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| Brand | Neocera |
|---|---|
| Origin | Finland |
| Model | PED-120 |
| Vacuum Chamber | 12" Ø |
| Base Pressure | <1×10⁻⁶ Torr |
| Substrate Heater | 2" diameter, 950 °C max, ±1 °C stability |
| Target Capacity | six 1" or three 2" targets |
| Target-to-Substrate Distance | 4" |
| Gas Flow Control | 100 sccm MFC (O₂-compatible) |
| Turbo Pump | 260 L/s with cryo-trap |
| Roughing Pump | 4 m³/hr oil-free rotary vane |
| Electron Source | PEBS-20, 8–20 kV, 0.1–0.8 J/pulse, ~100 ns pulse width, ≤15 Hz rep rate, beam spot ≥6×10⁻² cm², energy density up to 1.3×10⁸ W/cm² |
| Z-axis travel | 50 mm, XY-axis travel: ±20 mm |
| Operating Lifetime | ≥10⁷ pulses |
| Max PEBS Housing Temp | 85 °C |
| Origin | USA |
|---|---|
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | PLD |
| Pricing | Available Upon Request |
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