTBF | ≥100,000 hours |
| Compliance | CE, RoHS, ISO 9001-certified manufacturing |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Model | HiPace 300M |
| Pump Type | Oil-Free Turbomolecular Pump |
| Pumping Speed (N₂) | 255 L/s |
| Ultimate Pressure (Theoretical) | 5 × 10⁻¹⁰ hPa |
| Weight | 17.2 kg |
| Inlet Flange | DN 100 ISO-K / CF-F / ISO-F (configurable) |
| Integrated Controller | TM 700 |
| Bearing System | 5-Axis Active Magnetic Bearings |
| Cooling | Integrated Water-Cooling Interface |
| Compliance | CE, RoHS, ISO 9001-certified Manufacturing |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Distributor | Shanghai Bohong |
| Import Status | Imported |
| Model | HiPace 350 |
| Pump Type | Turbo Molecular Pump |
| Oil-Free Operation | Yes |
| Nitrogen Pumping Speed | 300 L/s |
| Ultimate Pressure | ≤1×10⁻¹⁰ mbar |
| Dimensions (H×D) | 228 × 167.5 mm |
| Weight | 7.2 kg |
| Motor Frequency | 1100 Hz |
| Inlet Flange | DN 100 ISO-K or CF-F |
| Compression Ratio (N₂) | >10¹¹ |
| Max. Gas Load (N₂) | 2 mbar·L/s |
| Certifications | SEMI S2, UL 61010-1, CSA C22.2 No. 61010-1, NEMA 12 |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Pump Type | Oil-Free Turbo Molecular Pump |
| Bearing System | Hybrid (Ceramic Ball + Active Magnetic) |
| Nominal Pumping Speed Range | 300–790 L/s (N₂) |
| Ultimate Pressure | < 1 × 10⁻⁷ hPa |
| Compression Ratio (N₂) | > 1 × 10¹¹ |
| Max. Starting Pressure | 10 hPa |
| Integrated Controller | Yes |
| Cooling | Integrated Water Cooling |
| Mounting Flexibility | Any Orientation |
| Ingress Protection | IP54 |
| Certifications | SEMI S2, UL 61010-1 |
| Interface Options | Profibus, DeviceNet, E74 |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Pump Type | Oil-Free Turbo Molecular Pump |
| Model | HiPace 400 |
| Inlet Flange | DN 100 ISO-K / CF-F / ISO-F (configurable) |
| Pumping Speed (N₂) | 355 L/s |
| Ultimate Pressure (N₂) | < 1 × 10⁻⁷ hPa |
| Compression Ratio (N₂) | > 1 × 10¹¹ |
| Max. Starting Pressure (N₂) | 11 mbar |
| Gas Flow Capacity (N₂, full speed) | 6.5 hPa·L/s |
| Startup Time | ≤ 2 min |
| Weight | 11.6 – 17.5 kg (depending on cooling and controller configuration) |
| Cooling Options | Air-cooled or water-cooled |
| Protection Rating | IP54 |
| Certifications | Semiconductor S2, UL/cUL, CSA |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Model | HiPace 450 |
| Pump Type | Oil-Free Turbo Molecular Pump |
| Nitrogen Pumping Speed | 380 L/s |
| Hydrogen Pumping Speed | 340 L/s |
| Helium Pumping Speed | 380 L/s |
| Ultimate Pressure | ≤1×10⁻¹¹ mbar (with suitable forevacuum) |
| Compression Ratio (N₂) | >10¹¹ |
| Compression Ratio (H₂) | >10⁷ |
| Max. Inlet Gas Load (N₂) | 2 mbar·L/s |
| Required Forevacuum | ≤10 mbar |
| Motor Frequency | 1100 Hz |
| Dimensions (H×D) | 187×180 mm |
| Weight | 7 kg |
| Flange | DN 160 ISO-K or CF-F |
| Controller Options | TC 110, TC 120, TC 400 |
| Compliance | SEMI S2, UL 61010-1, CSA C22.2 No. 61010-1, NEMA 12 |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Model | HiPace 60P |
| Pump Type | Oil-Free Turbo Molecular Pump |
| Pumping Speed (N₂) | 64 L/s |
| Ultimate Pressure | < 1 × 10⁻⁶ hPa |
| Cooling | Air or Water |
| Weight | 2.2 kg |
| Inlet Flange | DN 63 ISO-K |
| Outlet Flange | DN 16 ISO-KF |
| Integrated Controller | TC 110 |
| IP Rating | IP54 |
| Startup Time | 1.1 min |
| Compression Ratio (N₂) | 1 × 10⁶ |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Pump Type | Oil-Free Turbo Molecular Pump |
| Nominal Pumping Speed (N₂) | 64 L/s |
| Ultimate Pressure | < 1 × 10⁻⁶ hPa |
| Bearing System | Hybrid Ceramic Ball Bearings |
| Cooling | Convection, Optional Forced Air or Water Cooling (75 L/h, 5–25 °C) |
| Inlet Flange | DN 63 ISO-K |
| Exhaust Flange | DN 16 ISO-KF / G¼" |
| Drive Electronics | TC 110 or TC 110 RS (RS-485 Remote Interface) |
| Rated Speed | 90,000 rpm (±2%) |
| Startup Time | ≤1.1 min |
| IP Rating | IP54 |
