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| Brand | ELLITOP |
|---|---|
| Origin | Beijing, China |
| Model | ESH |
| Spectral Range | 190–2500 nm (customizable) |
| Spot Size | ≤200 µm (customizable, down to 1 µm) |
| Angle of Incidence | Motorized auto-adjustment from 30° to 90° |
| manual fine-tuning range | 40°–90° |
| Single-Measurement Time | 3–5 s (full spectrum) |
| Sample Compatibility | Supports 150 mm (6″), 200 mm (8″), and 300 mm (12″) wafers |
| Measurement Capability | Nanoscale film thickness (sub-Å resolution), complex refractive index (n, k), dielectric function (ε₁, ε₂), bulk optical constants |
| Brand | ELLITOP |
|---|---|
| Origin | Beijing, China |
| Model | EP800 |
| Spectral Range | 245–1000 nm (customizable) |
| Incident Angles | 60° or 65° (selectable) |
| Measurement Repeatability | 0.01 nm |
| Brand | ELLITOP (Beijing Ellitop Technology Co., Ltd.) |
|---|---|
| Origin | Beijing, China |
| Model | EH300 |
| Wavelength Range | 380–800 nm |
| Thickness Measurement Range | 0.05 µm – 50 µm |
| Measurement Accuracy | ±2 nm or ±0.2% of reading (whichever is greater) |
| Brand | ELLITOP |
|---|---|
| Origin | Beijing, China |
| Model | ES01-PV |
| Spectral Range | 245–1000 nm (UV-Vis-NIR) |
| Spot Size | Manually adjustable, 1–4 mm diameter |
| Angle of Incidence | Manually adjustable, 40°–90° in 5° increments, repeatability ±0.02° |
| Single Measurement Time | 5–10 s for full Ψ/Δ spectrum acquisition |
| Brand | ELLITOP |
|---|---|
| Origin | Beijing, China |
| Model | EGS01 |
| Spectral Range | 190–25000 nm (expandable) |
| Single-Measurement Duration | 5–10 s (full spectrum), <5 s (fast mode) |
| Sample Size Compatibility | 4″, 6″, 8″, 12″ wafers (customizable) |
| Spectral Resolution | 0.5 nm (190–1000 nm), 3.5 nm (1000–2500 nm) |
| Thickness Measurement Accuracy | ≤ ±0.5 nm |
| Refractive Index Accuracy | ≤ ±0.005 |
| Brand | ELLITOP |
|---|---|
| Origin | Beijing, China |
| Model | EMPro-PV |
| Spot Size | <1 mm |
| Incident Angle Range | 40°–90° (manually adjustable in 5° increments) |
| Single-Measurement Time | 0.6 s (typical) |
| Brand | ELLITOP |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Authorized Distributor |
| Model | ES01 |
| Spectral Range | 190–25000 nm |
| Spot Size | Manually adjustable from 1–5 mm |
| Angle of Incidence | (A) Motorized variable: 30°–90° |
| (M) Manual variable | 40°–90° |
| Measurement Speed | ≤0.05 s per spectrum (fastest) |
| Single Measurement Time | 1–2 s |
| Sample Compatibility | Supports 4″, 6″, 8″, and 12″ wafers (custom substrates available) |
| Spectral Resolution | ≤0.45 nm (190–1000 nm), ≤3.5 nm (1000–1700 nm), ≤7 nm (1700–2500 nm) |
| Thickness Accuracy | ≤0.4 nm (measured on 100 nm SiO₂ on Si reference standard) |
| Thickness Repeatability | ±0.005 nm |
| Refractive Index Repeatability | ±0.0002 |
| Direct Beam Accuracy | Ψ = 45° ±0.075°, Δ = 0° ±0.05° (10 s averaging, ≥95% of spectral range) |
| Brand | ELLITOP |
|---|---|
| Origin | Beijing, China |
| Model | ET8100A |
| Measurement Principle | Spectroscopic Ellipsometry (SE) + Spectral Reflectometry (SR) |
| Wafer Diameter Options | 100 mm, 150 mm, 200 mm, 300 mm |
| Substrate Thickness Range (measurable) | up to 2000 µm |
| Film Thickness Range | 0.1 nm – 120 µm |
| Homogeneous Film Thickness Range (substrate = film material) | 0.3 µm – 30 µm |
| Compliance | ASTM F1530, ISO/IEC 17025 (when configured per lab accreditation requirements), supports GLP/GMP data integrity workflows |
| Brand | ELLITOP |
|---|---|
| Origin | Beijing, China |
| Model | EMPro |
| Incidence Angle Range | 40°–90° (manual adjustment in 5° increments) |
| Single-Measurement Time | ≤0.6 s (typical) |
| Measurement Principle | Null-ellipsometry with rotating analyzer (RA) configuration |
| Delta Range | 0°–360° continuous |
| Sensitivity | Sub-angstrom thickness resolution for ultra-thin films |
| Alignment System | Integrated high-resolution video auto-collimation stage |
| Software Architecture | Windows-based, compliant with FDA 21 CFR Part 11 audit trail requirements |
| Compliance | Supports ISO/IEC 17025-compliant calibration documentation and GLP/GMP traceable reporting |
| Brand | ELLITOP |
|---|---|
| Origin | Beijing, China |
| Model | EIS01 |
| Spectral Range (Vis) | 370–1000 nm |
| Incident Angle | Motorized variable from 30° to 90° |
| Single-Wavelength Measurement Time | ~15 s (configuration-dependent) |
| Thickness Repeatability | ±0.05 nm |
| Refractive Index Repeatability | ±0.001 |
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