Tiger HALO 3 H₂O Trace Moisture Analyzer
| Origin | USA |
|---|---|
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | Tiger HALO 3 H₂O |
| Pricing | Upon Request |
Overview
The Tiger HALO 3 H₂O Trace Moisture Analyzer is a high-performance, cavity ring-down spectroscopy (CRDS)-based instrument engineered for ultra-sensitive, absolute quantification of water vapor in gaseous matrices. Developed by Tiger Optics — a Process Insights Company — the HALO 3 H₂O leverages patented CRDS technology to deliver real-time, calibration-free measurement of moisture at sub-part-per-trillion (ppt) to low-parts-per-billion (ppb) levels. Unlike conventional hygrometers relying on dew point, aluminum oxide, or tunable diode laser absorption with reference cells, this analyzer operates on first-principles optical physics: it measures the exponential decay time of laser light trapped within a high-finesse optical cavity, where water molecules absorb at a precisely targeted near-infrared wavelength (1368.59 nm). This fundamental photonic approach eliminates drift, removes dependence on zero/span gas standards, and ensures long-term stability without recalibration — critical for unattended operation in semiconductor fab environments, bulk gas production lines, and high-purity chemical synthesis processes.
Key Features
- Calibration-free, absolute moisture measurement via Cavity Ring-Down Spectroscopy (CRDS)
- Detection range spanning four orders of magnitude: 0.1 ppb to 10 ppm H₂O (v/v), with <±2% full-scale accuracy
- No consumables, no desiccant cartridges, no vacuum pumps, and no routine sensor maintenance
- Low sample flow requirement: 0.5–2.0 SLPM, minimizing loss of expensive or rare gases (e.g., Ar, Kr, Xe, NF₃)
- Chemically robust wetted path compatible with inert, corrosive (e.g., Cl₂, HCl, SiH₄), and toxic process gases
- Integrated temperature and pressure compensation with NIST-traceable internal reference
- Industrial-grade enclosure rated IP65, suitable for cleanroom, skid-mounted, and mobile laboratory deployment
Sample Compatibility & Compliance
The HALO 3 H₂O is validated for continuous monitoring across diverse gas matrices including ultra-high-purity nitrogen, argon, helium, hydrogen, oxygen, carbon dioxide, silane, ammonia, and fluorinated etchants. Its corrosion-resistant 316L stainless steel and Hastelloy C-276 flow path meet ASTM E2654-22 requirements for trace moisture analysis in electronic specialty gases. The analyzer supports compliance with SEMI F21-0322 (specifications for moisture in bulk electronic gases), ISO 8573-8:2019 (compressed air purity classes), and USP (water content in pharmaceutical gases). Data integrity features include audit trail logging, user access control, and optional 21 CFR Part 11-compliant software modules for regulated environments operating under GMP/GLP frameworks.
Software & Data Management
The HALO 3 H₂O ships with Tiger Optics’ proprietary Insight™ software suite, providing intuitive configuration, real-time spectral visualization, trend logging, and alarm management via Ethernet/IP or Modbus TCP. All measurements are timestamped and stored locally on an industrial SSD with >1-year data retention capacity. Raw decay-time spectra and processed H₂O concentration values are exportable in CSV/JSON formats for integration into MES, DCS, or SCADA platforms. Remote diagnostics, firmware updates, and secure TLS 1.2 communication ensure operational continuity and cybersecurity alignment with IEC 62443-3-3 standards.
Applications
- Real-time monitoring of moisture in bulk and specialty gas production (air separation units, cylinder filling stations)
- In-line verification of drying efficiency in gas purification skids and purifiers
- Process gas quality assurance in semiconductor front-end fabrication (etch, CVD, ALD tool gas lines)
- Environmental emissions monitoring of stack gases and scrubber effluents
- Research-grade moisture profiling in atmospheric simulation chambers and catalytic reaction studies
- Mobile verification of gas purity during field commissioning and leak investigation
FAQ
Does the HALO 3 H₂O require periodic calibration with certified moisture standards?
No. It performs absolute, physics-based measurement using CRDS and requires no calibration gas, zero gas, or span gas.
Can it measure moisture in chlorine or hydrogen fluoride?
Yes — its chemically inert flow path and non-contact optical detection enable safe, stable operation with aggressive and reactive gases.
What is the typical response time (T90) for a step change in moisture concentration?
<2 seconds for 0.1–10 ppm transitions, with configurable averaging for noise reduction in ultra-low-concentration applications.
Is the instrument suitable for Class 10 cleanroom installation?
Yes — it meets ISO 14644-1 Class 5 particulate limits when installed with appropriate inlet filtration and has no outgassing components.
How is data integrity ensured for regulatory submissions?
With optional 21 CFR Part 11 software, it provides electronic signatures, immutable audit trails, and role-based access control — fully aligned with FDA and EMA expectations for analytical instrumentation in GxP environments.