| Weight | 2.2–2.3 kg |
| Compression Ratios (Ar/H₂/He/N₂) | 2×10⁶ / 2×10² / 3.5×10³ / 1×10⁶ |
| Max. Pre-vacuum (N₂) | 4 hPa |
| Gas Flow at Full Speed (N₂) | 9.2 hPa·L/s |
| Operating Voltage | 24 V DC (±5%) |
| Max. Permissible Magnetic Field | 4 mT |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Pump Type | Turbo Molecular Pump |
| Pumping Speed (N₂) | 685 L/s |
| Ultimate Pressure | < 5 × 10⁻¹⁰ hPa |
| Inlet Flange | DN 160 ISO-K / CF-F / ISO-F |
| Protection Rating | IP54 |
| Certifications | SEMI S2, UL/cUL, CSA |
| Cooling | Integrated Air Cooling |
| Controller Options | TC 400, TCP 350, Profibus-enabled variants |
| Weight | 11.5–17.4 kg |
| Startup Time | ≤ 6.5 min |
| Compression Ratio (N₂) | > 1 × 10¹¹ |
| Max. Starting Pressure (N₂) | < 1 × 10⁻² mbar |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Model | HiPace 700M |
| Pump Type | Oil-Free Turbomolecular Pump |
| Ultimate Pressure (N₂) | < 5 × 10⁻¹⁰ hPa |
| Weight | 20.8 kg |
| Nominal Pumping Speed (N₂) | 685 L/s |
| Inlet Flange | DN 160 ISO-K / CF-F / ISO-F (configurable) |
| Integrated Controller | TM 700 |
| Bearing System | 5-Axis Active Magnetic Bearings |
| Cooling | Integrated Water-Cooling Interface |
| Mounting | Omnidirectional (Any Orientation) |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | HiPace 80 Neo |
| Instrument Type | Turbomolecular Pump |
| Product Type | Oil-Free Pump |
| Pumping Speed (N₂) | 67 L/s |
| Ultimate Pressure | ≤2.2 × 10⁻⁸ mbar (typical in high vacuum, corrected from erroneous “22 mbar” — consistent with HiPace 80 Neo datasheet) |
| External Dimensions (W × H × D) | 97 × 86 × 129 mm |
| Weight | 1.7 kg |
| Motor Power Supply | 110 V AC, 50/60 Hz (integrated drive electronics) |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Model | HiPace 80 Neo |
| Pump Type | Turbo Molecular Pump |
| Oil-Free Operation | Yes |
| Pumping Speed (N₂) | 67 L/s |
| Ultimate Pressure | 5 × 10⁻¹⁰ mbar |
| Weight | 1.7 kg |
| Noise Level | ≤48 dB(A) |
| Certifications | UL, CSA, SEMI S2, IP54, NEMA 12 |
| Interface | RS-485, TC 80 controller compatible |
| Inlet Flange Options | DN 40 ISO-K, DN 63 ISO-K, DN 63 CF-F |
| N₂ Compression Ratio | 1 × 10¹¹ |
| H₂ Compression Ratio | 1.4 × 10⁵ |
| He Compression Ratio | 1.3 × 10⁷ |
| Ar Compression Ratio | 1 × 10¹¹ |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Pump Type | Oil-Free Turbo Molecular Pump |
| Model | HiPace 800 |
| Nominal Pumping Speed (N₂) | 790 L/s |
| Compression Ratio (N₂) | >1×10¹¹ |
| Ultimate Pressure (N₂) | <1×10⁻⁷ hPa |
| Maximum Starting Pressure (N₂) | 11 mbar |
| Gas Flow Rate (N₂, full speed) | 6.5–19.1 hPa·L/s |
| Startup Time | ≤2.8 min |
| Weight | 21 kg |
| Inlet Flange Options | DN 200 ISO-K / ISO-F / CF-F |
| Protection Rating | IP54 |
| Industrial Certifications | SEMI S2, UL/cUL, CSA |
| Controller Options | TC 400 or TCP 350 |
| Variant | HiPace 800P (enhanced particulate resistance) |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Pump Type | Oil-Free Turbo Molecular Pump |
| Bearing System | Hybrid (Ceramic Ball + Magnetic Assist) |
| Speed | Up to 90,000 rpm |
| Ultimate Pressure | < 1 × 10⁻⁷ hPa (N₂) |
| Compression Ratio (N₂) | > 1 × 10¹¹ |
| Pumping Speed Range | 10–260 L/s (N₂) |
| Cooling | Integrated Water Cooling |
| Inlet Flange | DN 25–100 (model-dependent) |
| Protection Class | IP54 |
| Certifications | SEMI S2, UL 61010-1, CE |
| Control Interface | Profibus, DeviceNet, or E74 (via TC 110 or TC 400 controller) |
| Mounting | Omnidirectional (0–360°) |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Model | HiScroll 12 |
| Pump Type | Oil-Free Dry Scroll |
| Pumping Speed | 12.1 m³/h |
| Ultimate Pressure | 6 × 10⁻³ hPa |
| Noise Level | 47 dB(A) |
| Weight | 24 kg |
| Inlet Flange | DN 25 ISO-KF |
| Operating Voltage | 100–127 / 200–240 V AC (±10%), 50/60 Hz |
| Protection Class | IP20 |
| Explosion-Proof Option | Ex II 3G Ex h IIC T4 Gc X (Ta: +5 °C to +40 °C) |