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| Brand | KLA |
|---|---|
| Origin | USA |
| Model | Profilm 3D |
| Measurement Principle | Vertical Scanning Interferometry (VSI) & Phase-Shifting Interferometry (PSI) |
| Thickness Range (VSI) | 50 nm – 100 mm |
| Thickness Range (PSI) | 0 – 3 µm |
| Reflectance Range | 0.05% – 100% |
| Piezo Scan Range | 500 µm |
| XY Stage Options | 100 mm × 100 mm or 200 mm × 200 mm |
| Compliance | ISO 25178-604, ISO 9000, ASME B46.1 |
| Roughness Parameters | 47 standardized (ASME Y14.36M, ISO 4287, ISO 25178-2) |
| Software | ProfilmOnline cloud-based analysis platform |
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